DiProMag Ontology
type: Ontology
comment: An Ontolgoy for the Digitization of a process chain for the production, characterization and prototypical application of magnetocaloric alloys. This ontology was modelled via OTTR Templates and is automatically generated. You can find the templates under the URL: https://www.dipromag.de/ottr-templates/
bibliographic citation: Insights from an OTTR-centric Ontology Engineering Methodology. M Blum, B Ell, P Cimiano - arXiv preprint arXiv:2309.13130, 2023
created: 2023-12-18
contributor: Andreas Hütten
contributor: Günter Reiss
contributor: Philipp Cimiano
contributor: Luana Caron
contributor: Tapas Samanta
contributor: Inga Ennen
contributor: Basil Ell
contributor: Moritz Blum
contributor: Christian Schröder
contributor: Sonja Schöning
contributor: Simon Bekemeier
contributor: Lennart Schwan
contributor: Michael Feige
contributor: Martin Wortmann
contributor: Thomas Hilbig
contributor: Alisa Chirkova
creator: Moritz Blum
creator: Basil Ell
license: https://creativecommons.org/licenses/by/4.0/legalcode
version info: 1.0.0

Co2CrAl
type: ChemicalComposition
composed of: Element
  characteristic: Measurement
    value: 0.5
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Co
composed of: Element
  characteristic: Measurement
    value: 0.25
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Cr
composed of: Element
  characteristic: Measurement
    value: 0.25
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Al

Atomic Percent
subclass of: Unit
type: MassFraction
subclass of: MassFraction

MnNi0.6Co0.4Ge0.97Al0.03
type: ChemicalComposition
composed of: Element
  characteristic: Measurement
    value: 12
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Mn
composed of: Element
  characteristic: Measurement
    value: 0.6
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Ni
composed of: Element
  characteristic: Measurement
    value: 0.4
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Co
composed of: Element
  characteristic: Measurement
    value: 0.97
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Ge
composed of: Element
  characteristic: Measurement
    value: 0.03
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Al

MnNi0.8Co0.2Ge0.97Al0.03
type: ChemicalComposition
composed of: Element
  characteristic: Measurement
    value: 1
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Mn
composed of: Element
  characteristic: Measurement
    value: 0.8
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Ni
composed of: Element
  characteristic: Measurement
    value: 0.2
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Co
composed of: Element
  characteristic: Measurement
    value: 0.97
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Ge
composed of: Element
  characteristic: Measurement
    value: 0.03
    type: ChemicalComposition
    unit: Atomic Percent
  relates to element: Al

Heat Cycles Number
subclass of: ValueObject

PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a
characteristic: Atmosphere
  type: SetPoint
  relates to composition: He
characteristic: SetPoint
  value: 373
  type: Max. Temperature
  unit: http://qudt.org/vocab/K
type: DSCMeasuringProcess
characteristic: SetPoint
  value: 1.67E-8
  type: GasFlow
  unit: M3 divby SEC
input: Specimen
  composed of: BulkSampleTS2022-11-03-a-AM-a
  characteristic: Measurement
    value: 0.00001024
    type: Mass
    unit: KiloGM
characteristic:
  value: T zero
characteristic: SetPoint
  value: 0.33
  type: dT
  unit: K divby SEC
characteristic: SetPoint
  value: 143
  type: Min. Temperature
  unit: http://qudt.org/vocab/K
output:
  characteristic: Measurement
    value: 248.45
    type: T c heating
    unit: http://qudt.org/vocab/K
  characteristic: Measurement
    value: 241.18
    type: T c cooling
    unit: http://qudt.org/vocab/K
  characteristic: Measurement
    value: 11980
    type: LatentHeat Cooling
    unit: J divby kg
  characteristic: Measurement
    value: 7.27
    type: d T hyst
    unit: http://qudt.org/vocab/K
  characteristic: Measurement
    value: 12335
    type: LatentHeat Heating
    unit: J divby kg

M3 divby SEC
subclass of: Unit

Max. Temperature
subclass of: Temperature
label: Max Temperature

dT
subclass of: ValueObject

Min. Temperature
subclass of: Temperature

GasFlow
subclass of: ValueObject

K divby SEC
subclass of: Unit

DSC MeasuringProcess
subclass of: MeasuringProcess

J divby kg
subclass of: Unit

LatentHeat
subclass of: ValueObject

LatentHeat Cooling
subclass of: LatentHeat

LatentHeat Heating
subclass of: LatentHeat

Heat Capacity Data
subclass of: ValueObject

Measurement Time
subclass of: Time

Probe Current
subclass of: ElectricCurrent

Spot Diameter
subclass of: Diameter

EDXThinFilmSampleMW20221125a anneal
characteristic: SetPoint
  value: 2270
  type: Counting Rate
  unit: HZ
input: Specimen
  composed of: ThinFilmSampleMW20221125a anneal
characteristic: SetPoint
  value: 2000
  type: Acceleration Voltage
  unit: http://qudt.org/vocab/V
characteristic: SetPoint
  value: 5E-9
  type: Field of View
  unit: M2
type: EDXMeasuringProcess
characteristic: SetPoint
  value: 2E-9
  type: Probe Current
  unit: http://qudt.org/vocab/A
characteristic: SetPoint
  value: 100
  type: Measurement Time
  unit: SEC
characteristic: SetPoint
  value: 0
  type: Spot Diameter
  unit: http://qudt.org/vocab/M
executed by: EDX
subordinate process: EDXPointMeasuringProcess
  characteristic:
    value: false
  characteristic: Measurement
    composed of: Element
      relates to element: Co
      characteristic: Measurement
        value: 0.398
        type: ChemicalCompositionStd
        unit: Atomic Percent
      characteristic: Measurement
        value: 49.319
        type: ChemicalCompositionMean
        unit: Atomic Percent
    composed of: Element
      relates to element: Cr
      characteristic: Measurement
        value: 0.385
        type: ChemicalCompositionStd
        unit: Atomic Percent
      characteristic: Measurement
        value: 24.173
        type: ChemicalCompositionMean
        unit: Atomic Percent
    composed of: Element
      relates to element: Al
      characteristic: Measurement
        value: 0.415
        type: ChemicalCompositionStd
        unit: Atomic Percent
      characteristic: Measurement
        value: 26.508
        type: ChemicalCompositionMean
        unit: Atomic Percent

