# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | T. J. Bright, J. I. Watjen, Z. M. Zhang, C. Muratore, A. A. Voevodin. Optical properties of HfO₂ thin films deposited by magnetron sputtering: From the visible to the far-infrared. Thin Solid Films 520, 6793–6802 (2012)
[Calculation script (Python)] COMMENTS: | Thin hafnia films of thicknesses from about 180 to 500 nm deposited on Si substrates using reactive magnetron sputtering. DATA: - type: tabulated nk data: | 3.8462e-01 2.0686e+00 1.0013e-06 3.8739e-01 2.0671e+00 1.0238e-06 3.9018e-01 2.0655e+00 1.0469e-06 3.9299e-01 2.0640e+00 1.0705e-06 3.9582e-01 2.0625e+00 1.0946e-06 3.9867e-01 2.0610e+00 1.1192e-06 4.0154e-01 2.0595e+00 1.1444e-06 4.0443e-01 2.0581e+00 1.1702e-06 4.0735e-01 2.0566e+00 1.1965e-06 4.1028e-01 2.0552e+00 1.2234e-06 4.1324e-01 2.0538e+00 1.2508e-06 4.1621e-01 2.0524e+00 1.2789e-06 4.1921e-01 2.0511e+00 1.3076e-06 4.2223e-01 2.0497e+00 1.3370e-06 4.2527e-01 2.0484e+00 1.3670e-06 4.2833e-01 2.0471e+00 1.3976e-06 4.3142e-01 2.0458e+00 1.4289e-06 4.3453e-01 2.0446e+00 1.4610e-06 4.3766e-01 2.0433e+00 1.4937e-06 4.4081e-01 2.0421e+00 1.5271e-06 4.4398e-01 2.0409e+00 1.5613e-06 4.4718e-01 2.0397e+00 1.5962e-06 4.5040e-01 2.0385e+00 1.6319e-06 4.5365e-01 2.0373e+00 1.6684e-06 4.5692e-01 2.0362e+00 1.7057e-06 4.6021e-01 2.0350e+00 1.7438e-06 4.6352e-01 2.0339e+00 1.7828e-06 4.6686e-01 2.0328e+00 1.8226e-06 4.7022e-01 2.0317e+00 1.8633e-06 4.7361e-01 2.0306e+00 1.9048e-06 4.7702e-01 2.0296e+00 1.9473e-06 4.8046e-01 2.0285e+00 1.9908e-06 4.8392e-01 2.0275e+00 2.0351e-06 4.8740e-01 2.0265e+00 2.0805e-06 4.9092e-01 2.0255e+00 2.1269e-06 4.9445e-01 2.0245e+00 2.1742e-06 4.9801e-01 2.0235e+00 2.2227e-06 5.0160e-01 2.0225e+00 2.2721e-06 5.0521e-01 2.0216e+00 2.3227e-06 5.0885e-01 2.0206e+00 2.3744e-06 5.1252e-01 2.0197e+00 2.4272e-06 5.1621e-01 2.0188e+00 2.4812e-06 5.1993e-01 2.0179e+00 2.5363e-06 5.2367e-01 2.0170e+00 2.5927e-06 5.2745e-01 2.0161e+00 2.6503e-06 5.3124e-01 2.0153e+00 2.7092e-06 5.3507e-01 2.0144e+00 2.7693e-06 5.3893e-01 2.0136e+00 2.8308e-06 5.4281e-01 2.0127e+00 2.8937e-06 5.4672e-01 2.0119e+00 2.9579e-06 5.5066e-01 2.0111e+00 3.0235e-06 5.5462e-01 2.0103e+00 3.0906e-06 5.5862e-01 2.0095e+00 3.1591e-06 5.6264e-01 2.0087e+00 3.2292e-06 5.6669e-01 2.0080e+00 3.3007e-06 5.7078e-01 