@prefix qudt: . @prefix o-rdfs: . @prefix owl: . @prefix pmd: . @prefix xsd: . @prefix rdfs: . @prefix qb: . @prefix o-docttr: . @prefix terms: . @prefix ottr: . @prefix sdmx-concept: . @prefix o-owl-ma: . @prefix dcterms: . @prefix dcat: . @prefix prov: . @prefix foaf: . @prefix sdmx-dimension: . @prefix dpm: . @prefix o-rdf: . @prefix emmo: . @prefix sdmx-measure: . @prefix rdf: . @prefix interval: . @prefix o-owl-ax: . rdf:type owl:Ontology ; owl:versionIRI ; owl:versionInfo "" ; rdfs:comment "An Ontolgoy for the Digitization of a process chain for the production, characterization and prototypical application of magnetocaloric alloys. This ontology was modelled via OTTR Templates and is automatically generated. You can find the templates under the URL: https://www.dipromag.de/ottr-templates/"@en; rdfs:seeAlso ; terms:bibliographicCitation "Insights from an OTTR-centric Ontology Engineering Methodology. M Blum, B Ell, P Cimiano - arXiv preprint arXiv:2309.13130, 2023"@en ; terms:title "DiProMag Ontology"; terms:created "2023-12-18"^^xsd:date; terms:contributor "Andreas Hütten"@en ; terms:contributor "Günter Reiss"@en ; terms:contributor "Philipp Cimiano"@en ; terms:contributor "Luana Caron"@en ; terms:contributor "Tapas Samanta"@en ; terms:contributor "Inga Ennen"@en ; terms:contributor "Basil Ell"@en ; terms:contributor "Moritz Blum"@en ; terms:contributor "Christian Schröder"@en ; terms:contributor "Sonja Schöning"@en ; terms:contributor "Simon Bekemeier"@en ; terms:contributor "Lennart Schwan"@en ; terms:contributor "Michael Feige"@en ; terms:contributor "Martin Wortmann"@en ; terms:contributor "Thomas Hilbig"@en ; terms:contributor "Alisa Chirkova"@en ; terms:creator "Moritz Blum"@en ; terms:creator "Basil Ell"@en ; terms:license "https://creativecommons.org/licenses/by/4.0/legalcode"@en ; owl:versionInfo "1.0.0" . dpm:Co2CrAl rdf:type pmd:ChemicalComposition . _:b0 pmd:value "0.5"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b1 pmd:characteristic _:b0 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b1 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . dpm:Co2CrAl pmd:composedOf _:b1 . _:b2 pmd:value "0.25"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b3 pmd:characteristic _:b2 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b3 pmd:relatesToElement dpm:Cr ; rdf:type dpm:Element . dpm:Co2CrAl pmd:composedOf _:b3 . _:b4 pmd:value "0.25"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b5 pmd:characteristic _:b4 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b5 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . dpm:Co2CrAl pmd:composedOf _:b5 . dpm:MnNi0.6Co0.4Ge0.97Al0.03 rdf:type pmd:ChemicalComposition . _:b6 pmd:value "12"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b7 pmd:characteristic _:b6 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b7 pmd:relatesToElement dpm:Mn ; rdf:type dpm:Element . dpm:MnNi0.6Co0.4Ge0.97Al0.03 pmd:composedOf _:b7 . _:b8 pmd:value "0.6"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b9 pmd:characteristic _:b8 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b9 pmd:relatesToElement dpm:Ni ; rdf:type dpm:Element . dpm:MnNi0.6Co0.4Ge0.97Al0.03 pmd:composedOf _:b9 . _:b10 pmd:value "0.4"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b11 pmd:characteristic _:b10 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b11 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . dpm:MnNi0.6Co0.4Ge0.97Al0.03 pmd:composedOf _:b11 . _:b12 pmd:value "0.97"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b13 pmd:characteristic _:b12 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b13 pmd:relatesToElement dpm:Ge ; rdf:type dpm:Element . dpm:MnNi0.6Co0.4Ge0.97Al0.03 pmd:composedOf _:b13 . _:b14 pmd:value "0.03"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b15 pmd:characteristic _:b14 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b15 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . dpm:MnNi0.6Co0.4Ge0.97Al0.03 pmd:composedOf _:b15 . dpm:MnNi0.8Co0.2Ge0.97Al0.03 rdf:type pmd:ChemicalComposition . _:b16 pmd:value "1"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b17 pmd:characteristic _:b16 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b17 pmd:relatesToElement dpm:Mn ; rdf:type dpm:Element . dpm:MnNi0.8Co0.2Ge0.97Al0.03 pmd:composedOf _:b17 . _:b18 pmd:value "0.8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b19 pmd:characteristic _:b18 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b19 pmd:relatesToElement dpm:Ni ; rdf:type dpm:Element . dpm:MnNi0.8Co0.2Ge0.97Al0.03 pmd:composedOf _:b19 . _:b20 pmd:value "0.2"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b21 pmd:characteristic _:b20 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b21 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . dpm:MnNi0.8Co0.2Ge0.97Al0.03 pmd:composedOf _:b21 . _:b22 pmd:value "0.97"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b23 pmd:characteristic _:b22 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b23 pmd:relatesToElement dpm:Ge ; rdf:type dpm:Element . dpm:MnNi0.8Co0.2Ge0.97Al0.03 pmd:composedOf _:b23 . _:b24 pmd:value "0.03"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b25 pmd:characteristic _:b24 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b25 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . dpm:MnNi0.8Co0.2Ge0.97Al0.03 pmd:composedOf _:b25 . dpm:HeatCyclesNumber rdfs:label "Heat Cycles Number" . _:b26 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:characteristic _:b26 . _:b26 dpm:relatesToComposition dpm:He . dpm:M3_divby_SEC rdfs:label "M3 divby SEC" . _:b27 pmd:composedOf dpm:BulkSampleTS2022-11-03-a-AM-a . dpm:He rdf:type pmd:ChemicalComposition . _:b28 pmd:value "373"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MaxTemperature ; pmd:unit qudt:K . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:characteristic _:b28 . qudt:K rdfs:subClassOf qudt:Unit . dpm:MaxTemperature rdfs:subClassOf qudt:Temperature . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a rdf:type pmd:DSCMeasuringProcess . dpm:d_T rdfs:label "dT" . _:b29 pmd:value "1.67E-8"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:GasFlow ; pmd:unit dpm:M3_divby_SEC . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:characteristic _:b29 . dpm:M3_divby_SEC rdfs:subClassOf qudt:Unit . dpm:MinTemperature rdfs:subClassOf qudt:Temperature . _:b30 rdf:type _:b31 . dpm:HeatCyclesNumber rdfs:subClassOf pmd:ValueObject . dpm:d_T rdfs:subClassOf pmd:ValueObject . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:input _:b27 ; pmd:executedBy _:b30 . dpm:MaxTemperature rdfs:label "Max. Temperature" . dpm:GasFlow rdfs:label "GasFlow" . _:b32 pmd:value "T zero" . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a dpm:characteristic _:b32 . _:b33 pmd:value "0.33"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:d_T ; pmd:unit dpm:K_divby_SEC . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:characteristic _:b33 . dpm:K_divby_SEC rdfs:subClassOf qudt:Unit . _:b27 rdf:type pmd:Specimen . dpm:DSCMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:MinTemperature rdfs:label "Min. Temperature" . _:b34 pmd:value "0.00001024"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type qudt:Mass ; pmd:unit qudt:KiloGM . _:b27 pmd:characteristic _:b34 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:GasFlow rdfs:subClassOf pmd:ValueObject . _:b35 pmd:value "143"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MinTemperature ; pmd:unit qudt:K . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:characteristic _:b35 . qudt:K rdfs:subClassOf qudt:Unit . dpm:DSCMeasuringProcess rdfs:label "DSC MeasuringProcess" . dpm:J_divby_kg rdfs:label "J divby kg" . dpm:LatentHeat rdfs:subClassOf pmd:ValueObject . _:b36 pmd:value _:b37 . _:b37 rdf:rest rdf:nil ; rdf:first "248.45"^^xsd:float . _:b36 rdf:type pmd:Measurement ; rdf:type dpm:T_c_heating ; pmd:unit qudt:K . _:b38 pmd:characteristic _:b36 . qudt:K rdfs:subClassOf qudt:Unit . _:b39 pmd:value _:b40 . _:b40 rdf:rest rdf:nil ; rdf:first "241.18"^^xsd:float . _:b39 rdf:type pmd:Measurement ; rdf:type dpm:T_c_cooling ; pmd:unit qudt:K . _:b38 pmd:characteristic _:b39 . qudt:K rdfs:subClassOf qudt:Unit . dpm:LatentHeatCooling rdfs:label "LatentHeat Cooling" . dpm:LatentHeatHeating rdfs:subClassOf dpm:LatentHeat . _:b41 pmd:value _:b42 . _:b42 rdf:rest rdf:nil ; rdf:first "11980"^^xsd:float . _:b41 rdf:type pmd:Measurement ; rdf:type dpm:LatentHeatCooling ; pmd:unit dpm:J_divby_kg . _:b38 pmd:characteristic _:b41 . dpm:J_divby_kg rdfs:subClassOf qudt:Unit . dpm:LatentHeat rdfs:label "LatentHeat" . _:b43 pmd:value _:b44 . _:b44 rdf:rest rdf:nil ; rdf:first "7.27"^^xsd:float . _:b43 rdf:type pmd:Measurement ; rdf:type dpm:d_T_hyst ; pmd:unit qudt:K . _:b38 pmd:characteristic _:b43 . qudt:K rdfs:subClassOf qudt:Unit . _:b45 pmd:value _:b46 . _:b46 rdf:rest rdf:nil ; rdf:first "12335"^^xsd:float . _:b45 rdf:type pmd:Measurement ; rdf:type dpm:LatentHeatHeating ; pmd:unit dpm:J_divby_kg . _:b38 pmd:characteristic _:b45 . dpm:J_divby_kg rdfs:subClassOf qudt:Unit . dpm:HeatCapacityData rdfs:label "Heat Capacity Data" ; rdfs:subClassOf pmd:ValueObject . dpm:PhysicalMeasurementHeatCapacityDSCZeroField-BulkSampleTS2022-11-03-a-AM-a pmd:output _:b38 . dpm:LatentHeatHeating rdfs:label "LatentHeat Heating" . dpm:LatentHeatCooling rdfs:subClassOf dpm:LatentHeat . dpm:MeasurementTime rdfs:subClassOf qudt:Time . dpm:ProbeCurrent rdfs:subClassOf qudt:ElectricCurrent . dpm:SpotDiameter rdfs:subClassOf qudt:Diameter . _:b47 pmd:composedOf dpm:ThinFilmSampleMW20221125a_anneal . _:b48 rdf:type dpm:EDX . _:b49 pmd:value "2270"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:CountingRate ; pmd:unit qudt:HZ . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b49 . qudt:HZ rdfs:subClassOf qudt:Unit . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:input _:b47 . dpm:EDXMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . _:b50 pmd:value "2000"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:AccelerationVoltage ; pmd:unit qudt:V . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b50 . qudt:V rdfs:subClassOf qudt:Unit . _:b51 pmd:value "5E-9"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:FieldOfView ; pmd:unit qudt:M2 . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b51 . qudt:M2 rdfs:subClassOf qudt:Unit . dpm:EDXThinFilmSampleMW20221125a_anneal rdf:type pmd:EDXMeasuringProcess . dpm:AccelerationVoltage rdfs:subClassOf qudt:Voltage . _:b52 pmd:value "2E-9"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ProbeCurrent ; pmd:unit qudt:A . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b52 . qudt:A rdfs:subClassOf qudt:Unit . _:b53 pmd:value "100"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MeasurementTime ; pmd:unit qudt:SEC . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b53 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:AccelerationVoltage rdfs:label "Acceleration Voltage" . _:b54 pmd:value "0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SpotDiameter ; pmd:unit qudt:M . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:characteristic _:b54 . qudt:M rdfs:subClassOf qudt:Unit . dpm:CountingRate rdfs:subClassOf qudt:Frequency ; rdfs:label "Counting Rate" . dpm:MeasurementTime rdfs:label "Measurement Time" . dpm:SpotDiameter rdfs:label "Spot Diameter" . dpm:ProbeCurrent rdfs:label "Probe Current" . dpm:EDX rdfs:subClassOf pmd:MeasuringDevice . dpm:EDXMeasuringProcess rdfs:label "EDX Measuring Process" . dpm:FieldOfView rdfs:subClassOf qudt:Area . _:b47 rdf:type pmd:Specimen . