{
 "cells": [
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "e54c1eca",
   "metadata": {},
   "outputs": [],
   "source": [
    "import viennaps as ps # Import the ViennaPS Python bindings\n",
    "ps.setDimension(3) # Set the simulation dimension to 3D"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "0aa6790f",
   "metadata": {},
   "outputs": [],
   "source": [
    "extent = 30\n",
    "gridDelta = 0.3\n",
    "\n",
    "# Create a simulation domain with square XY extent and specified grid spacing\n",
    "domain = ps.Domain(xExtent=extent, yExtent=extent, gridDelta=gridDelta, boundary=ps.BoundaryType.REFLECTIVE_BOUNDARY)"
   ]
  },
  {
   "cell_type": "markdown",
   "id": "5e5897f0",
   "metadata": {},
   "source": [
    "Add a rectangular [fin](https://viennatools.github.io/ViennaPS/geo/basic/fin.html) structure to the domain:\n",
    "- finWidth = 6 units\n",
    "- finHeight = 0 (just a mask feature)\n",
    "- maskHeight = 10 units (height of the resist/mask layer)"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "898f156c",
   "metadata": {},
   "outputs": [],
   "source": [
    "ps.MakeFin(domain, finWidth=6., finHeight=0., maskHeight=10.0).apply()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "19ba0ee1",
   "metadata": {},
   "outputs": [],
   "source": [
    "domain.show()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "fd59fbb9",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Save current geometry as volume mesh\n",
    "# domain.saveVolumeMesh(\"emulation_1\")\n",
    "domain.saveSurfaceMesh(\"emulation_1\", addInterfaces=True)"
   ]
  },
  {
   "cell_type": "markdown",
   "id": "a3a4072d",
   "metadata": {},
   "source": [
    "Run a deposition process using [IsotropicProcess](https://viennatools.github.io/ViennaPS/models/prebuilt/isotropic.html)."
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "69be2067",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Duplicate the top-level set and assign it to SiO2 material\n",
    "domain.duplicateTopLevelSet(ps.Material.SiO2) # add new material layer\n",
    "\n",
    "# Apply an isotropic deposition process (e.g., CVD)\n",
    "# with a constant rate of 1.0 for a duration of 4.0 time units\n",
    "isoDepo = ps.IsotropicProcess(rate=1.0)\n",
    "ps.Process(domain, isoDepo, 4.0).apply()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "9028bb27",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Save the structure after isotropic deposition\n",
    "domain.saveVolumeMesh(\"emulation_2\")\n",
    "domain.show()"
   ]
  },
  {
   "cell_type": "markdown",
   "id": "2b33e5a0",
   "metadata": {},
   "source": [
    "Etch the structure using a [DirectionalProcess](https://viennatools.github.io/ViennaPS/models/prebuilt/directional.html)."
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "4485ea88",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Apply directional (anisotropic) etching in Z direction\n",
    "# - This mimics vertical etching to remove top parts of the conformal layer\n",
    "# - calculateVisibility=False means no shadowing is considered\n",
    "matRates = ps.RateSet()\n",
    "matRates.direction = [0., 0., -1.]\n",
    "matRates.directionalVelocity = -1.0\n",
    "matRates.isotropicVelocity = 0.0\n",
    "matRates.calculateVisibility = False\n",
    "\n",
    "directionalEtch = ps.DirectionalProcess(matRates)\n",
    "ps.Process(domain, directionalEtch, 5.0).apply()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "0aeedcf7",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Save geometry after directional etch\n",
    "domain.saveVolumeMesh(\"emulation_3\")\n",
    "domain.show()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "874b371a",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Remove the original resist/mask material\n",
    "# This mimics stripping the mask after sidewall transfer\n",
    "domain.removeMaterial(ps.Material.Mask)\n",
    "domain.saveVolumeMesh(\"emulation_4\")\n",
    "domain.show()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "719842aa",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Final directional etch using the SiO2 sidewalls as a hardmask\n",
    "# - Directional component: 1.0 in Z\n",
    "# - Isotropic component: 0.1 to add some tapering\n",
    "# - Masking is enabled for SiO2\n",
    "directionalEtch = ps.DirectionalProcess(\n",
    "    direction=[0., 0., 1.],\n",
    "    directionalVelocity=1.0,\n",
    "    isotropicVelocity=0.0,\n",
    "    maskMaterial=ps.Material.SiO2,\n",
    "    calculateVisibility=False\n",
    ")\n",
    "ps.Process(domain, directionalEtch, 20.0).apply()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "a2f23dd0",
   "metadata": {},
   "outputs": [],
   "source": [
    "# Save the final result of the emulation\n",
    "domain.saveVolumeMesh(\"emulation_5\")\n",
    "domain.show()"
   ]
  },
  {
   "cell_type": "code",
   "execution_count": null,
   "id": "21b2f5b9",
   "metadata": {},
   "outputs": [],
   "source": []
  }
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