{ "@context": { "@version": 1.1, "schema": "https://schema.org/", "kla": "https://www.kla.com/vocabulary#", "skos": "http://www.w3.org/2004/02/skos/core#", "Organization": "schema:Organization", "name": "schema:name", "url": "schema:url", "description": "schema:description", "industry": "schema:industry", "foundingDate": "schema:foundingDate", "legalName": "schema:legalName", "sameAs": "schema:sameAs", "KLACorporation": { "@id": "https://www.kla.com", "@type": "schema:Organization", "schema:name": "KLA Corporation", "schema:legalName": "KLA Corporation", "schema:url": "https://www.kla.com", "schema:description": "Leader in process control and process-enabling solutions for semiconductor wafer and reticle manufacturing, integrated circuits, packaging, printed circuit boards, and flat panel displays.", "schema:industry": "Semiconductor Equipment and Process Control", "schema:foundingDate": "1975", "schema:sameAs": [ "https://www.linkedin.com/company/kla-corporation", "https://en.wikipedia.org/wiki/KLA_Corporation" ] }, "processControl": { "@id": "kla:processControl", "@type": "skos:Concept", "skos:prefLabel": "Process Control", "skos:definition": "Systems and techniques used to monitor, measure, and control semiconductor manufacturing processes to ensure wafers and devices meet specifications." }, "metrology": { "@id": "kla:metrology", "@type": "skos:Concept", "skos:prefLabel": "Metrology", "skos:definition": "Precision measurement of critical dimensions, film thickness, overlay accuracy, and other physical parameters on wafers and reticles." }, "waferInspection": { "@id": "kla:waferInspection", "@type": "skos:Concept", "skos:prefLabel": "Wafer Inspection", "skos:definition": "Automated optical or electron-beam scanning of silicon wafers to detect surface defects, particles, and pattern anomalies." }, "reticleInspection": { "@id": "kla:reticleInspection", "@type": "skos:Concept", "skos:prefLabel": "Reticle Inspection", "skos:definition": "High-precision inspection of photomasks used in photolithography to ensure they are free of defects." }, "overlay": { "@id": "kla:overlay", "@type": "skos:Concept", "skos:prefLabel": "Overlay", "skos:definition": "The alignment accuracy between successive lithographic layers printed on a wafer." }, "criticalDimension": { "@id": "kla:criticalDimension", "@type": "skos:Concept", "skos:prefLabel": "Critical Dimension", "skos:altLabel": "CD", "skos:definition": "The smallest feature size that must be accurately controlled in a semiconductor device." }, "yieldManagement": { "@id": "kla:yieldManagement", "@type": "skos:Concept", "skos:prefLabel": "Yield Management", "skos:definition": "Practices and systems used to maximize the percentage of functional chips produced from a semiconductor wafer." }, "computationalAnalytics": { "@id": "kla:computationalAnalytics", "@type": "skos:Concept", "skos:prefLabel": "Computational Analytics", "skos:definition": "Data analysis and machine learning algorithms applied to inspection and metrology data to identify patterns and optimize manufacturing processes." }, "defectClassification": { "@id": "kla:defectClassification", "@type": "skos:Concept", "skos:prefLabel": "Defect Classification", "skos:definition": "Automated categorization of detected defects by type, size, and origin using machine learning and image analysis." }, "advancedPackaging": { "@id": "kla:advancedPackaging", "@type": "skos:Concept", "skos:prefLabel": "Advanced Packaging", "skos:definition": "Semiconductor packaging techniques beyond traditional wire-bonding, including flip-chip, wafer-level packaging, and 2.5D/3D integration." }, "Product": "schema:Product", "InspectionSystem": { "@id": "kla:InspectionSystem", "@type": "schema:Product", "skos:definition": "A hardware and software system used to detect defects on semiconductor wafers or reticles." }, "MetrologyTool": { "@id": "kla:MetrologyTool", "@type": "schema:Product", "skos:definition": "Precision measurement equipment used to quantify physical properties of semiconductor structures." }, "WaferNode": { "@id": "kla:WaferNode", "skos:prefLabel": "Wafer", "skos:definition": "A thin slice of semiconductor material used as the substrate for microelectronic devices." }, "ReticleNode": { "@id": "kla:ReticleNode", "skos:prefLabel": "Reticle", "skos:altLabel": "Photomask", "skos:definition": "A glass plate containing the circuit pattern for a single chip layer, used in photolithography to expose wafer resist." } } }