2.0072e+00 3.3739e-06 5.7489e-01 2.0065e+00 3.4486e-06 5.7903e-01 2.0057e+00 3.5250e-06 5.8320e-01 2.0050e+00 3.6031e-06 5.8740e-01 2.0043e+00 3.6829e-06 5.9163e-01 2.0036e+00 3.7644e-06 5.9589e-01 2.0029e+00 3.8477e-06 6.0018e-01 2.0022e+00 3.9329e-06 6.0451e-01 2.0015e+00 4.0199e-06 6.0886e-01 2.0008e+00 4.1088e-06 6.1325e-01 2.0002e+00 4.1997e-06 6.1766e-01 1.9995e+00 4.2926e-06 6.2211e-01 1.9989e+00 4.3875e-06 6.2659e-01 1.9982e+00 4.4844e-06 6.3111e-01 1.9976e+00 4.5835e-06 6.3565e-01 1.9970e+00 4.6848e-06 6.4023e-01 1.9964e+00 4.7883e-06 6.4484e-01 1.9958e+00 4.8941e-06 6.4949e-01 1.9952e+00 5.0022e-06 6.5417e-01 1.9946e+00 5.1126e-06 6.5888e-01 1.9940e+00 5.2255e-06 6.6363e-01 1.9935e+00 5.3408e-06 6.6841e-01 1.9929e+00 5.4587e-06 6.7322e-01 1.9923e+00 5.5792e-06 6.7807e-01 1.9918e+00 5.7022e-06 6.8295e-01 1.9912e+00 5.8280e-06 6.8787e-01 1.9907e+00 5.9566e-06 6.9283e-01 1.9902e+00 6.0879e-06 6.9782e-01 1.9897e+00 6.2222e-06 7.0285e-01 1.9891e+00 6.3594e-06 7.0791e-01 1.9886e+00 6.4995e-06 7.1301e-01 1.9881e+00 6.6428e-06 7.1814e-01 1.9876e+00 6.7892e-06 7.2332e-01 1.9872e+00 6.9388e-06 7.2853e-01 1.9867e+00 7.0916e-06 7.3377e-01 1.9862e+00 7.2479e-06 7.3906e-01 1.9857e+00 7.4075e-06 7.4438e-01 1.9853e+00 7.5706e-06 7.4974e-01 1.9848e+00 7.7373e-06 7.5514e-01 1.9843e+00 7.9077e-06 7.6058e-01 1.9839e+00 8.0818e-06 7.6606e-01 1.9835e+00 8.2597e-06 7.7158e-01 1.9830e+00 8.4415e-06 7.7714e-01 1.9826e+00 8.6273e-06 7.8274e-01 1.9822e+00 8.8171e-06 7.8837e-01 1.9817e+00 9.0111e-06 7.9405e-01 1.9813e+00 9.2094e-06 7.9977e-01 1.9809e+00 9.4120e-06 8.0553e-01 1.9805e+00 9.6190e-06 8.1134e-01 1.9801e+00 9.8305e-06 8.1718e-01 1.9797e+00 1.0047e-05 8.2307e-01 1.9793e+00 1.0268e-05 8.2900e-01 1.9789e+00 1.0493e-05 8.3497e-01 1.9786e+00 1.0724e-05 8.4098e-01 1.9782e+00 1.0960e-05 8.4704e-01 1.9778e+00 1.1201e-05 8.5314e-01 1.9775e+00 1.1447e-05 8.5929e-01 1.9771e+00 1.1699e-05 8.6547e-01 1.9767e+00 1.1956e-05 8.7171e-01 1.9764e+00 1.2218e-05 8.7799e-01 1.9760e+00 1.2487e-05 8.8431e-01 1.9757e+00 1.2761e-05 8.9068e-01 1.9753e+00 1.3042e-05 8.9710e-01 1.9750e+00 1.3328e-05 9.0356e-01 1.9747e+00 1.3621e-05 9.1007e-01 1.9743e+00 1.3920e-05 9.1662e-01 1.9740e+00 1.4226e-05 9.2323e-01 1.9737e+00 1.4538e-05 9.2988e-01 1.9734e+00 1.4857e-05 9.3657e-01 1.9731e+00 1.5184e-05 9.4332e-01 