# this file is part of refractiveindex.info database
# refractiveindex.info database is in the public domain
# copyright and related rights waived via CC0 1.0

REFERENCES: |
    L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama.
    Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced chemical vapor deposition.
    <a href="https://doi.org/10.1016/j.tsf.2022.139568"><i>Thin Solid Films</i> <b>763</b>, 139568 (2022)</a>
    (Numerical data kindly provided by Osamu Takayama)
COMMENTS: |
    100 nm thick film deposited by plasma-enchased CVD with certain recipe as an example. Optical properties of SiN films produced by different deposition methods and process parameters can be found in the reference.
DATA:
  - type: tabulated nk
    data: |
        0.21140 2.52782 1.59962E-01
        0.21298 2.51768 1.50938E-01
        0.21456 2.50770 1.42345E-01
        0.21614 2.49788 1.34161E-01
        0.21772 2.48823 1.26366E-01
        0.21930 2.47874 1.18942E-01
        0.22089 2.46941 1.11870E-01
        0.22247 2.46025 1.05135E-01
        0.22405 2.45124 9.87212E-02
        0.22563 2.44239 9.26139E-02
        0.22721 2.43370 8.67992E-02
        0.22880 2.42517 8.12643E-02
        0.23038 2.41679 7.59968E-02
        0.23196 2.40856 7.09853E-02
        0.23354 2.40047 6.62188E-02
        0.23513 2.39254 6.16872E-02
        0.23671 2.38475 5.73806E-02
        0.23829 2.37711 5.32900E-02
        0.23987 2.36960 4.94066E-02
        0.24146 2.36223 4.57222E-02
        0.24304 2.35501 4.22290E-02
        0.24462 2.34791 3.89197E-02
        0.24621 2.34095 3.57874E-02
        0.24779 2.33412 3.28252E-02
        0.24937 2.32742 3.00270E-02
        0.25096 2.32085 2.73867E-02
        0.25254 2.31440 2.48991E-02
        0.25412 2.30808 2.25581E-02
        0.25571 2.30188 2.03592E-02
        0.25729 2.29580 1.82973E-02
        0.25887 2.28984 1.63677E-02
        0.26046 2.28400 1.45661E-02
        0.26204 2.27828 1.28880E-02
        0.26363 2.27267 1.13298E-02
        0.26521 2.26718 9.88740E-03
        0.26680 2.26180 8.55734E-03
        0.26838 2.25654 7.33580E-03
        0.26996 2.25138 6.21973E-03
        0.27155 2.24634 5.20602E-03
        0.27313 2.24141 4.29126E-03
        0.27472 2.23660 3.47269E-03
        0.27630 2.23189 2.74744E-03
        0.27789 2.22730 2.11310E-03
        0.27947 2.22282 1.56670E-03
        0.28106 2.21845 1.10595E-03
        0.28264 2.21420 7.28479E-04
        0.28423 2.21007 4.31887E-04
        0.28581 2.20606 2.14183E-04
        0.28740 2.20217 7.28827E-05
        0.28898 2.19842 6.14076E-06
        0.29057 2.19484 0.00000E+00
        0.29215 2.19141 0.00000E+00
        0.29374 2.18811 0.00000E+00
        0.29533 2.18492 0.00000E+00
        0.29691 2.18183 0.00000E+00
        0.29850 2.17883 0.00000E+00
        0.30008 2.17592 0.00000E+00
        0.30167 2.17309 0.00000E+00
        0.30325 2.17034 0.00000E+00
        0.30484 2.16766 0.00000E+00
        0.30643 2.16506 0.00000E+00
        0.30801 2.16252 0.00000E+00
        0.30960 2.16004 0.00000E+00
        0.31119 2.15763 0.00000E+00
        0.31277 2.15527 0.00000E+00
        0.31436 2.15297 0.00000E+00
        0.31595 2.15073 0.00000E+00
        0.31753 2.14853 0.00000E+00
        0.31912 2.14639 0.00000E+00