EDX Measuring Process
subclass of: MeasuringProcess

Acceleration Voltage
subclass of: Voltage

Counting Rate
subclass of: Frequency

EDX
subclass of: MeasuringDevice

Field of View
subclass of: Area

ChemicalComposition Std
subclass of: ChemicalComposition

ChemicalComposition Mean
subclass of: ChemicalComposition

EDX Point Measuring Process
subclass of: MeasuringProcess

Co 2p1/2
characteristic: SetPoint
  value: 700
  type: EnergyLoss
  unit: EV
characteristic: SetPoint
  value: 1
  type: Exposure Time
  unit: SEC
characteristic: SetPoint
  value: 200
  type: Acceleration Voltage
  unit: http://qudt.org/vocab/V
characteristic: SetPoint
  value: 0
  type: Angle
  unit: DEG
characteristic:
  value: true
characteristic: SetPoint
  value: 25
  type: Slit Width
  unit: EV
executed by: EELS
  type: Slit EELS
type: EELS Measuring Process
characteristic: SetPoint
  value: 70
  type: Convergence Semi
  unit: DEG
characteristic: SetPoint
  value: 5
  type: Entrance Aperture
  unit: http://qudt.org/vocab/M
characteristic: SetPoint
  value: 0.5
  type: Dispersion
  unit: EV
characteristic: SetPoint
  value: 7.5
  type: Probe Current
  unit: http://qudt.org/vocab/A
characteristic: SetPoint
  value: 20
  type: MeasurementTemperature
  unit: http://qudt.org/vocab/K
type: EELS Energy Loss Measuring Process
output:
  characteristic: Measurement
    value: 25
    type: Intensity Relative to Sub-Spectrum
    unit: EV
  characteristic: Measurement
    value: 796
    type: Peak Binding Energy
    unit: EV
type: XRF Measuring Process
input: Specimen
  composed of: ExampleTF
characteristic: SetPoint
  value: 100
  type: Source Current
  unit: http://qudt.org/vocab/A
characteristic: SetPoint
  value: 0.2
  type: Source Current
  unit: EV
executed by: XRF
characteristic: SetPoint
  value: 25
  type: Source Voltage
  unit: http://qudt.org/vocab/V
output:
  composed of: Element
    characteristic: Measurement
      value: 50.4
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Co
  composed of: Element
    characteristic: Measurement
      value: 25.3
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Cr
  composed of: Element
    characteristic: Measurement
      value: 24.3
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Al
  characteristic: SetPoint
    value: 10.1
    type: Measured Thickness
    unit: http://qudt.org/vocab/M
  relates to composition: SiO2
  characteristic: SetPoint
    value: 10
    type: Nominal Thickness
    unit: http://qudt.org/vocab/M
  characteristic: SetPoint
    value: 7.2
    type: Sample Density
    unit: KG divby M3

Exposure Time
subclass of: Time

EELS Mode
subclass of: Mode

Slit Inserted
subclass of: ValueObject

EnergyLoss
subclass of: Energy

EELS Measuring Process
subclass of: MeasuringProcess

Convergence Semi
subclass of: ValueObject

Entrance Aperture
subclass of: ValueObject

Slit EELS
subclass of: MeasuringDevice

Dispersion
subclass of: ValueObject

Slit Width
subclass of: Energy

EELS Energy Loss Measuring Process
subclass of: EELS Measuring Process
subclass of: MeasuringProcess

Peak Binding Energy
subclass of: ValueObject

Intensity Relative to Sub-Spectrum
subclass of: ValueObject

reference to Prior Experiments Description
sub property of: comment

Goal
subclass of: Process

reference for Comparison
sub property of: input

GoalsAndAmbitionsTS20230606a
type: Goal
has Applicable Methods Description: Elemental substitution
has Intention Description: enlarge change of magnetization when encountering small temperature change -> large magnetocaloric effect -> transfer more thermal energy from heating to cooling -> cooling application like refrigerator
has Results: MnNi0.6Co0.4Ge0.97Al0.03
has Results: MnNi0.8Co0.2Ge0.97Al0.03
has Goal Descripton: first-order magnetic transition near room-temperature
has Applicable Methods: CompositionModificationTS20230606a
has Reason Description: from the substitution of Co for Ni you can expect higher magnetization
has Reason Description: A small amount of Al substitution for Ge can lower the structural transition, resulting in a coupled first-order magnetostructural transition has been realized in MnNi1-xCoxGe0.97Al0.03
reference to Prior Experiments Description: Nizioł S, Bombik A, Bażela W, Szytuła A and Fruchart D 1982 Magnetic phase diagram of CoxNi1-xMnGe Solid State Commun. 42 79 https://doi.org/10.1016/0038-1098(82)90356-8
reference to Prior Experiments Description: Tapas Samanta, Igor Dubenko, Abdiel Quetz, Samuel Temple, Shane Stadler, Naushad Ali; Magnetostructural phase transitions and magnetocaloric effects in MnNiGe1−xAlx. Appl. Phys. Lett. 2012; 100 052404. https://doi.org/10.1063/1.3681798
reference for Comparison Description: Dan’kov S Y, Tishin A M, Pecharsky V K and Gschneidner K A 1998 Magnetic phase transitions and the magnetothermal properties of gadolinium Phys. Rev. B 57 3478 https://doi.org/10.1103/PhysRevB.57.3478