1.9727e+00 1.5517e-05 9.5012e-01 1.9724e+00 1.5858e-05 9.5696e-01 1.9721e+00 1.6206e-05 9.6385e-01 1.9718e+00 1.6562e-05 9.7079e-01 1.9715e+00 1.6925e-05 9.7779e-01 1.9712e+00 1.7297e-05 9.8483e-01 1.9709e+00 1.7676e-05 9.9192e-01 1.9706e+00 1.8064e-05 9.9907e-01 1.9704e+00 1.8461e-05 1.0063e+00 1.9701e+00 1.8866e-05 1.0135e+00 1.9698e+00 1.9280e-05 1.0208e+00 1.9695e+00 1.9703e-05 1.0282e+00 1.9692e+00 2.0136e-05 1.0356e+00 1.9690e+00 2.0577e-05 1.0430e+00 1.9687e+00 2.1029e-05 1.0505e+00 1.9684e+00 2.1490e-05 1.0581e+00 1.9682e+00 2.1962e-05 1.0657e+00 1.9679e+00 2.2444e-05 1.0734e+00 1.9676e+00 2.2936e-05 1.0811e+00 1.9674e+00 2.3439e-05 1.0889e+00 1.9671e+00 2.3954e-05 1.0968e+00 1.9669e+00 2.4479e-05 1.1047e+00 1.9666e+00 2.5016e-05 1.1126e+00 1.9664e+00 2.5565e-05 1.1206e+00 1.9661e+00 2.6126e-05 1.1287e+00 1.9659e+00 2.6699e-05 1.1368e+00 1.9656e+00 2.7285e-05 1.1450e+00 1.9654e+00 2.7883e-05 1.1533e+00 1.9651e+00 2.8495e-05 1.1616e+00 1.9649e+00 2.9120e-05 1.1700e+00 1.9647e+00 2.9758e-05 1.1784e+00 1.9644e+00 3.0411e-05 1.1869e+00 1.9642e+00 3.1078e-05 1.1954e+00 1.9640e+00 3.1760e-05 1.2040e+00 1.9637e+00 3.2457e-05 1.2127e+00 1.9635e+00 3.3168e-05 1.2214e+00 1.9633e+00 3.3896e-05 1.2302e+00 1.9631e+00 3.4639e-05 1.2391e+00 1.9628e+00 3.5399e-05 1.2480e+00 1.9626e+00 3.6176e-05 1.2570e+00 1.9624e+00 3.6969e-05 1.2661e+00 1.9622e+00 3.7780e-05 1.2752e+00 1.9620e+00 3.8609e-05 1.2844e+00 1.9617e+00 3.9456e-05 1.2936e+00 1.9615e+00 4.0321e-05 1.3029e+00 1.9613e+00 4.1205e-05 1.3123e+00 1.9611e+00 4.2109e-05 1.3218e+00 1.9609e+00 4.3033e-05 1.3313e+00 1.9607e+00 4.3977e-05 1.3409e+00 1.9605e+00 4.4942e-05 1.3506e+00 1.9602e+00 4.5927e-05 1.3603e+00 1.9600e+00 4.6935e-05 1.3701e+00 1.9598e+00 4.7965e-05 1.3800e+00 1.9596e+00 4.9017e-05 1.3899e+00 1.9594e+00 5.0092e-05 1.3999e+00 1.9592e+00 5.1191e-05 1.4100e+00 1.9590e+00 5.2314e-05 1.4201e+00 1.9588e+00 5.3462e-05 1.4304e+00 1.9586e+00 5.4635e-05 1.4407e+00 1.9584e+00 5.5834e-05 1.4511e+00 1.9582e+00 5.7059e-05 1.4615e+00 1.9580e+00 5.8311e-05 1.4720e+00 1.9578e+00 5.9591e-05 1.4826e+00 1.9576e+00 6.0899e-05 1.4933e+00 1.9574e+00 6.2235e-05 1.5041e+00 1.9572e+00 6.3601e-05 1.5149e+00 1.9570e+00 6.4997e-05 1.5258e+00 1.9568e+00 6.6424e-05 1.5368e+00 1.9566e+00 6.7882e-05 1.5479e+00 1.9564e+00 6.9372e-05 1.5590e+00 