siepic_ebeam_pdk 0.4.9 0.27 SiEPIC EBeam PDK A Process Design Kit for Silicon Photonics fabricated using Electron Beam Lithography (UW, ANT, SiEPICfab) https://github.com/siepic/SiEPIC_EBeam_PDK/blob/master/README.md https://github.com/siepic/SiEPIC_EBeam.git/trunk/klayout Lukas Chrostowski, Jaspreet Jhoja, Mustafa Hammood, Brett Poulsen, Jonas Flueckiger, Rounak Singh Narde, Chris Zeqin Lu, Nathan Smith, Stefan Preble, Claudio Alarcon-Reyes GitHub: lukasc-ubc, jaspreetj, mustafacc, bpoulse, jfluecki, rounaksingh, luzeqin, nsmith5, StefanPreble, clalarco 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 MIT siepic_tools 0.5.4