has Results
sub property of: output

has Intention Description
sub property of: comment

has Applicable Methods
sub property of: input

reference to Prior Experiments
sub property of: input

has Reason Description
sub property of: comment

reference for Comparison Description
sub property of: hasReferenceToPriorExperimentsDescription

has Goal Descripton
sub property of: comment

has Applicable Methods Description
sub property of: comment

Composition Modification Process
subclass of: Process

composition Modification
sub property of: characteristic

substituted
sub property of: composition Modification

inserted
sub property of: composition Modification

CompositionModificationTS20230606a
type: Composition Modification Process
inserted: Element
  relates to element: Co
  characteristic: Metadata
    value: 13.33
    type: ChemicalComposition
    unit: Atomic Percent
inserted: Element
  relates to element: Al
  characteristic: Metadata
    value: 1.00
    type: ChemicalComposition
    unit: Atomic Percent
input: MnNiGe
substituted: Element
  relates to element: Ni
  characteristic: Metadata
    value: 20.00
    type: ChemicalComposition
    unit: Atomic Percent
substituted: Element
  relates to element: Ge
  characteristic: Metadata
    value: 32.33
    type: ChemicalComposition
    unit: Atomic Percent
output: MnNi0.6Co0.4Ge0.97Al0.03

CompositionModificationTS20230606b
type: Composition Modification Process
inserted: Element
  relates to element: Co
  characteristic: Metadata
    value: 6.67
    type: ChemicalComposition
    unit: Atomic Percent
inserted: Element
  relates to element: Al
  characteristic: Metadata
    value: 1.00
    type: ChemicalComposition
    unit: Atomic Percent
input: MnNiGe
substituted: Element
  relates to element: Ni
  characteristic: Metadata
    value: 26.67
    type: ChemicalComposition
    unit: Atomic Percent
substituted: Element
  relates to element: Ge
  characteristic: Metadata
    value: 32.33
    type: ChemicalComposition
    unit: Atomic Percent
output: MnNi0.8Co0.2Ge0.97Al0.03

Powder
subclass of: Material Shape

Slab
subclass of: Material Shape

PressureCell CuBe10
subclass of: PressuteCell

Piece
subclass of: Material Shape

Magnetic Properties Measuring Process
comment: Neasuring Process to measure the magnetic properties of a material sample.
subclass of: MeasuringProcess

PressureCell CuBe8
subclass of: PressuteCell

Holder
comment: Holder that holds a sample in place during measurement or synthesis.
subclass of: ProcessingNode

Pyrex
subclass of: Holder

MPMS
subclass of: MeasuringDevice

PressureCell NiCrAl
subclass of: PressuteCell

Perpendicular
subclass of: Orientation

Disc
subclass of: Material Shape

Meedle
subclass of: Material Shape

Field Cycle Number
subclass of: ValueObject

Straw
subclass of: Holder

MPMS3
subclass of: MPMS

Quarts
subclass of: Holder

Brass
subclass of: Holder

Magnetic Moment Component
subclass of: ValueObject
comment: Direction of a magnetic field.

Transverse Magnetic Moment Component
subclass of: Magnetic Moment Component

Parallel
subclass of: Orientation

Logitudinal Magnetic Moment Component
subclass of: Magnetic Moment Component

MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a
characteristic: SetPoint
  value: 0
  type: Force
  unit: http://qudt.org/vocab/N
input: Specimen
  characteristic:
    value: false
  composed of: BulkSampleTS2022-11-03b-AM-a
  characteristic: Measurement
    value: 0.00000857
    type: Mass
    unit: KiloGM
type: MagneticPropertiesMeasuringProcess
executed by: MPMS

Orientation
subclass of: ValueObject
comment: Orientation of an object.

Material Shape
comment: Physical shape of a material sample, e.g. piece or powder.

LongDirectionParallel
subclass of: Parallel

VSM
subclass of: MeasuringDevice

PressuteCell
subclass of: Holder

characteristic: T range isoB
  type: T_range isoB
  type: SetPoint
  range start:
    characteristic: T range isoB
      value: 7
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: T range isoB
      value: 5.5
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: T range isoB
      value: 0.5
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: T range isoB
  type: T_range isoB
  type: SetPoint
  range start:
    characteristic: T range isoB
      value: 5
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: T range isoB
      value: 2
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: T range isoB
      value: 0.2
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: T range isoB
  type: T_range isoB
  type: SetPoint
  range start:
    characteristic: T range isoB
      value: 1.9
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: T range isoB
      value: 0.1
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: T range isoB
      value: 0.1
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: T range isoB
  type: T_range isoB
  type: SetPoint
  range start:
    characteristic: T range isoB
      value: 0.01
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: T range isoB
      value: 0.01
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: T range isoB
      value: 0
      type: T_range isoB
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: SetPoint
  value: 2
  type: T_step isoB
  unit: http://qudt.org/vocab/K
characteristic: B range
  type: SetPoint
  range start:
    characteristic: B range
      value: 7
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B range
      value: 5.5
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B range
      value: 0.5
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B range
  type: SetPoint
  range start:
    characteristic: B range
      value: 5
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B range
      value: 2
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B range
      value: 0.2
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B range
  type: SetPoint
  range start:
    characteristic: B range
      value: 1.9
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B range
      value: 0.1
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B range
      value: 0.1
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B range
  type: SetPoint
  range start:
    characteristic: B range
      value: 0.01
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B range
      value: 0.01
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B range
      value: 0
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: SetPoint
  value: 260
  value: 340
  type: dT/dt isoB
  unit: K divby SEC

dT/dt isoB
subclass of: ValueObject

T_range isoB
subclass of: Range

T_step isoB
subclass of: ValueObject

Magnetic PropertiesMeasuring Process Isofield
subclass of: Magnetic Properties Measuring Process