1.9562e+00 7.0895e-05 1.5703e+00 1.9560e+00 7.2452e-05 1.5816e+00 1.9558e+00 7.4042e-05 1.5930e+00 1.9556e+00 7.5668e-05 1.6044e+00 1.9554e+00 7.7330e-05 1.6160e+00 1.9552e+00 7.9028e-05 1.6276e+00 1.9550e+00 8.0763e-05 1.6394e+00 1.9548e+00 8.2537e-05 1.6512e+00 1.9546e+00 8.4350e-05 1.6631e+00 1.9544e+00 8.6203e-05 1.6750e+00 1.9542e+00 8.8096e-05 1.6871e+00 1.9540e+00 9.0032e-05 1.6993e+00 1.9537e+00 9.2010e-05 1.7115e+00 1.9535e+00 9.4031e-05 1.7238e+00 1.9533e+00 9.6098e-05 1.7362e+00 1.9531e+00 9.8209e-05 1.7487e+00 1.9529e+00 1.0037e-04 1.7613e+00 1.9527e+00 1.0257e-04 1.7740e+00 1.9525e+00 1.0483e-04 1.7868e+00 1.9523e+00 1.0713e-04 1.7997e+00 1.9521e+00 1.0949e-04 1.8126e+00 1.9519e+00 1.1190e-04 1.8257e+00 1.9517e+00 1.1436e-04 1.8388e+00 1.9515e+00 1.1687e-04 1.8521e+00 1.9512e+00 1.1944e-04 1.8654e+00 1.9510e+00 1.2207e-04 1.8789e+00 1.9508e+00 1.2475e-04 1.8924e+00 1.9506e+00 1.2750e-04 1.9060e+00 1.9504e+00 1.3030e-04 1.9198e+00 1.9502e+00 1.3317e-04 1.9336e+00 1.9499e+00 1.3610e-04 1.9475e+00 1.9497e+00 1.3910e-04 1.9615e+00 1.9495e+00 1.4216e-04 1.9757e+00 1.9493e+00 1.4529e-04 1.9899e+00 1.9491e+00 1.4849e-04 2.0042e+00 1.9488e+00 1.5176e-04 2.0187e+00 1.9486e+00 1.5510e-04 2.0332e+00 1.9484e+00 1.5852e-04 2.0479e+00 1.9481e+00 1.6201e-04 2.0626e+00 1.9479e+00 1.6558e-04 2.0775e+00 1.9477e+00 1.6923e-04 2.0924e+00 1.9474e+00 1.7296e-04 2.1075e+00 1.9472e+00 1.7677e-04 2.1227e+00 1.9470e+00 1.8067e-04 2.1380e+00 1.9467e+00 1.8465e-04 2.1534e+00 1.9465e+00 1.8872e-04 2.1689e+00 1.9462e+00 1.9289e-04 2.1845e+00 1.9460e+00 1.9714e-04 2.2003e+00 1.9457e+00 2.0149e-04 2.2161e+00 1.9455e+00 2.0594e-04 2.2321e+00 1.9452e+00 2.1048e-04 2.2481e+00 1.9450e+00 2.1513e-04 2.2643e+00 1.9447e+00 2.1988e-04 2.2806e+00 1.9444e+00 2.2473e-04 2.2971e+00 1.9442e+00 2.2970e-04 2.3136e+00 1.9439e+00 2.3477e-04 2.3303e+00 1.9436e+00 2.3996e-04 2.3471e+00 1.9434e+00 2.4526e-04 2.3640e+00 1.9431e+00 2.5068e-04 2.3810e+00 1.9428e+00 2.5622e-04 2.3982e+00 1.9425e+00 2.6189e-04 2.4154e+00 1.9422e+00 2.6768e-04 2.4328e+00 1.9420e+00 2.7360e-04 2.4504e+00 1.9417e+00 2.7965e-04 2.4680e+00 1.9414e+00 2.8584e-04 2.4858e+00 1.9411e+00 2.9217e-04 2.5037e+00 1.9408e+00 2.9864e-04 2.5217e+00 1.9405e+00 3.0525e-04 2.5399e+00 1.9402e+00 3.1201e-04 2.5582e+00 1.9399e+00 3.1892e-04 