        0.32070 2.14429 0.00000E+00
        0.32229 2.14224 0.00000E+00
        0.32388 2.14024 0.00000E+00
        0.32547 2.13828 0.00000E+00
        0.32705 2.13636 0.00000E+00
        0.32864 2.13448 0.00000E+00
        0.33023 2.13264 0.00000E+00
        0.33181 2.13083 0.00000E+00
        0.33340 2.12907 0.00000E+00
        0.33499 2.12734 0.00000E+00
        0.33658 2.12564 0.00000E+00
        0.33816 2.12398 0.00000E+00
        0.33975 2.12235 0.00000E+00
        0.34134 2.12075 0.00000E+00
        0.34292 2.11918 0.00000E+00
        0.34451 2.11764 0.00000E+00
        0.34610 2.11614 0.00000E+00
        0.34769 2.11465 0.00000E+00
        0.34928 2.11320 0.00000E+00
        0.35086 2.11177 0.00000E+00
        0.35245 2.11037 0.00000E+00
        0.35404 2.10900 0.00000E+00
        0.35563 2.10764 0.00000E+00
        0.35721 2.10632 0.00000E+00
        0.35880 2.10501 0.00000E+00
        0.36039 2.10373 0.00000E+00
        0.36198 2.10247 0.00000E+00
        0.36357 2.10123 0.00000E+00
        0.36515 2.10001 0.00000E+00
        0.36674 2.09882 0.00000E+00
        0.36833 2.09764 0.00000E+00
        0.36992 2.09648 0.00000E+00
        0.37151 2.09534 0.00000E+00
        0.37310 2.09422 0.00000E+00
        0.37468 2.09312 0.00000E+00
        0.37627 2.09204 0.00000E+00
        0.37786 2.09097 0.00000E+00
        0.37945 2.08992 0.00000E+00
        0.38104 2.08889 0.00000E+00
        0.38263 2.08787 0.00000E+00
        0.38422 2.08687 0.00000E+00
        0.38581 2.08589 0.00000E+00
        0.38739 2.08492 0.00000E+00
        0.38898 2.08396 0.00000E+00
        0.39057 2.08302 0.00000E+00
        0.39216 2.08209 0.00000E+00
        0.39375 2.08118 0.00000E+00
        0.39534 2.08028 0.00000E+00
        0.39693 2.07939 0.00000E+00
        0.39852 2.07852 0.00000E+00
        0.40011 2.07766 0.00000E+00
        0.40169 2.07681 0.00000E+00
        0.40328 2.07598 0.00000E+00
        0.40487 2.07515 0.00000E+00
        0.40646 2.07434 0.00000E+00
        0.40805 2.07354 0.00000E+00
        0.40964 2.07275 0.00000E+00
        0.41123 2.07197 0.00000E+00
        0.41282 2.07121 0.00000E+00
        0.41441 2.07045 0.00000E+00
        0.41600 2.06970 0.00000E+00
        0.41759 2.06897 0.00000E+00
        0.41918 2.06824 0.00000E+00
        0.42077 2.06753 0.00000E+00
        0.42235 2.06682 0.00000E+00
        0.42394 2.06612 0.00000E+00
        0.42553 2.06544 0.00000E+00
        0.42712 2.06476 0.00000E+00
        0.42871 2.06409 0.00000E+00
        0.43030 2.06343 0.00000E+00
        0.43189 2.06277 0.00000E+00
        0.43348 2.06213 0.00000E+00
        0.43507 2.06150 0.00000E+00
        0.43666 2.06087 0.00000E+00
        0.43825 2.06025 0.00000E+00
        0.43984 2.05964 0.00000E+00
        0.44143 2.05903 0.00000E+00
        0.44302 2.05844 0.00000E+00
        0.44461 2.05785 0.00000E+00
        0.44620 2.05727 0.00000E+00
        0.44779 2.05669 0.00000E+00
        0.44938 2.05613 0.00000E+00
        0.45097 2.05557 0.00000E+00
        0.45256 2.05501 0.00000E+00
        0.45415 2.05447 0.00000E+00
        0.45574 2.05393 0.00000E+00
        0.45733 2.05340 0.00000E+00
        0.45892 2.05287 0.00000E+00
        0.46051 2.05235 0.00000E+00
        0.46210 2.05183 0.00000E+00