B range
subclass of: Range

MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a
characteristic: B step isoT
  type: B_step isoT
  type: SetPoint
  range start:
    characteristic: B step isoT
      value: 7
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B step isoT
      value: 5.5
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B step isoT
      value: 0.5
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B step isoT
  type: B_step isoT
  type: SetPoint
  range start:
    characteristic: B step isoT
      value: 5
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B step isoT
      value: 2
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B step isoT
      value: 0.2
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B step isoT
  type: B_step isoT
  type: SetPoint
  range start:
    characteristic: B step isoT
      value: 1.9
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B step isoT
      value: 0.1
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B step isoT
      value: 0.1
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: B step isoT
  type: B_step isoT
  type: SetPoint
  range start:
    characteristic: B step isoT
      value: 0.01
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: B step isoT
      value: 0.01
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: B step isoT
      value: 0
      type: B_step isoT
      type: SetPoint
      unit: http://qudt.org/vocab/T
  type: Range
characteristic: Temperature
  type: SetPoint
  range start:
    characteristic: Temperature
      value: 7
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: Temperature
      value: 5.5
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: Temperature
      value: 0.5
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: Temperature
  type: SetPoint
  range start:
    characteristic: Temperature
      value: 5
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: Temperature
      value: 2
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: Temperature
      value: 0.2
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: Temperature
  type: SetPoint
  range start:
    characteristic: Temperature
      value: 1.9
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: Temperature
      value: 0.1
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: Temperature
      value: 0.1
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
characteristic: Temperature
  type: SetPoint
  range start:
    characteristic: Temperature
      value: 0.01
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: Temperature
      value: 0.01
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: Temperature
      value: 0
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range
type: Magnetic Properties Measuring Process Isothermal
characteristic: Reset T H cool
  characteristic: SetPoint
    value: 260
    type: Temperature
    unit: http://qudt.org/vocab/K
  characteristic: SetPoint
    value: 340
    type: MagneticField
    unit: http://qudt.org/vocab/T
  type: Reset T_H_cool
characteristic: Reset T H heat
  characteristic: SetPoint
    value: 260
    type: Temperature
    unit: http://qudt.org/vocab/K
  characteristic: SetPoint
    value: 340
    type: MagneticField
    unit: http://qudt.org/vocab/T
  type: Reset T_H_heat

B_step isoT
subclass of: ValueObject

range step
range: ValueObject
domain: Range

Reset T_H_heat
subclass of: Reset T H

range start
range: ValueObject
domain: Range

Magnetic Properties Measuring Process Isothermal
subclass of: Magnetic Properties Measuring Process

Reset T_H_cool
subclass of: Reset T H

range end
range: ValueObject
domain: Range

Range
subclass of: ValueObject
comment: A range consists of three values: start, end, and step.

Reset T_H
subclass of: SetPoint

intended Compound
sub property of: composedOf

MnNi0.6Co0.4Ge0.97Al0.03
intended Compound: MnNi0.6Co0.4Ge0.97Al0.03
characteristic: SetPoint
  value: 0.0032595867
  type: Mass
  unit: KiloGM
type: Sample Bulk Compound
composed of:
  characteristic: Measurement
    value: 0.999
    type: Purity
    unit: PERCENT
  relates to element: Mn
composed of:
  characteristic: Measurement
    value: 0.999
    type: Purity
    unit: PERCENT
  relates to element: Ni
composed of:
  characteristic: Measurement
    value: 0.999
    type: Purity
    unit: PERCENT
  relates to element: Co
composed of:
  characteristic: Measurement
    value: 0.999
    type: Purity
    unit: PERCENT
  relates to element: Ge
composed of:
  characteristic: Measurement
    value: 0.999
    type: Purity
    unit: PERCENT
  relates to element: Al

Sample Bulk Compound
subclass of: Sample

Synthesis Process
subclass of: ManufactureProcess

characteristic: SetPoint
  value: 0.00098735
  type: Target Mass
  unit: KiloGM
characteristic: Measurement
  value: -1E-8
  type: Mass Deviation
  unit: KiloGM
characteristic: Measurement
  value: 0.00098736
  type: Actual Mass
  unit: KiloGM

Mass Deviation
subclass of: Mass

Target Mass
subclass of: Mass

Actual Mass
subclass of: Mass

Purity
subclass of: ValueObject

characteristic: SetPoint
  value: 0.00062052
  type: Target Mass
  unit: KiloGM
characteristic: Measurement
  value: 1E-7
  type: Mass Deviation
  unit: KiloGM
characteristic: Measurement
  value: 0.00062042
  type: Actual Mass
  unit: KiloGM

characteristic: SetPoint
  value: 0.00041538
  type: Target Mass
  unit: KiloGM
characteristic: Measurement
  value: 0
  type: Mass Deviation
  unit: KiloGM
characteristic: Measurement
  value: 0.00041538
  type: Actual Mass
  unit: KiloGM

characteristic: SetPoint
  value: 0.00124147
  type: Target Mass
  unit: KiloGM
characteristic: Measurement
  value: 7E-8
  type: Mass Deviation
  unit: KiloGM
characteristic: Measurement
  value: 0.00124140
  type: Actual Mass
  unit: KiloGM

characteristic: SetPoint
  value: 0.00001423
  type: Target Mass
  unit: KiloGM
characteristic: Measurement
  value: 1E-8
  type: Mass Deviation
  unit: KiloGM
characteristic: Measurement
  value: 0.00001422
  type: Actual Mass
  unit: KiloGM