2.5766e+00 1.9396e+00 3.2599e-04 2.5952e+00 1.9392e+00 3.3321e-04 2.6139e+00 1.9389e+00 3.4060e-04 2.6327e+00 1.9386e+00 3.4815e-04 2.6516e+00 1.9383e+00 3.5588e-04 2.6707e+00 1.9379e+00 3.6377e-04 2.6900e+00 1.9376e+00 3.7184e-04 2.7094e+00 1.9373e+00 3.8010e-04 2.7289e+00 1.9369e+00 3.8854e-04 2.7485e+00 1.9366e+00 3.9717e-04 2.7683e+00 1.9362e+00 4.0599e-04 2.7883e+00 1.9359e+00 4.1501e-04 2.8084e+00 1.9355e+00 4.2424e-04 2.8286e+00 1.9351e+00 4.3367e-04 2.8490e+00 1.9348e+00 4.4331e-04 2.8695e+00 1.9344e+00 4.5318e-04 2.8902e+00 1.9340e+00 4.6326e-04 2.9110e+00 1.9336e+00 4.7357e-04 2.9319e+00 1.9332e+00 4.8412e-04 2.9531e+00 1.9328e+00 4.9490e-04 2.9743e+00 1.9324e+00 5.0593e-04 2.9958e+00 1.9320e+00 5.1721e-04 3.0173e+00 1.9316e+00 5.2874e-04 3.0391e+00 1.9312e+00 5.4053e-04 3.0610e+00 1.9308e+00 5.5259e-04 3.0830e+00 1.9304e+00 5.6493e-04 3.1052e+00 1.9299e+00 5.7754e-04 3.1276e+00 1.9295e+00 5.9044e-04 3.1501e+00 1.9291e+00 6.0363e-04 3.1728e+00 1.9286e+00 6.1713e-04 3.1957e+00 1.9282e+00 6.3093e-04 3.2187e+00 1.9277e+00 6.4504e-04 3.2419e+00 1.9272e+00 6.5947e-04 3.2652e+00 1.9268e+00 6.7424e-04 3.2887e+00 1.9263e+00 6.8934e-04 3.3124e+00 1.9258e+00 7.0478e-04 3.3363e+00 1.9253e+00 7.2058e-04 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3.7713e+00 5.0579e-02 4.0605e+02 3.7713e+00 5.0209e-02 4.0897e+02 3.7712e+00 4.9843e-02 4.1192e+02 3.7711e+00 4.9480e-02 4.1488e+02 3.7710e+00 4.9119e-02 4.1787e+02 3.7710e+00 4.8761e-02 4.2088e+02 3.7709e+00 4.8406e-02 4.2391e+02 3.7708e+00 4.8053e-02 4.2697e+02 3.7708e+00 4.7703e-02 4.3004e+02 3.7707e+00 4.7355e-02 4.3314e+02 3.7706e+00 4.7011e-02 4.3626e+02 3.7705e+00 4.6669e-02 4.3940e+02 3.7705e+00 4.6329e-02 4.4257e+02 3.7704e+00 4.5992e-02 4.4576e+02 3.7704e+00 4.5657e-02 4.4897e+02 3.7703e+00 4.5325e-02 4.5220e+02 3.7702e+00 4.4996e-02 4.5546e+02 3.7702e+00 4.4669e-02 4.5874e+02 3.7701e+00 4.4344e-02 4.6204e+02 3.7700e+00 4.4022e-02 4.6537e+02 3.7700e+00 4.3702e-02 4.6872e+02 3.7699e+00 4.3385e-02 4.7210e+02 3.7699e+00 4.3070e-02 4.7550e+02 3.7698e+00 4.2757e-02 4.7893e+02 3.7698e+00 4.2447e-02 4.8237e+02 3.7697e+00 4.2139e-02 4.8585e+02 3.7696e+00 4.1833e-02 4.8935e+02 3.7696e+00 4.1530e-02 4.9287e+02 3.7695e+00 4.1229e-02 4.9642e+02 3.7695e+00 4.0930e-02 5.0000e+02 3.7694e+00 4.0633e-02 CONDITIONS: substrate: Si