        0.46369 2.05133 0.00000E+00
        0.46528 2.05082 0.00000E+00
        0.46687 2.05033 0.00000E+00
        0.46846 2.04984 0.00000E+00
        0.47005 2.04935 0.00000E+00
        0.47164 2.04887 0.00000E+00
        0.47323 2.04840 0.00000E+00
        0.47482 2.04793 0.00000E+00
        0.47641 2.04747 0.00000E+00
        0.47800 2.04701 0.00000E+00
        0.47959 2.04656 0.00000E+00
        0.48118 2.04611 0.00000E+00
        0.48277 2.04567 0.00000E+00
        0.48436 2.04523 0.00000E+00
        0.48595 2.04480 0.00000E+00
        0.48754 2.04437 0.00000E+00
        0.48913 2.04395 0.00000E+00
        0.49072 2.04353 0.00000E+00
        0.49231 2.04312 0.00000E+00
        0.49390 2.04271 0.00000E+00
        0.49549 2.04230 0.00000E+00
        0.49708 2.04190 0.00000E+00
        0.49867 2.04151 0.00000E+00
        0.50026 2.04111 0.00000E+00
        0.50185 2.04073 0.00000E+00
        0.50344 2.04034 0.00000E+00
        0.50503 2.03996 0.00000E+00
        0.50662 2.03959 0.00000E+00
        0.50821 2.03922 0.00000E+00
        0.50980 2.03885 0.00000E+00
        0.51139 2.03849 0.00000E+00
        0.51298 2.03813 0.00000E+00
        0.51457 2.03777 0.00000E+00
        0.51616 2.03742 0.00000E+00
        0.51775 2.03707 0.00000E+00
        0.51934 2.03672 0.00000E+00
        0.52093 2.03638 0.00000E+00
        0.52252 2.03604 0.00000E+00
        0.52411 2.03571 0.00000E+00
        0.52569 2.03538 0.00000E+00
        0.52728 2.03505 0.00000E+00
        0.52887 2.03472 0.00000E+00
        0.53046 2.03440 0.00000E+00
        0.53205 2.03408 0.00000E+00
        0.53364 2.03377 0.00000E+00
        0.53523 2.03346 0.00000E+00
        0.53682 2.03315 0.00000E+00
        0.53841 2.03284 0.00000E+00
        0.54000 2.03254 0.00000E+00
        0.54159 2.03224 0.00000E+00
        0.54318 2.03194 0.00000E+00
        0.54477 2.03165 0.00000E+00
        0.54636 2.03135 0.00000E+00
        0.54795 2.03106 0.00000E+00
        0.54954 2.03078 0.00000E+00
        0.55113 2.03050 0.00000E+00
        0.55272 2.03022 0.00000E+00
        0.55431 2.02994 0.00000E+00
        0.55590 2.02966 0.00000E+00
        0.55749 2.02939 0.00000E+00
        0.55908 2.02912 0.00000E+00
        0.56067 2.02885 0.00000E+00
        0.56226 2.02859 0.00000E+00
        0.56385 2.02832 0.00000E+00
        0.56544 2.02806 0.00000E+00
        0.56703 2.02781 0.00000E+00
        0.56861 2.02755 0.00000E+00
        0.57020 2.02730 0.00000E+00
        0.57179 2.02705 0.00000E+00
        0.57338 2.02680 0.00000E+00
        0.57497 2.02655 0.00000E+00
        0.57656 2.02631 0.00000E+00
        0.57815 2.02607 0.00000E+00
        0.57974 2.02583 0.00000E+00
        0.58133 2.02559 0.00000E+00
        0.58292 2.02535 0.00000E+00
        0.58451 2.02512 0.00000E+00
        0.58610 2.02489 0.00000E+00
        0.58768 2.02466 0.00000E+00
        0.58927 2.02443 0.00000E+00
        0.59086 2.02421 0.00000E+00
        0.59245 2.02398 0.00000E+00
        0.59404 2.02376 0.00000E+00
        0.59563 2.02354 0.00000E+00
        0.59722 2.02332 0.00000E+00
        0.59881 2.02311 0.00000E+00
        0.60039 2.02289 0.00000E+00
        0.60198 2.02268 0.00000E+00
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        0.60516 2.02226 0.00000E+00