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:executedBy _:b48 . dpm:FieldOfView rdfs:label "Field of View" . dpm:EDX rdfs:label "EDX" . _:b55 pmd:value false . _:b56 dpm:characteristic _:b55 . _:b57 rdf:type pmd:Measurement . dpm:EDXThinFilmSampleMW20221125a_anneal pmd:subordinateProcess _:b56 . _:b56 rdf:type pmd:EDXPointMeasuringProcess ; pmd:characteristic _:b57 . _:b58 pmd:value "" . _:b56 dpm:characteristic _:b58 . dpm:at_percent rdfs:subClassOf qudt:MassFraction . dpm:ChemicalCompositionStd rdfs:label "ChemicalComposition Std" . dpm:ChemicalCompositionMean rdfs:subClassOf pmd:ChemicalComposition . _:b59 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . dpm:ChemicalCompositionStd rdfs:subClassOf pmd:ChemicalComposition . dpm:at_percent rdfs:label "Atomic Percent" . _:b60 pmd:value "0.398"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionStd ; pmd:unit dpm:at_percent . _:b59 pmd:characteristic _:b60 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ChemicalCompositionMean rdfs:label "ChemicalComposition Mean" . _:b57 pmd:composedOf _:b59 . _:b61 pmd:value "49.319"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionMean ; pmd:unit dpm:at_percent . _:b59 pmd:characteristic _:b61 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdfs:subClassOf qudt:MassFraction . dpm:ChemicalCompositionStd rdfs:label "ChemicalComposition Std" . dpm:ChemicalCompositionMean rdfs:subClassOf pmd:ChemicalComposition . _:b62 pmd:relatesToElement dpm:Cr ; rdf:type dpm:Element . dpm:ChemicalCompositionStd rdfs:subClassOf pmd:ChemicalComposition . dpm:at_percent rdfs:label "Atomic Percent" . _:b63 pmd:value "0.385"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionStd ; pmd:unit dpm:at_percent . _:b62 pmd:characteristic _:b63 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ChemicalCompositionMean rdfs:label "ChemicalComposition Mean" . _:b57 pmd:composedOf _:b62 . _:b64 pmd:value "24.173"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionMean ; pmd:unit dpm:at_percent . _:b62 pmd:characteristic _:b64 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdfs:subClassOf qudt:MassFraction . dpm:ChemicalCompositionStd rdfs:label "ChemicalComposition Std" . dpm:ChemicalCompositionMean rdfs:subClassOf pmd:ChemicalComposition . _:b65 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . dpm:ChemicalCompositionStd rdfs:subClassOf pmd:ChemicalComposition . dpm:at_percent rdfs:label "Atomic Percent" . _:b66 pmd:value "0.415"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionStd ; pmd:unit dpm:at_percent . _:b65 pmd:characteristic _:b66 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ChemicalCompositionMean rdfs:label "ChemicalComposition Mean" . _:b57 pmd:composedOf _:b65 . _:b67 pmd:value "26.508"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalCompositionMean ; pmd:unit dpm:at_percent . _:b65 pmd:characteristic _:b67 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:EDXPointMeasuringProcess rdfs:label "EDX Point Measuring Process" ; rdfs:subClassOf pmd:MeasuringProcess . _:b68 pmd:value "700"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:EnergyLoss ; pmd:unit qudt:EV . dpm:XRF_ExampleTF pmd:characteristic _:b68 . qudt:EV rdfs:subClassOf qudt:Unit . _:b69 pmd:value "1"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ExposureTime ; pmd:unit qudt:SEC . dpm:XRF_ExampleTF pmd:characteristic _:b69 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:ProbeCurrent rdfs:subClassOf qudt:ElectricCurrent . dpm:ExposureTime rdfs:label "Exposure Time" . _:b70 pmd:value "200"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:AccelerationVoltage ; pmd:unit qudt:V . dpm:XRF_ExampleTF pmd:characteristic _:b70 . qudt:V rdfs:subClassOf qudt:Unit . _:b71 pmd:composedOf dpm:ExampleTF . _:b72 pmd:value "0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Angle ; pmd:unit qudt:DEG . dpm:XRF_ExampleTF pmd:characteristic _:b72 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:EELSMode rdfs:label "EELS Mode" . dpm:SlitInserted rdfs:subClassOf pmd:ValueObject . _:b73 pmd:value true . dpm:XRF_ExampleTF dpm:characteristic _:b73 . _:b74 pmd:value "25"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SlitWidth ; pmd:unit qudt:EV . dpm:XRF_ExampleTF pmd:characteristic _:b74 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:EnergyLoss rdfs:label "EnergyLoss" . dpm:EELSMeasuringProcess rdfs:label "EELS Measuring Process" . dpm:XRF_ExampleTF pmd:executedBy _:b75 ; rdf:type dpm:EELSMeasuringProcess . _:b76 pmd:value "70"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ConvergenceSemi ; pmd:unit qudt:DEG . dpm:XRF_ExampleTF pmd:characteristic _:b76 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:AccelerationVoltage rdfs:subClassOf qudt:Voltage . dpm:ConvergenceSemi rdfs:subClassOf qudt:ValueObject . dpm:EnergyLoss rdfs:subClassOf qudt:Energy . dpm:EELSMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:SlitInserted rdfs:label "Slit Inserted" . dpm:EntranceAperture rdfs:subClassOf pmd:ValueObject . dpm:AccelerationVoltage rdfs:label "Acceleration Voltage" . dpm:EntranceAperture rdfs:label "Entrance Aperture" . dpm:EELS rdfs:label "Slit EELS" . _:b77 pmd:input _:b71 . dpm:Scanning rdfs:subClassOf dpm:EELSMode . dpm:Dispersion rdfs:subClassOf pmd:ValueObject . dpm:EELS rdfs:subClassOf pmd:MeasuringDevice . dpm:ProbeCurrent rdfs:label "Probe Current" . _:b78 pmd:value "5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:EntranceAperture ; pmd:unit qudt:M . dpm:XRF_ExampleTF pmd:characteristic _:b78 . qudt:M rdfs:subClassOf qudt:Unit . dpm:Dispersion rdfs:label "Dispersion" . dpm:ExposureTime rdfs:subClassOf qudt:Time . _:b71 rdf:type pmd:Specimen . dpm:ConvergenceSemi rdfs:label "Convergence Semi" . _:b79 pmd:value "0.5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Dispersion ; pmd:unit qudt:EV . dpm:XRF_ExampleTF pmd:characteristic _:b79 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:EELSMode rdfs:subClassOf dpm:Mode . dpm:SlitWidth rdfs:subClassOf qudt:Energy ; rdfs:label "Slit Width" . _:b75 rdf:type dpm:EELS . _:b80 pmd:value "7.5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ProbeCurrent ; pmd:unit qudt:A . dpm:XRF_ExampleTF pmd:characteristic _:b80 . qudt:A rdfs:subClassOf qudt:Unit . dpm:EELSEnergyLossMeasuringProcess rdfs:subClassOf dpm:EELSMeasuringProcess ; rdfs:subClassOf pmd:MeasuringProcess . _:b81 pmd:value "20"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MeasurementTemperature ; pmd:unit qudt:K . dpm:XRF_ExampleTF pmd:characteristic _:b81 . qudt:K rdfs:subClassOf qudt:Unit . dpm:MeasurementTemperature rdfs:subClassOf qudt:Temperature . dpm:XRF_ExampleTF rdf:type dpm:EELSEnergyLossMeasuringProcess . dpm:EELSEnergyLossMeasuringProcess rdfs:label "EELS Energy Loss Measuring Process" . dpm:PeakBindingEnergy rdfs:label "Peak Binding Energy" . dpm:IntensityRelativeToSubSpectrum rdfs:label "Intensity Relative to Sub-Spectrum" . dpm:XRF_ExampleTF pmd:output _:b82 . dpm:PeakBindingEnergy rdfs:subClassOf pmd:ValueObject . dpm:GaussLorentz rdfs:subClassOf dpm:LineShape . _:b83 pmd:value "25"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:IntensityRelativeToSubSpectrum ; pmd:unit qudt:EV . _:b82 pmd:characteristic _:b83 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:XRF_ExampleTF rdfs:label "Co 2p1/2" . _:b84 pmd:value "796"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:PeakBindingEnergy ; pmd:unit qudt:EV . _:b82 pmd:characteristic _:b84 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:IntensityRelativeToSubSpectrum rdfs:subClassOf pmd:ValueObject . dpm:referenceToPriorExperimentsDescription rdfs:label "reference to Prior Experiments Description" . dpm:Goal rdfs:subClassOf pmd:Process . dpm:referenceForComparison rdfs:label "reference for Comparison" . dpm:GoalsAndAmbitionsTS20230606a rdf:type dpm:Goal ; dpm:hasApplicableMethodsDescription "Elemental substitution" . dpm:hasResults rdfs:subPropertyOf pmd:output . dpm:hasIntentionDescription rdfs:label "has Intention Description" . dpm:hasApplicableMethods rdfs:label "has Applicable Methods" . dpm:referenceToPriorExperiments rdfs:subPropertyOf pmd:input ; rdfs:label "reference to Prior Experiments" . dpm:GoalsAndAmbitionsTS20230606a dpm:hasIntentionDescription "enlarge change of magnetization when encountering small temperature change -> large magnetocaloric effect -> transfer more thermal energy from heating to cooling -> cooling application like refrigerator" . dpm:hasReasonDescription rdfs:subPropertyOf rdfs:comment . dpm:referenceForComparisonDescription rdfs:label "reference for Comparison Description" . dpm:hasGoalDescripton rdfs:subPropertyOf rdfs:comment . dpm:hasResults rdfs:label "has Results" . dpm:GoalsAndAmbitionsTS20230606a dpm:hasResults dpm:MnNi0.6Co0.4Ge0.97Al0.03 ; dpm:hasResults dpm:MnNi0.8Co0.2Ge0.97Al0.03 . dpm:referenceToPriorExperimentsDescription rdfs:subPropertyOf rdfs:comment . dpm:hasApplicableMethodsDescription rdfs:subPropertyOf rdfs:comment . dpm:referenceForComparisonDescription rdfs:subPropertyOf dpm:hasReferenceToPriorExperimentsDescription . dpm:GoalsAndAmbitionsTS20230606a dpm:hasGoalDescripton "first-order magnetic transition near room-temperature" ; dpm:hasApplicableMethods dpm:CompositionModificationTS20230606a ; dpm:hasReasonDescription "from the substitution of Co for Ni you can expect higher magnetization" ; dpm:hasReasonDescription "A small amount of Al substitution for Ge can lower the structural transition, resulting in a coupled first-order magnetostructural transition has been realized in MnNi1-xCoxGe0.97Al0.03" . dpm:Goal rdfs:label "Goal" . dpm:hasApplicableMethods rdfs:subPropertyOf pmd:input . dpm:GoalsAndAmbitionsTS20230606a dpm:referenceToPriorExperimentsDescription "Nizioł S, Bombik A, Bażela W, Szytuła A and Fruchart D 1982 Magnetic phase diagram of CoxNi1-xMnGe Solid State Commun. 42 79 https://doi.org/10.1016/0038-1098(82)90356-8" ; dpm:referenceToPriorExperimentsDescription "Tapas Samanta, Igor Dubenko, Abdiel Quetz, Samuel Temple, Shane Stadler, Naushad Ali; Magnetostructural phase transitions and magnetocaloric effects in MnNiGe1−xAlx. Appl. Phys. Lett. 2012; 100 052404. https://doi.org/10.1063/1.3681798" . dpm:referenceForComparison rdfs:subPropertyOf dpm:input . dpm:hasReasonDescription rdfs:label "has Reason Description" . dpm:GoalsAndAmbitionsTS20230606a dpm:referenceForComparisonDescription "Dan’kov S Y, Tishin A M, Pecharsky V K and Gschneidner K A 1998 Magnetic phase transitions and the magnetothermal properties of gadolinium Phys. Rev. B 57 3478 https://doi.org/10.1103/PhysRevB.57.3478" . dpm:hasIntentionDescription rdfs:subPropertyOf rdfs:comment . dpm:hasApplicableMethodsDescription rdfs:label "has Applicable Methods Description" . dpm:hasGoalDescripton rdfs:label "has Goal Descripton" . dpm:CompositionModification rdfs:label "Composition Modification Process" . dpm:compositionModification rdfs:label "composition Modification" . dpm:substituted rdfs:label "substituted" . dpm:inserted rdfs:subPropertyOf dpm:compositionModification . dpm:substituted rdfs:subPropertyOf dpm:compositionModification . dpm:CompositionModificationTS20230606a rdf:type dpm:CompositionModification . _:b85 pmd:relatesToElement dpm:Co . dpm:CompositionModificationTS20230606a dpm:inserted _:b85 . _:b85 rdf:type dpm:Element . _:b86 pmd:value "13.33"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b85 pmd:characteristic _:b86 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . _:b87 pmd:relatesToElement dpm:Al . dpm:CompositionModificationTS20230606a dpm:inserted _:b87 . _:b87 rdf:type dpm:Element . _:b88 pmd:value "1.00"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b87 pmd:characteristic _:b88 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . dpm:CompositionModificationTS20230606a pmd:input dpm:MnNiGe . dpm:CompositionModification rdfs:subClassOf pmd:Process . _:b89 pmd:relatesToElement dpm:Ni . dpm:CompositionModificationTS20230606a dpm:substituted _:b89 . _:b89 rdf:type dpm:Element . _:b90 pmd:value "20.00"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b89 pmd:characteristic _:b90 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . _:b91 pmd:relatesToElement dpm:Ge . dpm:CompositionModificationTS20230606a dpm:substituted _:b91 . _:b91 rdf:type dpm:Element . _:b92 pmd:value "32.33"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b91 pmd:characteristic _:b92 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . dpm:inserted rdfs:label "inserted" . dpm:CompositionModificationTS20230606a pmd:output dpm:MnNi0.6Co0.4Ge0.97Al0.03 ; rdfs:comment "" . dpm:compositionModification rdfs:subPropertyOf pmd:characteristic . dpm:CompositionModification rdfs:label "Composition Modification Process" . dpm:compositionModification rdfs:label "composition Modification" . dpm:substituted rdfs:label "substituted" . dpm:inserted rdfs:subPropertyOf dpm:compositionModification . dpm:substituted rdfs:subPropertyOf dpm:compositionModification . dpm:CompositionModificationTS20230606b rdf:type dpm:CompositionModification . _:b93 pmd:relatesToElement dpm:Co . dpm:CompositionModificationTS20230606b dpm:inserted _:b93 . _:b93 rdf:type dpm:Element . _:b94 pmd:value "6.67"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b93 pmd:characteristic _:b94 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . _:b95 pmd:relatesToElement dpm:Al . dpm:CompositionModificationTS20230606b dpm:inserted _:b95 . _:b95 rdf:type dpm:Element . _:b96 pmd:value "1.00"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b95 pmd:characteristic _:b96 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . dpm:CompositionModificationTS20230606b