Oxid Layer Thickness
subclass of: Thickness

ThinFilmSubstratMgO5e-3
type: Sample Thin Film Substrate Layer
characteristic: Measurement
  value: 0.5E-3
  type: Substrat Layer Thickness
  unit: http://qudt.org/vocab/M
intended Compound: MgO
characteristic: Measurement
  value: 5E-3
  type: SubstratDimension
  unit: http://qudt.org/vocab/M
characteristic: Measurement
  value: 0.5E-3
  type: Oxid Layer Thickness
  unit: http://qudt.org/vocab/M
type: Substrate

Substrat Layer Thickness
subclass of: Thickness

Sample Thin Film Substrate Layer
subclass of: Sample

Nominal Thickness
subclass of: Nominal
subclass of: Thickness

ThinFilmLayerCo2CrAl60e-9
type: Sample Thin Film Layer
characteristic: SetPoint
  value: 60E-9
  type: Nominal Thickness
  unit: http://qudt.org/vocab/M
intended Compound: Co2CrAl
type: Heusler

SputterParameters Co2CrAl a
type: Thin Film Synthesis Process
characteristic:
  characteristic: SetPoint
    value: 31.1
    type: Source Tilt Angle
    unit: DEG
  characteristic: SetPoint
    value: 66
    type: Power
    unit: http://qudt.org/vocab/W
  input: SputterSourceCo2a
  characteristic: SetPoint
    value: 0.253
    type: Distance Source to Sample
    unit: http://qudt.org/vocab/M
characteristic: SetPoint
  value: 0.47
  type: Expected Deposition Rate
  unit: ANGSTROM divby SEC
characteristic: SetPoint
  value: 2E-3
  type: Process Pressure
  unit: PA
characteristic: SetPoint
  value: 1274
  type: Deposition Time
  unit: SEC
characteristic: SetPoint
  value: 600.0
  type: Substrate Temperature
  unit: http://qudt.org/vocab/K
characteristic: SetPoint
  value: 8E-10
  type: Base Pressure
  unit: PA
type: Sputtering
input:
  characteristic: Atmosphere
    type: SetPoint
    relates to composition: Ar
characteristic: SetPoint
  value: 30
  type: Initial Pre-Sputter Time
  unit: SEC
characteristic:
  value: true

Thin Film Synthesis Process
type: Synthesis Process

Sample Thin Film Layer
subclass of: Sample

has Thin Film Layer
sub property of: composedOf

Co2CrAl_46
label: LC20240103
has Thin Film Layer: ThinFilmSubstratMgO5e-3
has Thin Film Layer: ThinFilmLayerCo2CrAl60e-9
type: Sample Thin Film

Sample Thin Film
subclass of: Sample

Crushing
subclass of: ManufactureProcess

CrushingExampleName
characteristic: SetPoint
  value: 10
  type: Milling Break Time
  unit: SEC
characteristic: SetPoint
  value: 5
  type: Rotation Speed
  unit: HZ
characteristic: Measurement
  value: 1
  type: Sample to Ball Ratio
  unit: RatioScale
characteristic: SetPoint
  value: 10
  type: Milling Cycle Time
  unit: SEC
characteristic: SetPoint
  value: 5
  type: Rotation Speed
  unit: HZ
input:
  characteristic: SetPoint
    value: 0.02
    type: SampleMass
    unit: KiloGM
input:
  characteristic: SetPoint
    value: 5e-4
    type: Ball Diameter
    unit: http://qudt.org/vocab/M
  characteristic: Atmosphere
    type: SetPoint
    relates to composition: He
input: ExampleJar
type: Crushing

Rotation Speed
subclass of: Frequency

Sample to Ball Ratio
subclass of: RatioScale

Milling Break Time
subclass of: Time

Milling Cycle Time
subclass of: Time

Ball Diameter
subclass of: Diameter

Sample Mass
subclass of: Mass

ExampleJar
type: Co
characteristic: SetPoint
  value: 0.001
  type: Weight
  unit: M3
type: Ball Milling Jar
intended Compound: ExampleComposition

Sample Container
subclass of: ProcessingNode

Melt
subclass of: ManufactureProcess

Duration
subclass of: Time

ExampleQuartzMelt
characteristic:
  characteristic: SetPoint
    value: 10
    type: RampStart
    unit: http://qudt.org/vocab/K
characteristic:
  characteristic: SetPoint
    value: 20
    type: RampEnd
    unit: http://qudt.org/vocab/K
type: Quartz Melt
output:
  characteristic: SetPoint
    value: 9
    type: SampleMass
    unit: KiloGM
characteristic: SetPoint
  value: 10
  type: Pressure
  unit: PA
characteristic:
  value: some quench
characteristic:
  characteristic: SetPoint
    value: 10
    type: SampleMass
    unit: KiloGM
characteristic:
  characteristic: Atmosphere
    type: SetPoint
    relates to composition: Ar
characteristic:
  value: some example container

characteristic: SetPoint
  value: 100
  type: Duration
  unit: SEC

Ramp Start
subclass of: Temperature

Quartz Melt
subclass of: Melt

Ramp End
subclass of: Temperature

Ball Milling Jar
subclass of: ProcessingNode

characteristic: SetPoint
  value: 20000
  type: Pressure
  unit: PA
characteristic: SetPoint
  value: 50
  type: Current
  unit: http://qudt.org/vocab/A
output:
  characteristic: SetPoint
    value: 0.002998
    type: SampleMass
    unit: KiloGM
characteristic: SetPoint
  value: 3
  type: Repetition
  unit: http://qudt.org/vocab/A