        0.60675 2.02206 0.00000E+00
        0.60834 2.02185 0.00000E+00
        0.60993 2.02165 0.00000E+00
        0.61151 2.02145 0.00000E+00
        0.61310 2.02125 0.00000E+00
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        0.61628 2.02086 0.00000E+00
        0.61787 2.02066 0.00000E+00
        0.61946 2.02047 0.00000E+00
        0.62104 2.02028 0.00000E+00
        0.62263 2.02009 0.00000E+00
        0.62422 2.01990 0.00000E+00
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        0.62740 2.01953 0.00000E+00
        0.62898 2.01934 0.00000E+00
        0.63057 2.01916 0.00000E+00
        0.63216 2.01898 0.00000E+00
        0.63375 2.01880 0.00000E+00
        0.63533 2.01862 0.00000E+00
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        0.65597 2.01643 0.00000E+00
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        0.69087 2.01320 0.00000E+00
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        0.69404 2.01293 0.00000E+00
        0.69562 2.01280 0.00000E+00
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        0.94014 1.99991 0.00000E+00
        0.94171 1.99986 0.00000E+00
        0.94328 1.99981 0.00000E+00
        0.94485 1.99976 0.00000E+00
        0.94641 1.99971 0.00000E+00
        0.94798 1.99966 0.00000E+00
        0.94955 1.99961 0.00000E+00
        0.95111 1.99956 0.00000E+00
        0.95268 1.99951 0.00000E+00
        0.95425 1.99947 0.00000E+00
        0.95581 1.99942 0.00000E+00
        0.95738 1.99937 0.00000E+00
        0.95894 1.99932 0.00000E+00
        0.96051 1.99927 0.00000E+00
        0.96207 1.99923 0.00000E+00
        0.96364 1.99918 0.00000E+00
        0.96520 1.99913 0.00000E+00
        0.96677 1.99908 0.00000E+00
        0.96833 1.99904 0.00000E+00
        0.96990 1.99899 0.00000E+00
        0.97146 1.99895 0.00000E+00
        0.97303 1.99890 0.00000E+00
        0.97459 1.99885 0.00000E+00
        0.97616 1.99881 0.00000E+00
        0.97772 1.99876 0.00000E+00
        0.97928 1.99872 0.00000E+00
        0.98085 1.99867 0.00000E+00
        0.98241 1.99863 0.00000E+00
        0.98397 1.99859 0.00000E+00
        0.98554 1.99854 0.00000E+00
        0.98710 1.99850 0.00000E+00
        0.98866 1.99845 0.00000E+00
        0.99022 1.99841 0.00000E+00
        0.99179 1.99837 0.00000E+00
        0.99335 1.99832 0.00000E+00
        0.99491 1.99828 0.00000E+00
        0.99647 1.99824 0.00000E+00
        0.99803 1.99820 0.00000E+00
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        1.01061 1.99786 0.00000E+00
        1.01400 1.99778 0.00000E+00
        1.01740 1.99769 0.00000E+00
        1.02080 1.99760 0.00000E+00
        1.02419 1.99752 0.00000E+00
        1.02759 1.99743 0.00000E+00
        1.03099 1.99735 0.00000E+00
        1.03439 1.99727 0.00000E+00
        1.03778 1.99719 0.00000E+00
        1.04118 1.99710 0.00000E+00
        1.04458 1.99702 0.00000E+00
        1.04798 1.99694 0.00000E+00
        1.05138 1.99687 0.00000E+00
        1.05479 1.99679 0.00000E+00
        1.05819 1.99671 0.00000E+00
        1.06159 1.99663 0.00000E+00
        1.06499 1.99656 0.00000E+00
        1.06839 1.99648 0.00000E+00
        1.07180 1.99641 0.00000E+00
        1.07520 1.99634 0.00000E+00
