Element,File path,Instrument,Dwell [msec],Probe current [A],Start X [mm],Start Y [mm],Step size [um],Steps X,Steps Y,dead time [ns]
Si,.map/1/1_map.txt,JXA-DUMMY,100,1E-07,0,0,5,100,100,0
Mg,.map/1/2_map.txt,,,,,,,,,