pmd:input dpm:MnNiGe . dpm:CompositionModification rdfs:subClassOf pmd:Process . _:b97 pmd:relatesToElement dpm:Ni . dpm:CompositionModificationTS20230606b dpm:substituted _:b97 . _:b97 rdf:type dpm:Element . _:b98 pmd:value "26.67"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b97 pmd:characteristic _:b98 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . _:b99 pmd:relatesToElement dpm:Ge . dpm:CompositionModificationTS20230606b dpm:substituted _:b99 . _:b99 rdf:type dpm:Element . _:b100 pmd:value "32.33"^^xsd:float ; rdf:type pmd:Metadata ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b99 pmd:characteristic _:b100 . dpm:at_percent rdfs:subClassOf qudt:Unit . dpm:ATPercent rdfs:subClassOf qudt:MassFraction . dpm:inserted rdfs:label "inserted" . dpm:CompositionModificationTS20230606b pmd:output dpm:MnNi0.8Co0.2Ge0.97Al0.03 ; rdfs:comment "" . dpm:compositionModification rdfs:subPropertyOf pmd:characteristic . dpm:Powder rdfs:subClassOf dpm:MaterialShape . dpm:Slab rdfs:subClassOf dpm:MaterialShape . dpm:PressureCell_CuBe10 rdfs:subClassOf dpm:PressuteCell . dpm:Piece rdfs:subClassOf dpm:MaterialShape . dpm:MagneticPropertiesMeasuringProcess rdfs:comment "Neasuring Process to measure the magnetic properties of a material sample." . dpm:Piece rdfs:subClassOf dpm:MaterialShape . dpm:PressureCell_CuBe8 rdfs:label "PressureCell CuBe8" . dpm:Holder rdfs:comment "Holder that holds a sample in place during measurement or synthesis." . dpm:Pyrex rdfs:subClassOf dpm:Holder . dpm:MagneticPropertiesMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:Holder rdfs:label "Holder" . dpm:PressureCell_CuBe10 rdfs:label "PressureCell CuBe10" . dpm:Holder rdfs:subClassOf pmd:ProcessingNode . dpm:MPMS rdfs:subClassOf pmd:MeasuringDevice . dpm:PressureCell_NiCrAl rdfs:subClassOf dpm:PressuteCell . dpm:MagneticPropertiesMeasuringProcess rdfs:label "Magnetic Properties Measuring Process" . dpm:Perpendicular rdfs:label "Perpendicular" . dpm:Disc rdfs:subClassOf dpm:MaterialShape . dpm:Meedle rdfs:subClassOf dpm:MaterialShape . dpm:FieldCycleNumber rdfs:subClassOf pmd:ValueObject . dpm:Straw rdfs:label "Straw" . dpm:MPMS3 rdfs:subClassOf dpm:MPMS . dpm:Slab rdfs:label "Slab" . dpm:Quarts rdfs:label "Quarts" . dpm:MPMS3 rdfs:label "MPMS3" . dpm:Piece rdfs:label "Piece" . _:b101 rdf:type dpm:MPMS . dpm:Brass rdfs:subClassOf dpm:Holder . dpm:MagneticMomentComponent rdfs:subClassOf pmd:ValueObject . dpm:Transverse rdfs:subClassOf dpm:MagneticMomentComponent . _:b102 pmd:value false . _:b103 dpm:characteristic _:b102 . dpm:Parallel rdfs:subClassOf dpm:Orientation . dpm:Logitudinal rdfs:label "Logitudinal Magnetic Moment Component" . dpm:Transverse rdfs:label "Transverse Magnetic Moment Component" . _:b104 pmd:value "" . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a dpm:characteristic _:b104 . dpm:Orientation rdfs:subClassOf pmd:ValueObject . dpm:Pyrex rdfs:label "Pyrex" . _:b103 pmd:composedOf dpm:BulkSampleTS2022-11-03b-AM-a . dpm:MagneticMomentComponent rdfs:label "Magnetic Moment Component" . dpm:PressureCell_NiCrAl rdfs:label "PressureCell NiCrAl" . dpm:PressureCell_CuBe8 rdfs:subClassOf dpm:PressuteCell . dpm:MagneticMomentComponent rdfs:comment "Direction of a magnetic field." . _:b105 pmd:value "0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Force ; pmd:unit qudt:N . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a pmd:characteristic _:b105 . qudt:N rdfs:subClassOf qudt:Unit . dpm:Quarts rdfs:subClassOf dpm:Holder . dpm:Logitudinal rdfs:subClassOf dpm:MagneticMomentComponent . dpm:Meedle rdfs:label "Meedle" . dpm:Powder rdfs:label "Powder" . dpm:Orientation rdfs:comment "Orientation of an object." . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a pmd:input _:b103 . _:b106 pmd:value "0.00000857"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type qudt:Mass ; pmd:unit qudt:KiloGM . _:b103 pmd:characteristic _:b106 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MaterialShape rdfs:comment "Physical shape of a material sample, e.g. piece or powder." . dpm:LongDirectionParallel rdfs:subClassOf dpm:Parallel . dpm:VSM rdfs:label "VSM" . dpm:Perpendicular rdfs:subClassOf dpm:Orientation . dpm:Straw rdfs:subClassOf dpm:Holder . dpm:MPMS rdfs:subClassOf pmd:MeasuringDevice ; rdfs:label "MPMS" . dpm:MaterialShape rdfs:label "Material Shape" . dpm:VSM rdfs:subClassOf pmd:MeasuringDevice . dpm:Orientation rdfs:label "Orientation" . dpm:PressuteCell rdfs:subClassOf dpm:Holder . dpm:Parallel rdfs:label "Parallel" . dpm:Disc rdfs:label "Disc" . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a rdf:type pmd:MagneticPropertiesMeasuringProcess . _:b103 rdf:type pmd:Specimen . dpm:Brass rdfs:label "Brass" . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03-b-AM-a-a pmd:executedBy _:b101 . dpm:FieldCycleNumber rdfs:label "Field Cycle Number" . dpm:Straw rdfs:subClassOf dpm:Holder . dpm:LongDirectionParallel rdfs:label "LongDirectionParallel" . dpm:PressuteCell rdfs:label "PressuteCell" . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03a-AM-a-b pmd:subordinateProcess dpm:MeasurementIsofieldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a . dpm:MeasurementIsofieldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a rdf:type dpm:MagneticPropertiesMeasuringProcessIsofield . dpm:K_divby_SEC rdfs:label "K divby SEC" . _:b107 rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; dpm:range_start _:b108 ; dpm:range_end _:b109 ; dpm:range_step _:b110 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b107 . _:b112 pmd:value "7"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b108 pmd:characteristic _:b112 . qudt:K rdfs:subClassOf qudt:Unit . _:b113 pmd:value "5.5"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b109 pmd:characteristic _:b113 . qudt:K rdfs:subClassOf qudt:Unit . _:b114 pmd:value "0.5"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b110 pmd:characteristic _:b114 . qudt:K rdfs:subClassOf qudt:Unit . _:b115 rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; dpm:range_start _:b116 ; dpm:range_end _:b117 ; dpm:range_step _:b118 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b115 . _:b119 pmd:value "5"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b116 pmd:characteristic _:b119 . qudt:K rdfs:subClassOf qudt:Unit . _:b120 pmd:value "2"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b117 pmd:characteristic _:b120 . qudt:K rdfs:subClassOf qudt:Unit . _:b121 pmd:value "0.2"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b118 pmd:characteristic _:b121 . qudt:K rdfs:subClassOf qudt:Unit . _:b122 rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; dpm:range_start _:b123 ; dpm:range_end _:b124 ; dpm:range_step _:b125 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b122 . _:b126 pmd:value "1.9"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b123 pmd:characteristic _:b126 . qudt:K rdfs:subClassOf qudt:Unit . _:b127 pmd:value "0.1"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b124 pmd:characteristic _:b127 . qudt:K rdfs:subClassOf qudt:Unit . _:b128 pmd:value "0.1"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b125 pmd:characteristic _:b128 . qudt:K rdfs:subClassOf qudt:Unit . _:b129 rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; dpm:range_start _:b130 ; dpm:range_end _:b131 ; dpm:range_step _:b132 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b129 . _:b133 pmd:value "0.01"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b130 pmd:characteristic _:b133 . qudt:K rdfs:subClassOf qudt:Unit . _:b134 pmd:value "0.01"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b131 pmd:characteristic _:b134 . qudt:K rdfs:subClassOf qudt:Unit . _:b135 pmd:value "0"^^xsd:float ; rdf:type dpm:T_range_isoB ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b132 pmd:characteristic _:b135 . qudt:K rdfs:subClassOf qudt:Unit . dpm:d_T_divby_dt_isoB rdfs:subClassOf pmd:ValueObject . dpm:T_range_isoB rdfs:label "T_range isoB" . _:b136 pmd:value "2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:T_step_isoB ; pmd:unit qudt:K . _:b111 pmd:characteristic _:b136 . qudt:K rdfs:subClassOf qudt:Unit . _:b137 rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; dpm:range_start _:b138 ; dpm:range_end _:b139 ; dpm:range_step _:b140 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b137 . _:b141 pmd:value "7"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b138 pmd:characteristic _:b141 . qudt:T rdfs:subClassOf qudt:Unit . _:b142 pmd:value "5.5"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b139 pmd:characteristic _:b142 . qudt:T rdfs:subClassOf qudt:Unit . _:b143 pmd:value "0.5"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b140 pmd:characteristic _:b143 . qudt:T rdfs:subClassOf qudt:Unit . _:b144 rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; dpm:range_start _:b145 ; dpm:range_end _:b146 ; dpm:range_step _:b147 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b144 . _:b148 pmd:value "5"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b145 pmd:characteristic _:b148 . qudt:T rdfs:subClassOf qudt:Unit . _:b149 pmd:value "2"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b146 pmd:characteristic _:b149 . qudt:T rdfs:subClassOf qudt:Unit . _:b150 pmd:value "0.2"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b147 pmd:characteristic _:b150 . qudt:T rdfs:subClassOf qudt:Unit . _:b151 rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; dpm:range_start _:b152 ; dpm:range_end _:b153 ; dpm:range_step _:b154 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b151 . _:b155 pmd:value "1.9"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b152 pmd:characteristic _:b155 . qudt:T rdfs:subClassOf qudt:Unit . _:b156 pmd:value "0.1"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b153 pmd:characteristic _:b156 . qudt:T rdfs:subClassOf qudt:Unit . _:b157 pmd:value "0.1"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b154 pmd:characteristic _:b157 . qudt:T rdfs:subClassOf qudt:Unit . _:b158 rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; dpm:range_start _:b159 ; dpm:range_end _:b160 ; dpm:range_step _:b161 ; rdf:type dpm:Range . _:b111 pmd:characteristic _:b158 . _:b162 pmd:value "0.01"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b159 pmd:characteristic _:b162 . qudt:T rdfs:subClassOf qudt:Unit . _:b163 pmd:value "0.01"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b160 pmd:characteristic _:b163 . qudt:T rdfs:subClassOf qudt:Unit . _:b164 pmd:value "0"^^xsd:float ; rdf:type dpm:B_range ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b161 pmd:characteristic _:b164 . qudt:T rdfs:subClassOf qudt:Unit . dpm:d_T_divby_dt_isoB rdfs:label "dT/dt isoB" . dpm:T_step_isoB rdfs:label "T_step isoB" . dpm:T_range_isoB rdfs:subClassOf dpm:Range . dpm:MagneticPropertiesMeasuringProcessIsofield rdfs:label "Magnetic PropertiesMeasuring Process Isofield" . dpm:B_range rdfs:subClassOf dpm:Range . dpm:T_step_isoB rdfs:subClassOf pmd:ValueObject . _:b165 pmd:value _:b166 . _:b167 rdf:rest rdf:nil ; rdf:first "340"^^xsd:float . _:b166 rdf:rest _:b167 ; rdf:first "260"^^xsd:float . _:b165 rdf:type pmd:SetPoint ; rdf:type dpm:d_T_divby_dt_isoB ; pmd:unit dpm:K_divby_SEC . _:b111 pmd:characteristic _:b165 . dpm:K_divby_SEC rdfs:subClassOf qudt:Unit . dpm:B_range rdfs:label "B range" . dpm:MagneticPropertiesMeasuringProcessIsofield rdfs:subClassOf dpm:MagneticPropertiesMeasuringProcess . _:b168 rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; dpm:range_start _:b169 ; dpm:range_end _:b170 ; dpm:range_step _:b171 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b168 . _:b172 pmd:value "7"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b169 pmd:characteristic _:b172 . qudt:T rdfs:subClassOf qudt:Unit . _:b173 pmd:value "5.5"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b170 pmd:characteristic _:b173 . qudt:T rdfs:subClassOf qudt:Unit . _:b174 pmd:value "0.5"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b171 pmd:characteristic _:b174 . qudt:T rdfs:subClassOf qudt:Unit . _:b175 rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; dpm:range_start _:b176 ; dpm:range_end _:b177 ; dpm:range_step _:b178 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b175 . _:b179 pmd:value "5"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b176 pmd:characteristic _:b179 . qudt:T rdfs:subClassOf qudt:Unit . _:b180 pmd:value "2"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b177 pmd:characteristic _:b180 . qudt:T rdfs:subClassOf qudt:Unit . _:b181 pmd:value "0.2"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b178 pmd:characteristic _:b181 . qudt:T rdfs:subClassOf qudt:Unit . _:b182 rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; dpm:range_start _:b183 ; dpm:range_end _:b184 ; dpm:range_step _:b185 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b182 . _:b186 pmd:value "1.9"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b183 pmd:characteristic _:b186 . qudt:T rdfs:subClassOf qudt:Unit . _:b187 pmd:value "0.1"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b184 pmd:characteristic _:b187 . qudt:T rdfs:subClassOf qudt:Unit . _:b188 pmd:value "0.1"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b185 pmd:characteristic _:b188 . qudt:T rdfs:subClassOf qudt:Unit . _:b189 rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; dpm:range_start _:b190 ; dpm:range_end _:b191 ; dpm:range_step _:b192 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b189 . _:b193 pmd:value "0.01"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b190 pmd:characteristic _:b193 . qudt:T rdfs:subClassOf qudt:Unit . _:b194 pmd:value "0.01"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b191 pmd:characteristic _:b194 . qudt:T rdfs:subClassOf qudt:Unit . _:b195 pmd:value "0"^^xsd:float ; rdf:type dpm:B_step_isoT ; rdf:type pmd:SetPoint ; pmd:unit qudt:T . _:b192 pmd:characteristic _:b195 . qudt:T rdfs:subClassOf qudt:Unit . _:b196 rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; dpm:range_start _:b197 ; dpm:range_end _:b198 ; dpm:range_step _:b199 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b196 . _:b200 pmd:value "7"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b197 pmd:characteristic _:b200 . qudt:K rdfs:subClassOf qudt:Unit . _:b201 pmd:value "5.5"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b198 pmd:characteristic _:b201 . qudt:K rdfs:subClassOf qudt:Unit . _:b202 pmd:value "0.5"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b199 pmd:characteristic _:b202 . qudt:K rdfs:subClassOf qudt:Unit . _:b203 rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; dpm:range_start _:b204 ; dpm:range_end _:b205 ; dpm:range_step _:b206 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b203 . _:b207 pmd:value "5"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b204 pmd:characteristic _:b207 . qudt:K rdfs:subClassOf qudt:Unit . _:b208 pmd:value "2"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b205 pmd:characteristic _:b208 . qudt:K rdfs:subClassOf qudt:Unit . _:b209 pmd:value "0.2"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b206 pmd:characteristic _:b209 . qudt:K rdfs:subClassOf qudt:Unit . _:b210 rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; dpm:range_start _:b211 ; dpm:range_end _:b212 ; dpm:range_step _:b213 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b210 . _:b214 pmd:value "1.9"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b211 pmd:characteristic _:b214 . qudt:K rdfs:subClassOf qudt:Unit . _:b215 pmd:value "0.1"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b212 pmd:characteristic _:b215 . qudt:K rdfs:subClassOf qudt:Unit . _:b216 pmd:value "0.1"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b213 pmd:characteristic _:b216 . qudt:K rdfs:subClassOf qudt:Unit . _:b217 rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; dpm:range_start _:b218 ; dpm:range_end _:b219 ; dpm:range_step _:b220 ; rdf:type dpm:Range . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b217 . _:b221 pmd:value "0.01"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b218 pmd:characteristic _:b221 . qudt:K rdfs:subClassOf qudt:Unit . _:b222 pmd:value "0.01"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b219 pmd:characteristic _:b222 . qudt:K rdfs:subClassOf qudt:Unit . _:b223 pmd:value "0"^^xsd:float ; rdf:type qudt:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b220 pmd:characteristic _:b223 . qudt:K rdfs:subClassOf qudt:Unit . dpm:B_step_isoT rdfs:subClassOf pmd:ValueObject . dpm:range_step rdfs:label "range step" . _:b224 pmd:value "260"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Temperature ; pmd:unit qudt:K . _:b225 pmd:characteristic _:b224 . qudt:K rdfs:subClassOf qudt:Unit . _:b226 pmd:value "340"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:MagneticField ; pmd:unit qudt:T . _:b225 pmd:characteristic _:b226 . qudt:T rdfs:subClassOf qudt:Unit . dpm:Reset_T_H_heat rdfs:label "Reset T_H_heat" . dpm:range_start rdfs:label "range start" . dpm:MagneticPropertiesMeasuringProcessIsothermal rdfs:subClassOf dpm:MagneticPropertiesMeasuringProcess . dpm:range_step rdfs:range pmd:ValueObject ; rdfs:domain pmd:Range . dpm:Reset_T_H_heat rdfs:subClassOf pmd:Reset_T_H . dpm:Reset_T_H_cool rdfs:subClassOf pmd:Reset_T_H . dpm:range_start rdfs:range pmd:ValueObject ; rdfs:domain pmd:Range . dpm:B_step_isoT rdfs:label "B_step isoT" . dpm:MeasurementMagneticProperties-BulkSampleTS2022-11-03a-AM-a-b pmd:subordinateProcess dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a rdf:type dpm:MagneticPropertiesMeasuringProcessIsothermal . dpm:range_end rdfs:range pmd:ValueObject ; rdfs:domain pmd:Range . dpm:Range rdfs:subClassOf pmd:ValueObject . dpm:Reset_T_H rdfs:label "Reset T_H" . dpm:range_end rdfs:label "range end" . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b225 . _:b225 rdf:type dpm:Reset_T_H_cool . dpm:MagneticPropertiesMeasuringProcessIsothermal rdfs:label "Magnetic Properties Measuring Process Isothermal" . _:b227 pmd:value "260"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Temperature ; pmd:unit qudt:K . _:b228 pmd:characteristic _:b227 . qudt:K rdfs:subClassOf qudt:Unit . _:b229 pmd:value "340"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:MagneticField ; pmd:unit qudt:T . _:b228 pmd:characteristic _:b229 . qudt:T rdfs:subClassOf qudt:Unit . dpm:Range rdfs:comment "A range consists of three values: start, end, and step." . dpm:Reset_T_H_cool rdfs:label "Reset T_H_cool" . dpm:MeasurementIsothermaldMagneticPropertiesMeasurement-BulkSampleTS2022-11-03-b-AM-a-a-a pmd:characteristic _:b228 . dpm:Range rdfs:label "Range" . _:b228 rdf:type dpm:Reset_T_H_heat . dpm:Reset_T_H rdfs:subClassOf pmd:SetPoint . dpm:intendedCompound rdfs:subPropertyOf pmd:composedOf ; rdfs:label "intended Compound" . dpm:BulkSampleTS2022-11-03-a dpm:intendedCompound dpm:MnNi0.6Co0.4Ge0.97Al0.03 . dpm:SampleBulkCompound rdfs:label "Sample Bulk Compound" . _:b230 pmd:value "0.0032595867"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Mass ; pmd:unit qudt:KiloGM . dpm:BulkSampleTS2022-11-03-a pmd:characteristic _:b230 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:SynthesisProcessBulk-BulkSampleTS2022-11-03-a-a rdf:type dpm:SynthesisProcess ; pmd:output dpm:BulkSampleTS2022-11-03-a . dpm:BulkSampleTS2022-11-03-a rdfs:label "MnNi0.6Co0.4Ge0.97Al0.03" . dpm:SampleBulkCompound rdfs:subClassOf pmd:Sample . dpm:BulkSampleTS2022-11-03-a rdf:type dpm:SampleBulkCompound . dpm:SynthesisProcess rdfs:label "Synthesis Process" ; rdfs:subClassOf pmd:ManufactureProcess . _:b231 pmd:value "0.999"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . _:b232 pmd:characteristic _:b231 . qudt:PERCENT rdfs:subClassOf qudt:Unit . _:b233 pmd:value "0.00098735"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:TargetMass ; pmd:unit qudt:KiloGM . _:b234 pmd:characteristic _:b233 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MassDeviation rdfs:subClassOf qudt:Mass . dpm:piece rdfs:subClassOf dpm:MaterialShape . dpm:TargetMass rdfs:subClassOf qudt:Mass . _:b232 pmd:relatesToElement dpm:Mn . dpm:ActualMass rdfs:label "Actual Mass" . dpm:Purity rdfs:subClassOf pmd:ValueObject . dpm:ActualMass rdfs:subClassOf qudt:Mass . dpm:MassDeviation rdfs:label "Mass Deviation" . dpm:TargetMass rdfs:label "Target Mass" . _:b235 pmd:value "-1E-8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:MassDeviation ; pmd:unit qudt:KiloGM . _:b234 pmd:characteristic _:b235 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b236 pmd:value "0.00098736"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ActualMass ; pmd:unit qudt:KiloGM . _:b234 pmd:characteristic _:b236 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:Purity rdfs:label "Purity" . dpm:BulkSampleTS2022-11-03-a pmd:composedOf _:b232 . _:b237 pmd:value "0.999"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . _:b238 pmd:characteristic _:b237 . qudt:PERCENT rdfs:subClassOf qudt:Unit . _:b239 pmd:value "0.00062052"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:TargetMass ; pmd:unit qudt:KiloGM . _:b240 pmd:characteristic _:b239 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MassDeviation rdfs:subClassOf qudt:Mass . dpm:piece rdfs:subClassOf dpm:MaterialShape . dpm:TargetMass rdfs:subClassOf qudt:Mass . _:b238 pmd:relatesToElement dpm:Ni . dpm:ActualMass rdfs:label "Actual Mass" . dpm:Purity rdfs:subClassOf pmd:ValueObject . dpm:ActualMass rdfs:subClassOf qudt:Mass . dpm:MassDeviation rdfs:label "Mass Deviation" . dpm:TargetMass rdfs:label "Target Mass" . _:b241 pmd:value "1E-7"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:MassDeviation ; pmd:unit qudt:KiloGM . _:b240 pmd:characteristic _:b241 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b242 pmd:value "0.00062042"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ActualMass ; pmd:unit qudt:KiloGM . _:b240 pmd:characteristic _:b242 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:Purity rdfs:label "Purity" . dpm:BulkSampleTS2022-11-03-a pmd:composedOf _:b238 . _:b243 pmd:value "0.999"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . _:b244 pmd:characteristic _:b243 . qudt:PERCENT rdfs:subClassOf qudt:Unit . _:b245 pmd:value "0.00041538"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:TargetMass ; pmd:unit qudt:KiloGM . _:b246 pmd:characteristic _:b245 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MassDeviation rdfs:subClassOf qudt:Mass . dpm:piece rdfs:subClassOf dpm:MaterialShape . dpm:TargetMass rdfs:subClassOf qudt:Mass . _:b244 pmd:relatesToElement dpm:Co . dpm:ActualMass rdfs:label "Actual Mass" . dpm:Purity rdfs:subClassOf pmd:ValueObject . dpm:ActualMass rdfs:subClassOf qudt:Mass . dpm:MassDeviation rdfs:label "Mass Deviation" . dpm:TargetMass rdfs:label "Target Mass" . _:b247 pmd:value "0"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:MassDeviation ; pmd:unit qudt:KiloGM . _:b246 pmd:characteristic _:b247 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b248 pmd:value "0.00041538"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ActualMass ; pmd:unit qudt:KiloGM . _:b246 pmd:characteristic _:b248 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:Purity rdfs:label "Purity" . dpm:BulkSampleTS2022-11-03-a pmd:composedOf _:b244 . _:b249 pmd:value "0.999"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . _:b250 pmd:characteristic _:b249 . qudt:PERCENT rdfs:subClassOf qudt:Unit . _:b251 pmd:value "0.00124147"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:TargetMass ; pmd:unit qudt:KiloGM . _:b252 pmd:characteristic _:b251 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MassDeviation rdfs:subClassOf qudt:Mass . dpm:piece rdfs:subClassOf dpm:MaterialShape . dpm:TargetMass rdfs:subClassOf qudt:Mass . _:b250 pmd:relatesToElement dpm:Ge . dpm:ActualMass rdfs:label "Actual Mass" . dpm:Purity rdfs:subClassOf pmd:ValueObject . dpm:ActualMass rdfs:subClassOf qudt:Mass . dpm:MassDeviation rdfs:label "Mass Deviation" . dpm:TargetMass rdfs:label "Target Mass" . _:b253 pmd:value "7E-8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:MassDeviation ; pmd:unit qudt:KiloGM . _:b252 pmd:characteristic _:b253 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b254 pmd:value "0.00124140"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ActualMass ; pmd:unit qudt:KiloGM . _:b252 pmd:characteristic _:b254 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:Purity rdfs:label "Purity" . dpm:BulkSampleTS2022-11-03-a pmd:composedOf _:b250 . _:b255 pmd:value "0.999"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . _:b256 pmd:characteristic _:b255 . qudt:PERCENT rdfs:subClassOf qudt:Unit . _:b257 pmd:value "0.00001423"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:TargetMass ; pmd:unit qudt:KiloGM . _:b258 pmd:characteristic _:b257 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:MassDeviation rdfs:subClassOf qudt:Mass . dpm:piece rdfs:subClassOf dpm:MaterialShape . dpm:TargetMass rdfs:subClassOf qudt:Mass . _:b256 pmd:relatesToElement dpm:Al . dpm:ActualMass rdfs:label "Actual Mass" . dpm:Purity rdfs:subClassOf pmd:ValueObject . dpm:ActualMass rdfs:subClassOf qudt:Mass . dpm:MassDeviation rdfs:label "Mass Deviation" . dpm:TargetMass rdfs:label "Target Mass" . _:b259 