        1.07860 1.99626 0.00000E+00
        1.08201 1.99619 0.00000E+00
        1.08541 1.99612 0.00000E+00
        1.08882 1.99605 0.00000E+00
        1.09223 1.99598 0.00000E+00
        1.09563 1.99591 0.00000E+00
        1.09904 1.99584 0.00000E+00
        1.10245 1.99577 0.00000E+00
        1.10585 1.99571 0.00000E+00
        1.10926 1.99564 0.00000E+00
        1.11267 1.99557 0.00000E+00
        1.11608 1.99551 0.00000E+00
        1.11949 1.99544 0.00000E+00
        1.12290 1.99538 0.00000E+00
        1.12631 1.99531 0.00000E+00
        1.12972 1.99525 0.00000E+00
        1.13313 1.99519 0.00000E+00
        1.13654 1.99512 0.00000E+00
        1.13996 1.99506 0.00000E+00
        1.14337 1.99500 0.00000E+00
        1.14678 1.99494 0.00000E+00
        1.15020 1.99488 0.00000E+00
        1.15361 1.99482 0.00000E+00
        1.15702 1.99476 0.00000E+00
        1.16044 1.99471 0.00000E+00
        1.16385 1.99465 0.00000E+00
        1.16727 1.99459 0.00000E+00
        1.17069 1.99453 0.00000E+00
        1.17410 1.99448 0.00000E+00
        1.17752 1.99442 0.00000E+00
        1.18094 1.99437 0.00000E+00
        1.18436 1.99431 0.00000E+00
        1.18777 1.99426 0.00000E+00
        1.19119 1.99420 0.00000E+00
        1.19461 1.99415 0.00000E+00
        1.19803 1.99410 0.00000E+00
        1.20145 1.99404 0.00000E+00
        1.20487 1.99399 0.00000E+00
        1.20829 1.99394 0.00000E+00
        1.21172 1.99389 0.00000E+00
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        1.21856 1.99379 0.00000E+00
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        1.22541 1.99369 0.00000E+00
        1.22883 1.99364 0.00000E+00
        1.23225 1.99359 0.00000E+00
        1.23568 1.99354 0.00000E+00
        1.23910 1.99349 0.00000E+00
        1.24253 1.99345 0.00000E+00
        1.24596 1.99340 0.00000E+00
        1.24938 1.99335 0.00000E+00
        1.25281 1.99331 0.00000E+00
        1.25624 1.99326 0.00000E+00
        1.25966 1.99322 0.00000E+00
        1.26309 1.99317 0.00000E+00
        1.26652 1.99313 0.00000E+00
        1.26995 1.99308 0.00000E+00
        1.27338 1.99304 0.00000E+00
        1.27681 1.99299 0.00000E+00
        1.28024 1.99295 0.00000E+00
        1.28367 1.99291 0.00000E+00
        1.28710 1.99286 0.00000E+00
        1.29054 1.99282 0.00000E+00
        1.29397 1.99278 0.00000E+00
        1.29740 1.99274 0.00000E+00
        1.30083 1.99270 0.00000E+00
        1.30427 1.99266 0.00000E+00
        1.30770 1.99261 0.00000E+00
        1.31114 1.99257 0.00000E+00
        1.31457 1.99253 0.00000E+00
        1.31801 1.99249 0.00000E+00
        1.32144 1.99245 0.00000E+00
        1.32488 1.99242 0.00000E+00
        1.32832 1.99238 0.00000E+00
        1.33175 1.99234 0.00000E+00
        1.33519 1.99230 0.00000E+00
        1.33863 1.99226 0.00000E+00
        1.34207 1.99222 0.00000E+00
        1.34551 1.99219 0.00000E+00
        1.34895 1.99215 0.00000E+00
        1.35239 1.99211 0.00000E+00
        1.35583 1.99208 0.00000E+00
        1.35927 1.99204 0.00000E+00
        1.36271 1.99200 0.00000E+00
        1.36615 1.99197 0.00000E+00
        1.36959 1.99193 0.00000E+00
        1.37303 1.99190 0.00000E+00
        1.37648 1.99186 0.00000E+00
        1.37992 1.99183 0.00000E+00