Arc Melt
subclass of: Melt

SynthesisArcMeltBulk-BulkSampleTS2022-11-03-a-a
input:
  characteristic: SetPoint
    value: 0.003
    type: SampleMass
    unit: KiloGM
input:
  characteristic: Atmosphere
    type: SetPoint
    relates to composition: Ar
input:
  characteristic:
    value: Cu

characteristic: SetPoint
  value: 20000
  type: Pressure
  unit: PA
characteristic: SetPoint
  value: 50
  type: Current
  unit: http://qudt.org/vocab/A
output:
  characteristic: SetPoint
    value: 0.0029781
    type: SampleMass
    unit: KiloGM
characteristic: SetPoint
  value: 3
  type: Repetition
  unit: http://qudt.org/vocab/A

SynthesisArcMeltBulk-BulkSampleTS2022-11-03-a-b
input:
  characteristic: SetPoint
    value: 0.003
    type: SampleMass
    unit: KiloGM
input:
  characteristic: Atmosphere
    type: SetPoint
    relates to composition: Ar
input:
  characteristic:
    value: Cu

Base Pressure
subclass of: Pressure

Process Pressure
subclass of: Pressure

ANGSTROM divby SEC
subclass of: Unit

Initial Pre-Sputter Time
subclass of: Time

Distance Source to Sample
subclass of: Distance

Magnetic Field Above Target
subclass of: MagneticField

Source Tilt Angle
subclass of: Angle

Homogeneity Mechanism
subclass of: ManufacturingProcess

Substrate Temperature
subclass of: Temperature

Sputtering
subclass of: ManufactureProcess

Expected Deposition Rate
subclass of: ValueObject

Deposition Time
subclass of: Time

characteristic: SetPoint
  value: 123
  type: Deposition Rate
  unit: PA
characteristic: SetPoint
  value: 14
  type: Base Pressure
  unit: PA
characteristic: SetPoint
  value: 44
  type: BasePresDepositionTimesure
  unit: PA
characteristic: SetPoint
  value: 20
  type: Process Pressure
  unit: PA
characteristic: SetPoint
  value: 244
  type: Source Temperature
  unit: PA

Source Temperature
subclass of: Temperature

ExampleMBEParameter
characteristic: SetPoint
  value: 200
  type: Substrate Temperature
  unit: http://qudt.org/vocab/K
characteristic: SetPoint
  value: 245
  type: Distance Source to Sample
  unit: http://qudt.org/vocab/M
type: MBE Process
characteristic:
  input: ExampleSource1
  characteristic: SetPoint
    value: 43
    type: Source Tilt Angle
    unit: DEG
characteristic:
  input: ExampleSource2
  characteristic: SetPoint
    value: 47
    type: Source Tilt Angle
    unit: DEG

Deposition Rate
subclass of: ValueObject

MBE Process
subclass of: ManufactureProcess

SputterSourceCo2a
intended Compound: Co
characteristic: SetPoint
  value: 0.0508
  type: Diameter
  unit: http://qudt.org/vocab/M
type: Sputter Source
characteristic: SetPoint
  value: 0.999
  type: Purity
  unit: PERCENT

Sputter Source
subclass of: ManufactureProcess

SputterSourceCr2a
intended Compound: Cr
characteristic: SetPoint
  value: 0.0508
  type: Diameter
  unit: http://qudt.org/vocab/M
type: Sputter Source
characteristic: SetPoint
  value: 0.999
  type: Purity
  unit: PERCENT

SputterSourceAl2a
intended Compound: target Al a
characteristic: SetPoint
  value: 0.0508
  type: Diameter
  unit: http://qudt.org/vocab/M
type: Sputter Source
characteristic: SetPoint
  value: 0.999
  type: Purity
  unit: PERCENT

ExampleMBESource
intended Compound: Co
characteristic: SetPoint
  value: 0.0508
  type: Purity
  unit: PERCENT
type: MBE Source

MBE Source
subclass of: ManufactureProcess

Treatment Process
subclass of: ManufactureProcess

Bulk Press Process
subclass of: TreatmentProcess

DieDiameter
subclass of: Diameter

ExamplePressProcess
type: Bulk Press Process
characteristic: SetPoint
  value: 100
  type: Force
  unit: KiloGM
characteristic: SetPoint
  value: 0.01
  type: DieDiameter
  unit: http://qudt.org/vocab/M

Sample Mass Out
subclass of: SampleMass

characteristic: SetPoint
  value: 0.00216181
  type: SampleMassOut
  unit: KiloGM
characteristic: SetPoint
  value: 1173
  type: MaxTemperature
  unit: http://qudt.org/vocab/K
characteristic: SetPoint
  value: 0.00216060
  type: SampleMassOut
  unit: KiloGM

TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a
type: Annealing Treatment Process
characteristic:
  characteristic: SetPoint
    value: 100
    type: RampStart
    unit: http://qudt.org/vocab/K
characteristic:
  characteristic: SetPoint
    value: 200
    type: RampEnd
    unit: http://qudt.org/vocab/K
characteristic:
  value: true
characteristic: SetPoint
  value: 20000
  type: Pressure
  unit: PA
characteristic: Atmosphere
  type: SetPoint
  relates to composition: Ar

Annealing Treatment Process
subclass of: TreatmentProcess

characteristic: SetPoint
  value: 5
  type: Duration
  unit: SEC

Sample Mass In
subclass of: SampleMass

https://www.dipromag.de/dipromag_onto/0.1/TreatmentAnnealBulkThinFilmSampleMW20221125a4001
type: Annealing Treatment Process
characteristic:
  characteristic: SetPoint
    value: 0.6666
    type: RampStart
    unit: http://qudt.org/vocab/K
characteristic:
  characteristic: SetPoint
    value: 400
    type: RampEnd
    unit: http://qudt.org/vocab/K
characteristic:
  value: false
characteristic: SetPoint
  value: 100
  type: Pressure
  unit: PA
characteristic: Atmosphere
  type: SetPoint
  relates to composition: Ar

characteristic: SetPoint
  value: 10800
  type: Duration
  unit: SEC

TestMeasurementDataPoint
value: 200
type: Measurement
type: Temperature
unit: http://qudt.org/vocab/K

