@article{McCaughan2021PHIDL,
    author  = {McCaughan, Adam N. and Tait, Alexander N. and Buckley, Sonia M. and Oh, Dylan M. and Chiles, Jeffrey T. and Shainline, Jeffrey M. and Nam, Sae Woo},
    title   = {PHIDL: Python-based layout and geometry creation for nanolithography},
    journal = {Journal of Vacuum Science \& Technology B},
    volume  = {39},
    number  = {6},
    pages   = {062601},
    year    = {2021},
    doi     = {10.1116/6.0001203},
    URL     = {https://doi.org/10.1116/6.0001203}
}