        1.38336 1.99179 0.00000E+00
        1.38681 1.99176 0.00000E+00
        1.39025 1.99173 0.00000E+00
        1.39370 1.99169 0.00000E+00
        1.39714 1.99166 0.00000E+00
        1.40059 1.99163 0.00000E+00
        1.40404 1.99159 0.00000E+00
        1.40748 1.99156 0.00000E+00
        1.41093 1.99153 0.00000E+00
        1.41438 1.99150 0.00000E+00
        1.41783 1.99146 0.00000E+00
        1.42128 1.99143 0.00000E+00
        1.42472 1.99140 0.00000E+00
        1.42817 1.99137 0.00000E+00
        1.43162 1.99134 0.00000E+00
        1.43508 1.99131 0.00000E+00
        1.43853 1.99128 0.00000E+00
        1.44198 1.99125 0.00000E+00
        1.44543 1.99122 0.00000E+00
        1.44888 1.99119 0.00000E+00
        1.45233 1.99116 0.00000E+00
        1.45579 1.99113 0.00000E+00
        1.45924 1.99110 0.00000E+00
        1.46270 1.99107 0.00000E+00
        1.46615 1.99104 0.00000E+00
        1.46960 1.99101 0.00000E+00
        1.47306 1.99098 0.00000E+00
        1.47652 1.99095 0.00000E+00
        1.47997 1.99093 0.00000E+00
        1.48343 1.99090 0.00000E+00
        1.48689 1.99087 0.00000E+00
        1.49034 1.99084 0.00000E+00
        1.49380 1.99082 0.00000E+00
        1.49726 1.99079 0.00000E+00
        1.50072 1.99076 0.00000E+00
        1.50418 1.99073 0.00000E+00
        1.50764 1.99071 0.00000E+00
        1.51110 1.99068 0.00000E+00
        1.51456 1.99066 0.00000E+00
        1.51802 1.99063 0.00000E+00
        1.52148 1.99060 0.00000E+00
        1.52494 1.99058 0.00000E+00
        1.52841 1.99055 0.00000E+00
        1.53187 1.99053 0.00000E+00
        1.53533 1.99050 0.00000E+00
        1.53880 1.99048 0.00000E+00
        1.54226 1.99045 0.00000E+00
        1.54573 1.99043 0.00000E+00
        1.54919 1.99040 0.00000E+00
        1.55266 1.99038 0.00000E+00
        1.55612 1.99035 0.00000E+00
        1.55959 1.99033 0.00000E+00
        1.56306 1.99031 0.00000E+00
        1.56652 1.99028 0.00000E+00
        1.56999 1.99026 0.00000E+00
        1.57346 1.99024 0.00000E+00
        1.57693 1.99021 0.00000E+00
        1.58040 1.99019 0.00000E+00
        1.58387 1.99017 0.00000E+00
        1.58734 1.99014 0.00000E+00
        1.59081 1.99012 0.00000E+00
        1.59428 1.99010 0.00000E+00
        1.59775 1.99008 0.00000E+00
        1.60122 1.99005 0.00000E+00
        1.60469 1.99003 0.00000E+00
        1.60817 1.99001 0.00000E+00
        1.61164 1.98999 0.00000E+00
        1.61511 1.98997 0.00000E+00
        1.61859 1.98994 0.00000E+00
        1.62206 1.98992 0.00000E+00
        1.62554 1.98990 0.00000E+00
        1.62901 1.98988 0.00000E+00
        1.63249 1.98986 0.00000E+00
        1.63596 1.98984 0.00000E+00
        1.63944 1.98982 0.00000E+00
        1.64292 1.98980 0.00000E+00
        1.64640 1.98978 0.00000E+00
        1.64987 1.98976 0.00000E+00
        1.65335 1.98974 0.00000E+00
        1.65683 1.98972 0.00000E+00
        1.66031 1.98970 0.00000E+00
        1.66379 1.98968 0.00000E+00
        1.66727 1.98966 0.00000E+00
        1.67075 1.98964 0.00000E+00
        1.67423 1.98962 0.00000E+00
        1.67771 1.98960 0.00000E+00
        1.68120 1.98958 0.00000E+00
        1.68468 1.98956 0.00000E+00
        1.68816 1.98954 0.00000E+00
CONDITIONS:
    film_thickness: 100e-9
    substrate: Si