pmd:value "1E-8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:MassDeviation ; pmd:unit qudt:KiloGM . _:b258 pmd:characteristic _:b259 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b260 pmd:value "0.00001422"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ActualMass ; pmd:unit qudt:KiloGM . _:b258 pmd:characteristic _:b260 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:Purity rdfs:label "Purity" . dpm:BulkSampleTS2022-11-03-a pmd:composedOf _:b256 . dpm:OxidLayerThickness rdfs:label "Oxid Layer Thickness" . dpm:ThinFilmSubstratMgO5e-3 rdf:type dpm:SampleThinFilmSubstrateLayer . _:b261 pmd:value "0.5E-3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:SubstratLayerThickness ; pmd:unit qudt:M . dpm:ThinFilmSubstratMgO5e-3 pmd:characteristic _:b261 . qudt:M rdfs:subClassOf qudt:Unit . dpm:ThinFilmSubstratMgO5e-3 dpm:intendedCompound dpm:MgO . _:b262 pmd:value _:b263 . _:b264 rdf:rest rdf:nil ; rdf:first "5E-3"^^xsd:float . _:b263 rdf:rest _:b264 ; rdf:first "5E-3"^^xsd:float . _:b262 rdf:type pmd:Measurement ; rdf:type qudt:SubstratDimension ; pmd:unit qudt:M . dpm:ThinFilmSubstratMgO5e-3 pmd:characteristic _:b262 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SubstratLayerThickness rdfs:subClassOf qudt:Thickness . dpm:SampleThinFilmSubstrateLayer rdfs:subClassOf pmd:Sample . dpm:SubstratLayerThickness rdfs:label "Substrat Layer Thickness" . dpm:OxidLayerThickness rdfs:subClassOf qudt:Thickness . _:b265 pmd:value "0.5E-3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:OxidLayerThickness ; pmd:unit qudt:M . dpm:ThinFilmSubstratMgO5e-3 pmd:characteristic _:b265 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SampleThinFilmSubstrateLayer rdfs:label "Sample Thin Film Substrate Layer" . dpm:NominalThickness rdfs:subClassOf dpm:Nominal . dpm:ThinFilmLayerCo2CrAl60e-9 rdf:type dpm:SampleThinFilmLayer . dpm:SputterParameters_Co2CrAl_a pmd:output _:b266 . dpm:ThinFilmSynthesisProcess rdfs:label "Thin Film Synthesis Process" . dpm:NominalThickness rdfs:subClassOf qudt:Thickness . dpm:SampleThinFilmLayer rdfs:label "Sample Thin Film Layer" . dpm:ThinFilmSynthesisProcess rdf:type dpm:SynthesisProcess . dpm:ThinFilmLayerCo2CrAl60e-9 rdfs:label _:b267 . _:b268 pmd:value "60E-9"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:NominalThickness ; pmd:unit qudt:M . dpm:ThinFilmLayerCo2CrAl60e-9 pmd:characteristic _:b268 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SampleThinFilmLayer rdfs:subClassOf pmd:Sample . dpm:ThinFilmLayerCo2CrAl60e-9 dpm:intendedCompound dpm:Co2CrAl . dpm:SputterParameters_Co2CrAl_a rdf:type dpm:ThinFilmSynthesisProcess . dpm:NominalThickness rdfs:label "Nominal Thickness" . dpm:hasThinFilmLayer rdfs:subPropertyOf pmd:composedOf . dpm:ThinFilmSampleMW20221125a rdfs:label "Co2CrAl_46" . dpm:SampleThinFilm rdfs:label "Sample Thin Film" . dpm:ThinFilmSampleMW20221125a rdfs:label "LC20240103" . dpm:ThinFilmSubstratMgO5e-3 rdf:type dpm:Substrate . dpm:ThinFilmLayerCo2CrAl60e-9 rdf:type dpm:Heusler . dpm:ThinFilmSampleMW20221125a dpm:hasThinFilmLayer dpm:ThinFilmSubstratMgO5e-3 ; dpm:hasThinFilmLayer dpm:ThinFilmLayerCo2CrAl60e-9 . dpm:hasThinFilmLayer rdfs:label "has Thin Film Layer" . dpm:ThinFilmSampleMW20221125a rdf:type dpm:SampleThinFilm . dpm:SampleThinFilm rdfs:subClassOf pmd:Sample . dpm:Crushing rdfs:subClassOf pmd:ManufactureProcess . _:b269 pmd:value "10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MillingBreakTime ; pmd:unit qudt:SEC . dpm:CrushingExampleName pmd:characteristic _:b269 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:Crushing rdfs:label "Crushing" . dpm:He rdf:type pmd:ChemicalComposition . dpm:RotationSpeed rdfs:label "Rotation Speed" . dpm:SampleToBallRatio rdfs:subClassOf qudt:RatioScale . dpm:MillingBreakTime rdfs:label "Milling Break Time" . _:b270 pmd:value "5e-4"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:BallDiameter ; pmd:unit qudt:M . _:b271 pmd:characteristic _:b270 . qudt:M rdfs:subClassOf qudt:Unit . dpm:RotationSpeed rdfs:subClassOf pmd:Frequency . dpm:SampleToBallRatio rdfs:label "Sample to Ball Ratio" . _:b272 pmd:value "5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:RotationSpeed ; pmd:unit qudt:HZ . dpm:CrushingExampleName pmd:characteristic _:b272 . qudt:HZ rdfs:subClassOf qudt:Unit . dpm:MillingCycleTime rdfs:subClassOf qudt:Time . _:b273 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . _:b271 pmd:characteristic _:b273 . _:b273 dpm:relatesToComposition dpm:He . dpm:BallDiameter rdfs:label "Ball Diameter" . _:b274 pmd:value "1"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:SampleToBallRatio ; pmd:unit qudt:RatioScale . dpm:CrushingExampleName pmd:characteristic _:b274 . qudt:RatioScale rdfs:subClassOf qudt:Unit . _:b275 pmd:value "10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MillingCycleTime ; pmd:unit qudt:SEC . dpm:CrushingExampleName pmd:characteristic _:b275 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:SampleMass rdfs:subClassOf qudt:Mass . _:b276 pmd:value "5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:RotationSpeed ; pmd:unit qudt:HZ . dpm:CrushingExampleName pmd:characteristic _:b276 . qudt:HZ rdfs:subClassOf qudt:Unit . dpm:MillingCycleTime rdfs:label "Milling Cycle Time" . dpm:SampleMass rdfs:label "Sample Mass" . dpm:CrushingExampleName pmd:input _:b277 ; pmd:input _:b271 ; pmd:input _:b278 ; pmd:input _:b279 . dpm:MillingBreakTime rdfs:subClassOf qudt:Time . dpm:BallDiameter rdfs:subClassOf qudt:Diameter . dpm:ExampleJar rdf:type dpm:Co . dpm:CrushingExampleName pmd:input dpm:ExampleJar . _:b280 pmd:value "0.02"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b277 pmd:characteristic _:b280 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:CrushingExampleName rdf:type dpm:Crushing . dpm:SampleContainer rdfs:label "Sample Container" . dpm:Melt rdfs:subClassOf pmd:ManufactureProcess . dpm:Duration rdfs:label "Duration" . _:b281 pmd:value _:b282 . _:b282 rdf:rest rdf:nil ; rdf:first "20"^^xsd:float . _:b281 rdf:type pmd:SetPoint ; rdf:type qudt:RampEnd ; pmd:unit qudt:K . _:b283 pmd:characteristic _:b281 . qudt:K rdfs:subClassOf qudt:Unit . _:b284 pmd:value _:b285 . _:b285 rdf:rest rdf:nil ; rdf:first "10"^^xsd:float . _:b284 rdf:type pmd:SetPoint ; rdf:type qudt:RampStart ; pmd:unit qudt:K . _:b286 pmd:characteristic _:b284 . qudt:K rdfs:subClassOf qudt:Unit . dpm:ExampleQuartzMelt pmd:characteristic _:b287 ; pmd:characteristic _:b288 ; pmd:characteristic _:b286 ; pmd:characteristic _:b283 . _:b289 pmd:value _:b290 . _:b290 rdf:rest rdf:nil ; rdf:first "100"^^xsd:float . _:b289 rdf:type pmd:SetPoint ; rdf:type qudt:Duration ; pmd:unit qudt:SEC . _:b291 pmd:characteristic _:b289 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:Duration rdfs:subClassOf qudt:Time . dpm:ExampleQuartzMelt rdf:type dpm:QuartzMelt . _:b292 pmd:value "10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b293 pmd:characteristic _:b292 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b294 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . _:b295 pmd:characteristic _:b294 . _:b294 dpm:relatesToComposition dpm:Ar . dpm:RampStart rdfs:subClassOf qudt:Temperature . dpm:QuartzMelt rdfs:label "Quartz Melt" . dpm:ExampleQuartzMelt pmd:output _:b296 ; pmd:output _:b297 ; pmd:output _:b298 ; pmd:output _:b299 . dpm:QuartzMelt rdfs:subClassOf dpm:Melt . dpm:RampEnd rdfs:label "Ramp End" . _:b300 pmd:value "10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Pressure ; pmd:unit qudt:PA . dpm:ExampleQuartzMelt pmd:characteristic _:b300 . qudt:PA rdfs:subClassOf qudt:Unit . _:b301 pmd:value "some quench" . dpm:ExampleQuartzMelt dpm:characteristic _:b301 . dpm:RampStart rdfs:label "Ramp Start" . dpm:RampEnd rdfs:subClassOf qudt:Temperature . dpm:Melt rdfs:label "Melt" . dpm:ExampleQuartzMelt pmd:characteristic _:b293 ; pmd:characteristic _:b295 ; pmd:characteristic _:b302 ; pmd:characteristic _:b303 . dpm:SampleContainer rdfs:subClassOf pmd:ProcessingNode . _:b304 pmd:value "some example container" . dpm:ExampleQuartzMelt dpm:characteristic _:b304 . _:b305 pmd:value "9"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b296 pmd:characteristic _:b305 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b306 pmd:value "0.001"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Weight ; pmd:unit qudt:M3 . dpm:ExampleJar pmd:characteristic _:b306 . qudt:M3 rdfs:subClassOf qudt:Unit . dpm:BallMillingJar rdfs:label "Ball Milling Jar" ; rdfs:subClassOf pmd:ProcessingNode . dpm:ExampleJar rdf:type dpm:BallMillingJar ; dpm:intendedCompound dpm:ExampleComposition . _:b307 pmd:value "20000"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Pressure ; pmd:unit qudt:PA . _:b308 pmd:characteristic _:b307 . qudt:PA rdfs:subClassOf qudt:Unit . _:b309 pmd:value "0.002998"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b310 pmd:characteristic _:b309 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b311 pmd:value "50"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Current ; pmd:unit qudt:A . _:b308 pmd:characteristic _:b311 . qudt:A rdfs:subClassOf qudt:Unit . _:b312 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . _:b313 pmd:characteristic _:b312 . _:b312 dpm:relatesToComposition dpm:Ar . _:b314 pmd:value "0.003"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b315 pmd:characteristic _:b314 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:ArcMelt rdfs:label "Arc Melt" . _:b316 pmd:value "Cu" . _:b317 dpm:characteristic _:b316 . dpm:ArcMelt rdfs:subClassOf dpm:Melt . dpm:SynthesisArcMeltBulk-BulkSampleTS2022-11-03-a-a pmd:input _:b315 ; pmd:input _:b313 ; pmd:input _:b317 ; pmd:input _:b318 . _:b308 pmd:output _:b310 ; pmd:output _:b319 ; pmd:output _:b320 ; pmd:output _:b321 . _:b322 pmd:value "3"^^xsd:int ; rdf:type pmd:SetPoint ; rdf:type qudt:Repetition ; pmd:unit qudt:A . _:b308 pmd:characteristic _:b322 . qudt:A rdfs:subClassOf qudt:Unit . _:b323 pmd:value "20000"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Pressure ; pmd:unit qudt:PA . _:b324 pmd:characteristic _:b323 . qudt:PA rdfs:subClassOf qudt:Unit . _:b325 pmd:value "0.0029781"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b326 pmd:characteristic _:b325 . qudt:KiloGM rdfs:subClassOf qudt:Unit . _:b327 pmd:value "50"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Current ; pmd:unit qudt:A . _:b324 pmd:characteristic _:b327 . qudt:A rdfs:subClassOf qudt:Unit . _:b328 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . _:b329 pmd:characteristic _:b328 . _:b328 dpm:relatesToComposition dpm:Ar . _:b330 pmd:value "0.003"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMass ; pmd:unit qudt:KiloGM . _:b331 pmd:characteristic _:b330 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:ArcMelt rdfs:label "Arc Melt" . _:b332 pmd:value "Cu" . _:b333 dpm:characteristic _:b332 . dpm:ArcMelt rdfs:subClassOf dpm:Melt . dpm:SynthesisArcMeltBulk-BulkSampleTS2022-11-03-a-b pmd:input _:b331 ; pmd:input _:b329 ; pmd:input _:b333 ; pmd:input _:b334 . _:b324 pmd:output _:b326 ; pmd:output _:b335 ; pmd:output _:b336 ; pmd:output _:b337 . _:b338 pmd:value "3"^^xsd:int ; rdf:type pmd:SetPoint ; rdf:type qudt:Repetition ; pmd:unit qudt:A . _:b324 pmd:characteristic _:b338 . qudt:A rdfs:subClassOf qudt:Unit . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b339 . _:b340 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . _:b341 pmd:characteristic _:b340 . _:b340 dpm:relatesToComposition dpm:Ar . dpm:BasePressure rdfs:label "Base Pressure" . dpm:ProcessPressure rdfs:subClassOf qudt:Pressure . _:b342 pmd:value "0.47"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ExpectedDepositionRate ; pmd:unit dpm:ANGSTROM_divby_SEC . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b342 . dpm:ANGSTROM_divby_SEC rdfs:subClassOf qudt:Unit . dpm:InitialPreSputterTime rdfs:label "Initial Pre-Sputter Time" . _:b343 pmd:value "31.1 "^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceTiltAngle ; pmd:unit qudt:DEG . _:b339 pmd:characteristic _:b343 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:DistanceSourceToSample rdfs:label "Distance Source to Sample" ; rdfs:subClassOf qudt:Distance . qudt:MagneticFieldAboveTarget rdfs:subClassOf qudt:MagneticField . dpm:SourceTiltAngle rdfs:label "Source Tilt Angle" . qudt:MagneticFieldAboveTarget rdfs:label "Magnetic Field Above Target" . _:b344 pmd:value "66"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Power ; pmd:unit qudt:W . _:b339 pmd:characteristic _:b344 . qudt:W rdfs:subClassOf qudt:Unit . dpm:DC rdfs:subClassOf pmd:ProcessingNode . _:b339 pmd:input dpm:SputterSourceCo2a . dpm:SourceTiltAngle rdfs:subClassOf qudt:Angle . _:b345 pmd:value "0.253"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:DistanceSourceToSample ; pmd:unit qudt:M . _:b339 pmd:characteristic _:b345 . qudt:M rdfs:subClassOf qudt:Unit . dpm:HomogeneityMechanism rdfs:label "Homogeneity Mechanism" . _:b346 pmd:value "2E-3 "^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ProcessPressure ; pmd:unit qudt:PA . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b346 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:SubstrateTemperature rdfs:label "Substrate Temperature" . dpm:BasePressure rdfs:subClassOf qudt:Pressure . _:b347 pmd:value "1274"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:DepositionTime ; pmd:unit qudt:SEC . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b347 . qudt:SEC rdfs:subClassOf qudt:Unit . _:b348 pmd:value "600.0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SubstrateTemperature ; pmd:unit qudt:K . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b348 . qudt:K rdfs:subClassOf qudt:Unit . dpm:ANGSTROM_divby_SEC rdfs:subClassOf qudt:Unit . dpm:Sputtering rdfs:label "Sputtering" . dpm:HomogeneityMechanism rdfs:subClassOf pmd:ManufacturingProcess . dpm:InitialPreSputterTime rdfs:subClassOf qudt:Time . dpm:ExpectedDepositionRate rdfs:label "Expected Deposition Rate" . dpm:SubstrateTemperature rdfs:subClassOf qudt:Temperature . _:b349 pmd:value "8E-10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:BasePressure ; pmd:unit qudt:PA . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b349 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:ExpectedDepositionRate rdfs:subClassOf pmd:ValueObject . dpm:DepositionTime rdfs:subClassOf qudt:Time . dpm:SputterParameters_Co2CrAl_a rdf:type dpm:Sputtering . dpm:ProcessPressure rdfs:label "Process Pressure" . dpm:SputterParameters_Co2CrAl_a pmd:input _:b341 . _:b350 pmd:value "30"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:InitialPreSputterTime ; pmd:unit qudt:SEC . dpm:SputterParameters_Co2CrAl_a pmd:characteristic _:b350 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:Sputtering rdfs:subClassOf pmd:ManufactureProcess . _:b351 pmd:value true . dpm:SputterParameters_Co2CrAl_a dpm:characteristic _:b351 . dpm:DepositionTime rdfs:label "Deposition Time" . dpm:ANGSTROM_divby_SEC rdfs:label "ANGSTROM divby SEC" . _:b352 pmd:value "123"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:DepositionRate ; pmd:unit qudt:PA . _:b353 pmd:characteristic _:b352 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:BasePressure rdfs:label "Base Pressure" . _:b354 pmd:value "14"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:BasePressure ; pmd:unit qudt:PA . _:b353 pmd:characteristic _:b354 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:ProcessPressure rdfs:subClassOf qudt:Pressure . dpm:SourceTemperature rdfs:label "Source Temperature" . _:b355 pmd:value "200"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SubstrateTemperature ; pmd:unit qudt:K . dpm:ExampleMBEParameter pmd:characteristic _:b355 . qudt:K rdfs:subClassOf qudt:Unit . dpm:SubstrateTemperature rdfs:label "Substrate Temperature" . dpm:BasePressure rdfs:subClassOf qudt:Pressure . dpm:DepositionRate rdfs:label "Deposition Rate" . dpm:MBEProcess rdfs:subClassOf pmd:ManufactureProcess . _:b356 pmd:input dpm:ExampleSource1 . _:b357 pmd:input dpm:ExampleSource2 . dpm:MBEProcess rdfs:label "MBE Process" . _:b358 pmd:value "245"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:DistanceSourceToSample ; pmd:unit qudt:M . dpm:ExampleMBEParameter pmd:characteristic _:b358 . qudt:M rdfs:subClassOf qudt:Unit . _:b359 pmd:value "43"^^xsd:int ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceTiltAngle ; pmd:unit qudt:DEG . _:b356 pmd:characteristic _:b359 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b360 pmd:value "47"^^xsd:int ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceTiltAngle ; pmd:unit qudt:DEG . _:b357 pmd:characteristic _:b360 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:SourceTemperature rdfs:subClassOf qudt:Temperature . dpm:DepositionRate rdfs:subClassOf pmd:ValueObject . _:b361 pmd:value "44"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:BasePresDepositionTimesure ; pmd:unit qudt:PA . _:b353 pmd:characteristic _:b361 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:ExampleMBEParameter rdf:type dpm:MBEProcess ; pmd:characteristic _:b356 ; pmd:characteristic _:b357 ; pmd:characteristic _:b362 ; pmd:characteristic _:b363 ; pmd:characteristic _:b364 . _:b365 pmd:value "20"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:ProcessPressure ; pmd:unit qudt:PA . _:b353 pmd:characteristic _:b365 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:SubstrateTemperature rdfs:subClassOf qudt:Temperature . _:b366 pmd:value "244"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceTemperature ; pmd:unit qudt:PA . _:b353 pmd:characteristic _:b366 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:DepositionTime rdfs:subClassOf qudt:Time . _:b367 pmd:input _:b368 . dpm:ProcessPressure rdfs:label "Process Pressure" . dpm:DepositionTime rdfs:label "Deposition Time" . dpm:SputterSourceCo2a dpm:intendedCompound dpm:Co . dpm:SputterSource rdfs:subClassOf pmd:ManufactureProcess . _:b369 pmd:value "0.0508"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Diameter ; pmd:unit qudt:M . dpm:SputterSourceCo2a pmd:characteristic _:b369 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SputterSourceCo2a rdf:type dpm:SputterSource . dpm:SputterSource rdfs:label "Sputter Source" . _:b370 pmd:value "0.999"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . dpm:SputterSourceCo2a pmd:characteristic _:b370 . qudt:PERCENT rdfs:subClassOf qudt:Unit . dpm:SputterSourceCr2a dpm:intendedCompound dpm:Cr . dpm:SputterSource rdfs:subClassOf pmd:ManufactureProcess . _:b371 pmd:value "0.0508"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Diameter ; pmd:unit qudt:M . dpm:SputterSourceCr2a pmd:characteristic _:b371 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SputterSourceCr2a rdf:type dpm:SputterSource . dpm:SputterSource rdfs:label "Sputter Source" . _:b372 pmd:value "0.999"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . dpm:SputterSourceCr2a pmd:characteristic _:b372 . qudt:PERCENT rdfs:subClassOf qudt:Unit . dpm:SputterSourceAl2a dpm:intendedCompound dpm:target_Al_a . dpm:SputterSource rdfs:subClassOf pmd:ManufactureProcess . _:b373 pmd:value "0.0508"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Diameter ; pmd:unit qudt:M . dpm:SputterSourceAl2a pmd:characteristic _:b373 . qudt:M rdfs:subClassOf qudt:Unit . dpm:SputterSourceAl2a rdf:type dpm:SputterSource . dpm:SputterSource rdfs:label "Sputter Source" . _:b374 pmd:value "0.999"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . dpm:SputterSourceAl2a pmd:characteristic _:b374 . qudt:PERCENT rdfs:subClassOf qudt:Unit . dpm:ExampleMBESource dpm:intendedCompound dpm:Co . dpm:MBESource rdfs:subClassOf pmd:ManufactureProcess . _:b375 pmd:value "0.0508"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:Purity ; pmd:unit qudt:PERCENT . dpm:ExampleMBESource pmd:characteristic _:b375 . qudt:PERCENT rdfs:subClassOf qudt:Unit . dpm:MBESource rdfs:label "MBE Source" . dpm:ExampleMBESource rdf:type dpm:MBESource . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-aProcess rdf:type dpm:TreatmentProcess ; pmd:output dpm:BulkSampleTS2022-11-03-a-AM-a . dpm:TreatmentProcess rdfs:subClassOf pmd:ManufactureProcess . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-aProcess pmd:input dpm:BulkSampleTS2022-11-03-a . dpm:TreatmentProcess rdfs:label "Treatment Process" . dpm:BulkPressProcess rdfs:subClassOf pmd:TreatmentProcess . dpm:DieDiameter rdfs:label "DieDiameter" . dpm:ExamplePressProcess rdf:type dpm:BulkPressProcess . _:b376 pmd:value "100"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Force ; pmd:unit qudt:KiloGM . dpm:ExamplePressProcess pmd:characteristic _:b376 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:TreatmentProcess rdfs:subClassOf pmd:ManufactureProcess . dpm:DieDiameter rdfs:subClassOf qudt:Diameter . _:b377 pmd:value "0.01"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:DieDiameter ; pmd:unit qudt:M . dpm:ExamplePressProcess pmd:characteristic _:b377 . qudt:M rdfs:subClassOf qudt:Unit . dpm:BulkPressProcess rdfs:label "Bulk Press Process" . dpm:MaxTemperature rdfs:label "Max Temperature" . dpm:SampleMassOut rdfs:label "Sample Mass Out" . dpm:MaxTemperature rdfs:subClassOf qudt:Temperature . _:b378 pmd:value dpm:Quartz . _:b379 dpm:characteristic _:b378 . _:b380 pmd:value "" . _:b381 dpm:characteristic _:b380 . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a rdf:type dpm:AnnealingTreatmentProcess . dpm:AnnealingTreatmentProcess rdfs:label "Annealing Treatment Process" . _:b382 pmd:value _:b383 . _:b383 rdf:rest rdf:nil ; rdf:first "200"^^xsd:float . _:b382 rdf:type pmd:SetPoint ; rdf:type qudt:RampEnd ; pmd:unit qudt:K . _:b384 pmd:characteristic _:b382 . qudt:K rdfs:subClassOf qudt:Unit . _:b385 pmd:value _:b386 . _:b386 rdf:rest rdf:nil ; rdf:first "100"^^xsd:float . _:b385 rdf:type pmd:SetPoint ; rdf:type qudt:RampStart ; pmd:unit qudt:K . _:b387 pmd:characteristic _:b385 . qudt:K rdfs:subClassOf qudt:Unit . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a pmd:characteristic _:b388 ; pmd:characteristic _:b389 ; pmd:characteristic _:b387 ; pmd:characteristic _:b384 . _:b390 pmd:value _:b391 . _:b391 rdf:rest rdf:nil ; rdf:first "5"^^xsd:float . _:b390 rdf:type pmd:SetPoint ; rdf:type qudt:Duration ; pmd:unit qudt:SEC . _:b392 pmd:characteristic _:b390 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:AnnealingTreatmentProcess rdfs:subClassOf pmd:TreatmentProcess . _:b393 pmd:value true . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a dpm:characteristic _:b393 . _:b394 pmd:value "20000"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Pressure ; pmd:unit qudt:PA . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a pmd:characteristic _:b394 . qudt:PA rdfs:subClassOf qudt:Unit . _:b395 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . dpm:TreatmentAnnealBulksample-MnNi0.6Co0.4Ge0.97Al0.03-1173-a pmd:characteristic _:b395 . _:b395 dpm:relatesToComposition dpm:Ar . dpm:SampleMassOut rdfs:subClassOf qudt:SampleMass . dpm:SampleMassIn rdfs:subClassOf qudt:SampleMass . _:b396 pmd:value "0.00216181"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMassOut ; pmd:unit qudt:KiloGM . _:b381 pmd:characteristic _:b396 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:SampleMassIn rdfs:label "Sample Mass In" . _:b397 pmd:value "1173"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:MaxTemperature ; pmd:unit qudt:K . _:b381 pmd:characteristic _:b397 . qudt:K rdfs:subClassOf qudt:Unit . _:b398 pmd:value "0.00216060"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:SampleMassOut ; pmd:unit qudt:KiloGM . _:b381 pmd:characteristic _:b398 . qudt:KiloGM rdfs:subClassOf qudt:Unit . dpm:TreatmentAnnealBulkThinFilmSampleMW20221125a4001 rdf:type dpm:AnnealingTreatmentProcess . dpm:AnnealingTreatmentProcess rdfs:label "Annealing Treatment Process" . _:b399 pmd:value _:b400 . _:b400 rdf:rest rdf:nil ; rdf:first "400"^^xsd:float . _:b399 rdf:type pmd:SetPoint ; rdf:type qudt:RampEnd ; pmd:unit qudt:K . _:b401 pmd:characteristic _:b399 . qudt:K rdfs:subClassOf qudt:Unit . _:b402 pmd:value _:b403 . _:b403 rdf:rest rdf:nil ; rdf:first "0.6666"^^xsd:float . _:b402 rdf:type pmd:SetPoint ; rdf:type qudt:RampStart ; pmd:unit qudt:K . _:b404 pmd:characteristic _:b402 . qudt:K rdfs:subClassOf qudt:Unit . dpm:TreatmentAnnealBulkThinFilmSampleMW20221125a4001 pmd:characteristic _:b405 ; pmd:characteristic _:b406 ; pmd:characteristic _:b404 ; pmd:characteristic _:b401 . _:b407 pmd:value _:b408 . _:b408 rdf:rest rdf:nil ; rdf:first "10800"^^xsd:float . _:b407 rdf:type pmd:SetPoint ; rdf:type qudt:Duration ; pmd:unit qudt:SEC . _:b409 pmd:characteristic _:b407 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:AnnealingTreatmentProcess rdfs:subClassOf pmd:TreatmentProcess . _:b410 pmd:value false . dpm:TreatmentAnnealBulkThinFilmSampleMW20221125a4001 dpm:characteristic _:b410 . _:b411 pmd:value "100"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Pressure ; pmd:unit qudt:PA . dpm:TreatmentAnnealBulkThinFilmSampleMW20221125a4001 pmd:characteristic _:b411 . qudt:PA rdfs:subClassOf qudt:Unit . _:b412 rdf:type dpm:Atmosphere ; rdf:type pmd:SetPoint . dpm:TreatmentAnnealBulkThinFilmSampleMW20221125a4001 pmd:characteristic _:b412 . _:b412 dpm:relatesToComposition dpm:Ar . dpm:TestMeasurementDataPoint pmd:value 200 ; rdf:type pmd:Measurement ; rdf:type dpm:Temperature ; pmd:unit qudt:K . _:b413 pmd:value 200 ; rdf:type pmd:Measurement ; rdf:type dpm:Temperature ; pmd:unit qudt:K . dpm:TestMeasurementProcess pmd:characteristic _:b413 . qudt:K rdfs:subClassOf qudt:Unit . _:b414 pmd:value "beautiful color" . dpm:TestMeasurementProcess dpm:characteristic _:b414 . _:b415 rdf:type pmd:Measurement ; rdf:type dpm:delta_S_data . _:b416 dcat:distribution _:b417 . dpm:TestMeasurementProcess pmd:characteristic _:b415 . _:b416 rdf:type pmd:Dataset ; rdf:type dcat:Dataset . _:b417 dcat:downloadUrl "https://www.dipromag.de" . dpm:TestMeasurementProcess pmd:resource _:b416 . _:b417 rdf:type dcat:Distribution . _:b418 rdf:type pmd:SetPoint ; rdf:type dpm:MagneticField ; dpm:range_start _:b419 ; dpm:range_end _:b420 ; dpm:range_step _:b421 ; rdf:type dpm:Range . dpm:TestMeasurementProcess pmd:characteristic _:b418 . _:b422 pmd:value 0 ; rdf:type pmd:SetPoint ; rdf:type dpm:MagneticField ; pmd:unit qudt:T . _:b419 pmd:characteristic _:b422 . qudt:T rdfs:subClassOf qudt:Unit . _:b423 pmd:value 10 ; rdf:type pmd:SetPoint ; rdf:type dpm:MagneticField ; pmd:unit qudt:T . _:b420 pmd:characteristic _:b423 . qudt:T rdfs:subClassOf qudt:Unit . _:b424 pmd:value 2 ; rdf:type pmd:SetPoint ; rdf:type dpm:MagneticField ; pmd:unit qudt:T . _:b421 pmd:characteristic _:b424 . qudt:T rdfs:subClassOf qudt:Unit . dpm:Pressure rdfs:subClassOf pmd:ValueObject . _:b425 pmd:value "0.2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:EstimatedBaseLineShift ; pmd:unit qudt:EV . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b425 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:FocalPointSize rdfs:subClassOf qudt:Diameter . _:b426 pmd:composedOf dpm:ThinFilmMW2022-11-03-b-AM-a-a . _:b427 pmd:value "5E-11"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:ChamberPressure ; pmd:unit qudt:PA . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b427 . qudt:PA rdfs:subClassOf qudt:Unit . dpm:Al_K_alpha rdfs:subClassOf dpm:RadiationSource . dpm:FilamentCurrent rdfs:subClassOf qudt:ElectricCurrent . _:b428 pmd:value "0.5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:BindingEnergy ; pmd:unit qudt:EV . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b428 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:XPSMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:ChamberPressure rdfs:subClassOf qudt:Pressure . dpm:XPSMeasuringProcess rdfs:label "XPS Measuring Process" . dpm:EstimatedBaseLineShift rdfs:subClassOf pmd:ValueObject . _:b426 rdf:type dpm:XPS . dpm:XPS rdfs:label "XPS" . dpm:FilamentVoltage rdfs:subClassOf qudt:Voltage . dpm:FocalPointSize rdfs:label "Focal Point Size" . _:b429 pmd:value "1.2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:FilamentCurrent ; pmd:unit qudt:A . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b429 . qudt:A rdfs:subClassOf qudt:Unit . _:b430 pmd:value "300.0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Temperature ; pmd:unit qudt:K . _:b431 pmd:characteristic _:b430 . qudt:K rdfs:subClassOf qudt:Unit . dpm:RadiationSource rdfs:subClassOf pmd:ValueObject . dpm:ChamberPressure rdfs:label "Chamber Pressure" . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:input _:b426 . dpm:FilamentCurrent rdfs:label "Filament Current" . dpm:Pressure rdfs:label "Pressure" . _:b432 pmd:value "13.5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:FilamentVoltage ; pmd:unit qudt:V . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b432 . qudt:V rdfs:subClassOf qudt:Unit . dpm:RadiationSource rdfs:label "Radiation Source" . dpm:Mode rdfs:label "Mode" ; rdfs:subClassOf pmd:ValueObject . dpm:XPSMode rdfs:label "XPS Mode" . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a rdf:type pmd:XPSMeasuringProcess . dpm:BindingEnergy rdfs:label "BindingEnergy" . dpm:FilamentVoltage rdfs:label "Filament Voltage" . dpm:XPSMode rdfs:subClassOf dpm:Mode . _:b433 pmd:value "1.5"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:FocalPointSize ; pmd:unit qudt:M . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b433 . qudt:M rdfs:subClassOf qudt:Unit . _:b426 rdf:type pmd:Specimen . dpm:EstimatedBaseLineShift rdfs:label "Estimated Base Line Shift" . dpm:BindingEnergy rdfs:subClassOf qudt:Energy . dpm:XPS rdfs:subClassOf pmd:MeasuringDevice . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:executedBy _:b426 . _:b434 pmd:value "2"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:EdgingRate ; pmd:unit dpm:ANGSTROM_divby_SEC . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b434 . dpm:ANGSTROM_divby_SEC rdfs:subClassOf qudt:Unit . dpm:NominalDepthAfterIonEtching rdfs:label "Nominal Depth after Ion Etching" ; rdfs:subClassOf qudt:Depth . _:b435 pmd:value "0"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyEnd ; pmd:unit qudt:EV . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b435 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:EdgingTime rdfs:subClassOf qudt:Time . _:b436 rdf:type pmd:Measurement . dpm:MeasurementXPS-ThinFilmMW2022-11-03-b-AM-a-a pmd:output dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a . _:b437 pmd:value "600.0"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:EdgingTime ; pmd:unit qudt:SEC . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b437 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:DwellTimePerStep rdfs:label "Dwell Time Per Step" . _:b438 pmd:value "0.2"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:DwellTimePerStep ; pmd:unit qudt:SEC . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b438 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:EdgingTime rdfs:label "Edging Time" . dpm:EdgingRate rdfs:label "Edging Rate" . dpm:BindingEnergyStart rdfs:subClassOf qudt:BindingEnergy . dpm:BindingEnergyStep rdfs:label "Binding Energy Step" . dpm:ArPlus_sputter rdfs:subClassOf pmd:IonSourceType . dpm:EdgingRate rdfs:subClassOf qudt:ValueObject . _:b439 pmd:value "2"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:XRayExposureTime ; pmd:unit qudt:SEC . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b439 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:BindingEnergyEnd rdfs:subClassOf qudt:BindingEnergy . dpm:XRayExposureTime rdfs:label "X-Ray Exposure Time" . _:b440 pmd:value "1400"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyStart ; pmd:unit qudt:EV . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b440 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:BindingEnergyStart rdfs:label "Binding Energy Start" . _:b441 pmd:value "5e-9"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:NominalDepthAfterIonEtching ; pmd:unit qudt:M . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b441 . qudt:M rdfs:subClassOf qudt:Unit . _:b442 pmd:value "0.8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyStep ; pmd:unit qudt:EV . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b442 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:DwellTimePerStep rdfs:subClassOf qudt:Time . dpm:BindingEnergyEnd rdfs:label "Binding Energy End" . dpm:BindingEnergyStep rdfs:subClassOf qudt:BindingEnergy . _:b443 pmd:value "50.4"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b444 pmd:characteristic _:b443 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b444 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . _:b436 pmd:composedOf _:b444 . _:b445 pmd:value "25.3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b446 pmd:characteristic _:b445 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b446 pmd:relatesToElement dpm:Cr ; rdf:type dpm:Element . _:b436 pmd:composedOf _:b446 . _:b447 pmd:value "24.3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b448 pmd:characteristic _:b447 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b448 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . _:b436 pmd:composedOf _:b448 . dpm:ArPlus_sputter rdfs:subClassOf pmd:ChemicalComposition . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b436 . dpm:BindingEnergy rdfs:label "Binding Energy" ; rdfs:subClassOf qudt:Energy . dpm:XPS rdfs:subClassOf pmd:MeasuringDevice . dpm:ANGSTROM_divby_SEC rdfs:label "ANGSTROM divby SEC" . dpm:XRayExposureTime rdfs:subClassOf qudt:Time . _:b449 pmd:value "0.2"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:DwellTimePerStep ; pmd:unit qudt:SEC . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b449 . qudt:SEC rdfs:subClassOf qudt:Unit . dpm:MeasurementXPSWideSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a rdf:type dpm:SubSpectrum . _:b450 pmd:value "0"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyEnd ; pmd:unit qudt:EV . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b450 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:SubSpectrum rdfs:subClassOf qudt:ValueObject ; rdfs:label "Sub-Spectrum" . _:b451 pmd:value "0.8"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyStep ; pmd:unit qudt:EV . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b451 . qudt:EV rdfs:subClassOf qudt:Unit . _:b452 pmd:value "1400"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:BindingEnergyStart ; pmd:unit qudt:EV . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b452 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a dpm:relatesToComposition dpm:Co . dpm:Peak_fwhm rdfs:subClassOf pmd:ValueObject . dpm:IntensityRelativeToSubSpectrum rdfs:label "Intensity Relative to Sub-Spectrum" . dpm:RelativeContributionToSubspectrum rdfs:subClassOf pmd:ValueObject . dpm:Peak rdfs:label "Peak" . dpm:PeakPosition rdfs:label "Peak Position" . dpm:Peak_fwhm rdfs:label "Peak_fwhm" . dpm:AbsolutePeakIntensity rdfs:subClassOf pmd:ValueObject . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b453 . dpm:LineShape rdfs:subClassOf dpm:GeometricShape . dpm:GaussLorentz rdfs:subClassOf dpm:LineShape . dpm:LineShape rdfs:label "Line Shape" . _:b454 pmd:value "25.5"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:IntensityRelativeToSubSpectrum ; pmd:unit qudt:PERCENT . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a pmd:characteristic _:b454 . qudt:PERCENT rdfs:subClassOf qudt:Unit . dpm:PeakPosition rdfs:subClassOf pmd:ValueObject . dpm:RelativeContributionToSubspectrum rdfs:label "Relative Contribution to Subspectrum" . dpm:AbsolutePeakIntensity rdfs:label "Absolute Peak Intensity" . dpm:IntensityRelativeToSubSpectrum rdfs:subClassOf pmd:ValueObject . dpm:MeasurementXPSSubSpectrum-ThinFilmMW2022-11-03-b-AM-a-a rdfs:label "Co 2p1/2" . dpm:Peak rdfs:subClassOf pmd:ValueObject . _:b453 rdf:type dpm:Peak . dpm:GeometricShape rdfs:label "Geometric Shape" . _:b455 rdf:type pmd:Specimen . _:b456 rdf:type dpm:XRD . _:b457 pmd:executedBy _:b456 . dpm:StepAngle rdfs:subClassOf qudt:Angle . _:b458 pmd:value "20"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:StartAngle ; pmd:unit qudt:DEG . _:b457 pmd:characteristic _:b458 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:StepAngle rdfs:label "Step Angle" . dpm:XRD rdfs:label "XRD" . _:b459 pmd:value "0.5"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:ScanRate ; pmd:unit dpm:DEG_divby_SEC . _:b457 pmd:characteristic _:b459 . dpm:DEG_divby_SEC rdfs:subClassOf qudt:Unit . dpm:EndAngle rdfs:label "End Angle" . dpm:DEG_divby_SEC rdfs:label "DEG divby SEC" . _:b457 pmd:input _:b455 . _:b455 pmd:composedOf dpm:BulkSampleTS2022-11-03-a-AM-a . _:b457 rdf:type pmd:XRDMeasuringProcess . _:b460 rdf:type dpm:Temperature ; rdf:type pmd:SetPoint ; dpm:range_start _:b461 ; dpm:range_end _:b462 ; dpm:range_step _:b463 ; rdf:type dpm:Range . _:b464 pmd:characteristic _:b460 . _:b465 pmd:value "300"^^xsd:float ; rdf:type dpm:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b461 pmd:characteristic _:b465 . qudt:K rdfs:subClassOf qudt:Unit . _:b466 pmd:value "300"^^xsd:float ; rdf:type dpm:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b462 pmd:characteristic _:b466 . qudt:K rdfs:subClassOf qudt:Unit . _:b467 pmd:value "0"^^xsd:float ; rdf:type dpm:Temperature ; rdf:type pmd:SetPoint ; pmd:unit qudt:K . _:b463 pmd:characteristic _:b467 . qudt:K rdfs:subClassOf qudt:Unit . dpm:XRDMeasuringProcess rdfs:label "XRD Measuring Process" . dpm:ScanningType rdfs:label "Scanning Type" . _:b468 pmd:value "0.05"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:StepAngle ; pmd:unit qudt:DEG . _:b457 pmd:characteristic _:b468 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:Continuous rdfs:subClassOf pmd:ScanningType . dpm:EndAngle rdfs:subClassOf qudt:Angle . _:b469 pmd:value "1.5406"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type qudt:Wavelength ; pmd:unit qudt:ANGSTROM . _:b457 pmd:characteristic _:b469 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . dpm:ScanRate rdfs:subClassOf pmd:ValueObject . dpm:XRDMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:ScanningType rdfs:subClassOf pmd:ValueObject . dpm:ScanRate rdfs:label "Scan Rate" . dpm:StartAngle rdfs:subClassOf qudt:Angle . _:b470 pmd:value "70"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:EndAngle ; pmd:unit qudt:DEG . _:b457 pmd:characteristic _:b470 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:StartAngle rdfs:label "Start Angle" . dpm:XRD rdfs:subClassOf pmd:MeasuringDevice . _:b457 pmd:output _:b471 . dpm:CellAngleGamma rdfs:subClassOf dpm:CellAngle . dpm:CellAngleAlpha rdfs:subClassOf dpm:CellAngle . dpm:CellLengthA rdfs:label "Cell LengthA" . dpm:CellVolume rdfs:subClassOf qudt:Volume . dpm:CellAngleGamma rdfs:label "Cell Angle Gamma" . _:b472 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleAlpha ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b472 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b473 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleAlpha ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b473 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b474 pmd:value "120"^^xsd:float ; rdf:type dpm:CellAngleAlpha ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b474 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b475 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleBeta ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b475 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b476 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleBeta ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b476 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b477 pmd:value "120"^^xsd:float ; rdf:type dpm:CellAngleBeta ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b477 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b478 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleGamma ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b478 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b479 pmd:value "90"^^xsd:float ; rdf:type dpm:CellAngleGamma ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b479 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b480 pmd:value "120"^^xsd:float ; rdf:type dpm:CellAngleGamma ; rdf:type pmd:Measurement ; pmd:unit qudt:DEG . _:b471 pmd:characteristic _:b480 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:CellAngleBeta rdfs:label "Cell Angle Beta" . _:b481 pmd:value "78.4376"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:CellVolume ; pmd:unit qudt:M3 . _:b471 pmd:characteristic _:b481 . qudt:M3 rdfs:subClassOf qudt:Unit . dpm:CellLength rdfs:label "Cell Length" . dpm:CellLengthC rdfs:subClassOf qudt:CellLength . _:b482 pmd:value "P63/mmc" . _:b471 dpm:characteristic _:b482 . dpm:CellVolume rdfs:label "Cell Volume" . _:b483 pmd:value "300"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type dpm:Temperature ; pmd:unit qudt:K . _:b471 pmd:characteristic _:b483 . qudt:K rdfs:subClassOf qudt:Unit . dpm:SymmetrySpaceGroup rdfs:subClassOf pmd:ValueObject . dpm:PhaseNumber rdfs:subClassOf pmd:ValueObject . dpm:CellAngleBeta rdfs:subClassOf dpm:CellAngle . dpm:PhaseNumber rdfs:label "Phase Number" . dpm:CellAngle rdfs:label "Cell Angle" . dpm:SymmetrySpaceGroup rdfs:label "Symmetry Space Group" . dpm:CellLengthB rdfs:subClassOf qudt:CellLength . dpm:CellLengthC rdfs:label "Cell LengthC" . dpm:CellLengthA rdfs:subClassOf qudt:CellLength . dpm:CellLengthB rdfs:label "Cell LengthB" . _:b484 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthA ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b484 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b485 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthA ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b485 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b486 pmd:value "5.37937"^^xsd:float ; rdf:type dpm:CellLengthA ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b486 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b487 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthB ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b487 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b488 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthB ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b488 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b489 pmd:value "5.37937"^^xsd:float ; rdf:type dpm:CellLengthB ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b489 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b490 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthC ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b490 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b491 pmd:value "4.08801"^^xsd:float ; rdf:type dpm:CellLengthC ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b491 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b492 pmd:value "5.37937"^^xsd:float ; rdf:type dpm:CellLengthC ; rdf:type pmd:Measurement ; pmd:unit qudt:ANGSTROM . _:b471 pmd:characteristic _:b492 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . dpm:CellAngle rdfs:subClassOf qudt:Agnle . dpm:CellAngleAlpha rdfs:label "Cell Angle Alpha" . dpm:CellLength rdfs:subClassOf qudt:Length . dpm:SourceCurrent rdfs:subClassOf qudt:ElectricCurrent . dpm:XRF rdfs:subClassOf pmd:MeasuringDevice . _:b493 pmd:composedOf dpm:ExampleTF . dpm:ChamberMaterial rdfs:label "Chamber Material" . dpm:SourceCurrent rdfs:label "Source Current" . dpm:SourceVoltage rdfs:label "Source Voltage" . dpm:XRF_ExampleTF rdf:type dpm:XRFMeasuringProcess . dpm:XRFMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:XRF_ExampleTF pmd:input _:b493 . _:b494 pmd:value "100"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceCurrent ; pmd:unit qudt:A . dpm:XRF_ExampleTF pmd:characteristic _:b494 . qudt:A rdfs:subClassOf qudt:Unit . dpm:ChamberAtmosphere rdfs:label "Chamber Atmosphere" . _:b495 rdf:type dpm:XRF . _:b496 pmd:value "0.2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceCurrent ; pmd:unit qudt:EV . dpm:XRF_ExampleTF pmd:characteristic _:b496 . qudt:EV rdfs:subClassOf qudt:Unit . dpm:ChamberMaterial rdfs:subClassOf pmd:ChemicalComposition . dpm:XRFMeasuringProcess rdfs:label "XRF Measuring Process" . dpm:XRF_ExampleTF pmd:executedBy _:b495 . dpm:XRF rdfs:label "XRF" . dpm:RadiationSource rdfs:label "Radiation Source" . _:b497 pmd:value "25"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SourceVoltage ; pmd:unit qudt:V . dpm:XRF_ExampleTF pmd:characteristic _:b497 . qudt:V rdfs:subClassOf qudt:Unit . dpm:EnergyResolution rdfs:subClassOf qudt:Energy . _:b493 rdf:type pmd:Specimen . dpm:ChamberAtmosphere rdfs:subClassOf pmd:ChemicalComposition . dpm:RadiationSource rdfs:subClassOf pmd:ChemicalComposition . dpm:SourceVoltage rdfs:subClassOf qudt:Voltage . dpm:EnergyResolution rdfs:label "Energy Resolution" . _:b498 pmd:value "50.4"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b499 pmd:characteristic _:b498 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b499 pmd:relatesToElement dpm:Co ; rdf:type dpm:Element . _:b500 pmd:composedOf _:b499 . _:b501 pmd:value "25.3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b502 pmd:characteristic _:b501 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b502 pmd:relatesToElement dpm:Cr ; rdf:type dpm:Element . _:b500 pmd:composedOf _:b502 . _:b503 pmd:value "24.3"^^xsd:float ; rdf:type pmd:Measurement ; rdf:type pmd:ChemicalComposition ; pmd:unit dpm:at_percent . _:b504 pmd:characteristic _:b503 . dpm:at_percent rdfs:subClassOf qudt:Unit ; rdf:type qudt:MassFraction . _:b504 pmd:relatesToElement dpm:Al ; rdf:type dpm:Element . _:b500 pmd:composedOf _:b504 . dpm:MeasuredThickness rdfs:subClassOf qudt:Measured . dpm:KG_divby_M3 rdfs:label "KG divby M3" . dpm:NominalThickness rdfs:subClassOf dpm:Nominal . dpm:SampleDensity rdfs:label "Sample Density" . _:b505 pmd:value "10.1"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:MeasuredThickness ; pmd:unit qudt:M . _:b500 pmd:characteristic _:b505 . qudt:M rdfs:subClassOf qudt:Unit . _:b500 dpm:relatesToComposition dpm:SiO2 . dpm:NominalThickness rdfs:subClassOf qudt:Thickness . dpm:SampleDensity rdfs:subClassOf qudt:Density . dpm:MeasuredThickness rdfs:subClassOf qudt:Thickness . _:b506 owl:members _:b507 . _:b508 rdf:rest rdf:nil ; rdf:first dpm:Measured . _:b507 rdf:rest _:b508 ; rdf:first dpm:Nominal . _:b506 rdf:type owl:AllDisjointProperties . _:b509 pmd:value "10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:NominalThickness ; pmd:unit qudt:M . _:b500 pmd:characteristic _:b509 . qudt:M rdfs:subClassOf qudt:Unit . dpm:NominalThickness rdfs:label "Nominal Thickness" . dpm:MeasuredThickness rdfs:label "Measured Thickness" . dpm:XRF_ExampleTF pmd:output _:b500 . _:b510 pmd:value "7.2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SampleDensity ; pmd:unit dpm:KG_divby_M3 . _:b500 pmd:characteristic _:b510 . dpm:KG_divby_M3 rdfs:subClassOf qudt:Unit . _:b511 pmd:value "7500"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:InitialXRAYDetectorCountRate ; pmd:unit qudt:CPS . _:b512 pmd:characteristic _:b511 . qudt:CPS rdfs:subClassOf qudt:Unit . _:b513 pmd:value "1"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:AngleScanRate ; pmd:unit dpm:DEG_divby_SEC . _:b512 pmd:characteristic _:b513 . dpm:DEG_divby_SEC rdfs:subClassOf qudt:Unit . dpm:BeamWidth rdfs:label "Beam Width" . dpm:XRRThinFilmSampleMW20221125a_anneal rdf:type dpm:XRRMeasuringProcess . dpm:XRR rdfs:subClassOf pmd:MeasuringDevice . dpm:XRRThinFilmSampleMW20221125a_anneal pmd:input _:b514 . dpm:Roughness rdfs:label "Roughness" . dpm:SubstrateRoughness rdfs:label "Substrate Roughness" . dpm:InitialXRAYDetectorCountRate rdfs:label "Initial XRAY Detector Count Rate" . _:b512 rdf:type dpm:XRR . dpm:XRRMeasuringProcess rdfs:subClassOf pmd:MeasuringProcess . dpm:AngleScanRate rdfs:label "Angle Scan Rate" . _:b515 pmd:value "1.540562"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Wavelength ; pmd:unit qudt:ANGSTROM . _:b512 pmd:characteristic _:b515 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . _:b516 pmd:value "0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Length ; pmd:unit qudt:M . _:b512 pmd:characteristic _:b516 . qudt:M rdfs:subClassOf qudt:Unit . _:b517 pmd:value "0.01"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:StepAngle ; pmd:unit qudt:DEG . _:b512 pmd:characteristic _:b517 . qudt:DEG rdfs:subClassOf qudt:Unit . _:b514 pmd:composedOf dpm:ThinFilmSampleMW20221125a_anneal . dpm:XRR rdfs:label "XRR" . dpm:AngleScanRate rdfs:subClassOf dpm:ScanRate . _:b518 pmd:value "2"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:EndAngle ; pmd:unit qudt:DEG . _:b512 pmd:characteristic _:b518 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:XRRMeasuringProcess rdfs:label "XRR MeasuringProcess" . dpm:BeamWidth rdfs:subClassOf qudt:Diameter . _:b514 rdf:type pmd:Specimen . _:b519 pmd:value "0"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:StartAngle ; pmd:unit qudt:DEG . _:b512 pmd:characteristic _:b519 . qudt:DEG rdfs:subClassOf qudt:Unit . dpm:XRRThinFilmSampleMW20221125a_anneal pmd:executedBy _:b512 . dpm:SubstrateRoughness rdfs:subClassOf pmd:Roughness . _:b520 pmd:value "4.3131"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SubstrateRoughness ; pmd:unit qudt:ANGSTROM . _:b512 pmd:characteristic _:b520 . qudt:ANGSTROM rdfs:subClassOf qudt:Unit . dpm:Roughness rdfs:subClassOf pmd:ValueObject . dpm:InitialXRAYDetectorCountRate rdfs:subClassOf qudt:CountingUnit . _:b521 pmd:value "0.0575E-3"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:BeamWidth ; pmd:unit qudt:M . _:b512 pmd:characteristic _:b521 . qudt:M rdfs:subClassOf qudt:Unit . dpm:XRRMapping rdfs:label "XRR Mapping" . _:b522 rdf:type dpm:XRRMapping . _:b523 pmd:value "7860.57938"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type qudt:Density ; pmd:unit dpm:KiloGM-PER-M3 . _:b522 pmd:characteristic _:b523 . dpm:KiloGM-PER-M3 rdfs:subClassOf qudt:Unit . _:b524 pmd:value "56.4E-10"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type dpm:SubstrateRoughness ; pmd:unit qudt:M . _:b522 pmd:characteristic _:b524 . qudt:M rdfs:subClassOf qudt:Unit . _:b525 pmd:value "59.3E-9"^^xsd:float ; rdf:type pmd:SetPoint ; rdf:type pmd:Thickness ; pmd:unit qudt:M . _:b522 pmd:characteristic _:b525 . qudt:M rdfs:subClassOf qudt:Unit . dpm:KiloGM-PER-M3 rdfs:label "KiloGM PER M3" . dpm:XRRMapping rdfs:subClassOf pmd:ValueObject . _:b522 pmd:characteristicOf dpm:ThinFilmLayerCo2CrAl60nm . dpm:XRRThinFilmSampleMW20221125a_anneal pmd:output _:b522 .