TestMeasurementProcess
characteristic: Measurement
  value: 200
  type: Temperature
  unit: http://qudt.org/vocab/K
characteristic:
  value: beautiful color
characteristic: Measurement
  type: delta S data
resource: Dataset
  distribution: Distribution
    download url: https://www.dipromag.de
characteristic: SetPoint
  type: MagneticField
  range start:
    characteristic: SetPoint
      value: 0
      type: MagneticField
      unit: http://qudt.org/vocab/T
  range end:
    characteristic: SetPoint
      value: 10
      type: MagneticField
      unit: http://qudt.org/vocab/T
  range step:
    characteristic: SetPoint
      value: 2
      type: MagneticField
      unit: http://qudt.org/vocab/T
  type: Range

Pressure
subclass of: ValueObject

MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a
characteristic: SetPoint
  value: 0.2
  type: EstimatedBaseLineShift
  unit: EV
characteristic: SetPoint
  value: 5E-11
  type: ChamberPressure
  unit: PA
characteristic: SetPoint
  value: 0.5
  type: BindingEnergy
  unit: EV
characteristic: SetPoint
  value: 1.2
  type: FilamentCurrent
  unit: http://qudt.org/vocab/A
input: XPS
characteristic: SetPoint
  value: 13.5
  type: FilamentVoltage
  unit: http://qudt.org/vocab/V
type: XPSMeasuringProcess
characteristic: SetPoint
  value: 1.5
  type: FocalPointSize
  unit: http://qudt.org/vocab/M
executed by: XPS
output: MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a

Focal Point Size
subclass of: Diameter

Filament Current
subclass of: ElectricCurrent

XPS Measuring Process
subclass of: MeasuringProcess

Chamber Pressure
subclass of: Pressure

Estimated Base Line Shift
subclass of: ValueObject

XPS
subclass of: MeasuringDevice

Filament Voltage
subclass of: Voltage

characteristic: SetPoint
  value: 300.0
  type: Temperature
  unit: http://qudt.org/vocab/K

Radiation Source
subclass of: ValueObject
subclass of: ChemicalComposition

Mode
subclass of: ValueObject

XPS Mode
subclass of: Mode

BindingEnergy
subclass of: Energy
label: Binding Energy

MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a
characteristic: Measurement
  value: 2
  type: Edging Rate
  unit: ANGSTROM divby SEC
characteristic: Measurement
  value: 0
  type: Binding Energy End
  unit: EV
characteristic: Measurement
  value: 600.0
  type: Edging Time
  unit: SEC
characteristic: Measurement
  value: 0.2
  type: Dwell Time Per Step
  unit: SEC
characteristic: Measurement
  value: 2
  type: X-Ray Exposure Time
  unit: SEC
characteristic: Measurement
  value: 1400
  type: Binding Energy Start
  unit: EV
characteristic: Measurement
  value: 5e-9
  type: Nominal Depth after Ion Etching
  unit: http://qudt.org/vocab/M
characteristic: Measurement
  value: 0.8
  type: Binding Energy Step
  unit: EV
characteristic: Measurement
  composed of: Element
    characteristic: Measurement
      value: 50.4
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Co
  composed of: Element
    characteristic: Measurement
      value: 25.3
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Cr
  composed of: Element
    characteristic: Measurement
      value: 24.3
      type: ChemicalComposition
      unit: Atomic Percent
    relates to element: Al
characteristic: Co 2p1/2

Nominal Depth after Ion Etching
subclass of: Depth

Edging Time
subclass of: Time

Dwell Time Per Step
subclass of: Time

Edging Rate
subclass of: ValueObject

Binding Energy Start
subclass of: BindingEnergy

Binding Energy Step
subclass of: BindingEnergy

Binding Energy End
subclass of: BindingEnergy

X-Ray Exposure Time
subclass of: Time

Co 2p1/2
characteristic: Measurement
  value: 0.2
  type: Dwell Time Per Step
  unit: SEC
type: Sub-Spectrum
characteristic: Measurement
  value: 0
  type: Binding Energy End
  unit: EV
characteristic: Measurement
  value: 0.8
  type: Binding Energy Step
  unit: EV
characteristic: Measurement
  value: 1400
  type: Binding Energy Start
  unit: EV
relates to composition: Co
characteristic: Peak
characteristic: Measurement
  value: 25.5
  type: Intensity Relative to Sub-Spectrum
  unit: PERCENT

