--- name: fib-mill-controller description: Focused Ion Beam milling skill for site-specific nanofabrication and cross-section preparation allowed-tools: - Read - Write - Glob - Grep - Bash metadata: specialization: nanotechnology domain: science category: fabrication priority: medium phase: 6 tools-libraries: - FIB pattern generators - Dual-beam workflow automation --- # FIB Mill Controller ## Purpose The FIB Mill Controller skill provides focused ion beam process control for site-specific nanofabrication and sample preparation, enabling precise material removal and deposition at the nanoscale. ## Capabilities - TEM lamella preparation - Nanoscale milling and deposition - Pattern writing and editing - Cross-section imaging - Gas-assisted etching/deposition - Damage minimization protocols ## Usage Guidelines ### FIB Processing 1. **TEM Lamella Preparation** - Deposit protective cap - Rough mill with high current - Fine polish to target thickness 2. **Nanofabrication** - Define pattern geometry - Optimize beam parameters - Minimize gallium implantation 3. **Circuit Editing** - Navigate to target location - Selective material removal - Metal deposition for reconnection ## Process Integration - Nanodevice Integration Process Flow - Multi-Modal Nanomaterial Characterization Pipeline ## Input Schema ```json { "operation": "lamella|milling|deposition|cross_section", "material": "string", "target_thickness": "number (nm, for lamella)", "pattern_file": "string (for milling)", "beam_voltage": "number (kV)" } ``` ## Output Schema ```json { "process_parameters": { "beam_current": "number (pA)", "dwell_time": "number (us)", "overlap": "number (%)" }, "milling_depth": "number (nm)", "lamella_thickness": "number (nm)", "damage_layer": "number (nm)", "processing_time": "number (minutes)" } ```