Sub-Spectrum
subclass of: ValueObject

Peak_fwhm
subclass of: ValueObject

Relative Contribution to Subspectrum
subclass of: ValueObject

Peak
subclass of: ValueObject

Peak Position
subclass of: ValueObject

Absolute Peak Intensity
subclass of: ValueObject

Line Shape
subclass of: Geometric Shape

XRDMeasuringProcess
executed by: XRD
characteristic: Measurement
  value: 20
  type: Start Angle
  unit: DEG
characteristic: Measurement
  value: 0.5
  type: Scan Rate
  unit: DEG divby SEC
input: Specimen
  composed of: BulkSampleTS2022-11-03-a-AM-a
characteristic: Measurement
  value: 0.05
  type: Step Angle
  unit: DEG
characteristic: Measurement
  value: 1.5406
  type: Wavelength
  unit: ANGSTROM
characteristic: Measurement
  value: 70
  type: End Angle
  unit: DEG
output:
  characteristic: CellAngleAlpha
    value: 90
    type: Cell Angle Alpha
    type: Measurement
    unit: DEG
  characteristic: CellAngleAlpha
    value: 90
    type: Cell Angle Alpha
    type: Measurement
    unit: DEG
  characteristic: CellAngleAlpha
    value: 120
    type: Cell Angle Alpha
    type: Measurement
    unit: DEG
  characteristic: CellAngleBeta
    value: 90
    type: Cell Angle Beta
    type: Measurement
    unit: DEG
  characteristic: CellAngleBeta
    value: 90
    type: Cell Angle Beta
    type: Measurement
    unit: DEG
  characteristic: CellAngleBeta
    value: 120
    type: Cell Angle Beta
    type: Measurement
    unit: DEG
  characteristic: CellAngleGamma
    value: 90
    type: Cell Angle Gamma
    type: Measurement
    unit: DEG
  characteristic: CellAngleGamma
    value: 90
    type: Cell Angle Gamma
    type: Measurement
    unit: DEG
  characteristic: CellAngleGamma
    value: 120
    type: Cell Angle Gamma
    type: Measurement
    unit: DEG
  characteristic: Measurement
    value: 78.4376
    type: Cell Volume
    unit: M3
  characteristic:
    value: P63/mmc
  characteristic: Measurement
    value: 300
    type: Temperature
    unit: http://qudt.org/vocab/K
  characteristic: CellLengthA
    value: 4.08801
    type: Cell LengthA
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthA
    value: 4.08801
    type: Cell LengthA
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthA
    value: 5.37937
    type: Cell LengthA
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthB
    value: 4.08801
    type: Cell LengthB
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthB
    value: 4.08801
    type: Cell LengthB
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthB
    value: 5.37937
    type: Cell LengthB
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthC
    value: 4.08801
    type: Cell LengthC
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthC
    value: 4.08801
    type: Cell LengthC
    type: Measurement
    unit: ANGSTROM
  characteristic: CellLengthC
    value: 5.37937
    type: Cell LengthC
    type: Measurement
    unit: ANGSTROM

Step Angle
subclass of: Angle

XRD
subclass of: MeasuringDevice

DEG divby SEC
subclass of: Unit

End Angle
subclass of: Angle

characteristic: Temperature
  type: SetPoint
  range start:
    characteristic: Temperature
      value: 300
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range end:
    characteristic: Temperature
      value: 300
      type: SetPoint
      unit: http://qudt.org/vocab/K
  range step:
    characteristic: Temperature
      value: 0
      type: SetPoint
      unit: http://qudt.org/vocab/K
  type: Range

XRD Measuring Process
subclass of: MeasuringProcess

Scanning Type
subclass of: ValueObject

Scan Rate
subclass of: ValueObject

Start Angle
subclass of: Angle

Cell Angle Gamma
subclass of: Cell Angle

Cell Angle Alpha
subclass of: Cell Angle

Cell LengthA
subclass of: CellLength

Cell Volume
subclass of: Volume

Cell Angle Beta
subclass of: Cell Angle

Cell Length
subclass of: Length

Cell LengthC
subclass of: CellLength

Symmetry Space Group
subclass of: ValueObject

Phase Number
subclass of: ValueObject

Cell Angle
subclass of: Agnle

Cell LengthB
subclass of: CellLength

Source Current
subclass of: ElectricCurrent

XRF
subclass of: MeasuringDevice

Chamber Material
subclass of: ChemicalComposition

Source Voltage
subclass of: Voltage

XRF Measuring Process
subclass of: MeasuringProcess

Chamber Atmosphere
subclass of: ChemicalComposition

Energy Resolution
subclass of: Energy

Measured Thickness
subclass of: Measured
subclass of: Thickness

KG divby M3
subclass of: Unit

Sample Density
subclass of: Density

Beam Width
subclass of: Diameter

XRRThinFilmSampleMW20221125a anneal
type: XRR MeasuringProcess
input: Specimen
  composed of: ThinFilmSampleMW20221125a anneal
executed by: XRR
  characteristic: SetPoint
    value: 7500
    type: Initial XRAY Detector Count Rate
    unit: CPS
  characteristic: SetPoint
    value: 1
    type: Angle Scan Rate
    unit: DEG divby SEC
  characteristic: SetPoint
    value: 1.540562
    type: Wavelength
    unit: ANGSTROM
  characteristic: SetPoint
    value: 0
    type: Length
    unit: http://qudt.org/vocab/M
  characteristic: SetPoint
    value: 0.01
    type: Step Angle
    unit: DEG
  characteristic: SetPoint
    value: 2
    type: End Angle
    unit: DEG
  characteristic: SetPoint
    value: 0
    type: Start Angle
    unit: DEG
  characteristic: SetPoint
    value: 4.3131
    type: Substrate Roughness
    unit: ANGSTROM
  characteristic: SetPoint
    value: 0.0575E-3
    type: BeamWidth
    unit: http://qudt.org/vocab/M
output: XRRMapping
  type: XRR Mapping
  characteristic: SetPoint
    value: 7860.57938
    type: Density
    unit: KiloGM PER M3
  characteristic: SetPoint
    value: 56.4E-10
    type: Substrate Roughness
    unit: http://qudt.org/vocab/M
  characteristic: SetPoint
    value: 59.3E-9
    type: Thickness
    unit: http://qudt.org/vocab/M
  characteristic of: ThinFilmLayerCo2CrAl60nm

XRR
subclass of: MeasuringDevice

Roughness
subclass of: ValueObject

Substrate Roughness
subclass of: Roughness

Initial XRAY Detector Count Rate
subclass of: CountingUnit

XRR MeasuringProcess
subclass of: MeasuringProcess

Angle Scan Rate
subclass of: Scan Rate

XRR Mapping
subclass of: ValueObject

KiloGM PER M3
subclass of: Unit