# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | L. Yu. Beliaev, E. Shkondin, A. V. Lavrinenko, O. Takayama. Titanium nitride nanotrench metasurfaces for mid-infrared chemical sensing. ACS Appl. Opt. Mater. 2, 88-96 (2023) (Numerical data kindly provided by Osamu Takayama) COMMENTS: | 100 nm thick TiN film deposited by atomic layer deposition at 500 °C with post-annealing at 900 °C. DATA: - type: tabulated nk data: | 2.00000 1.14069 4.40411 2.00217 1.14278 4.40985 2.00434 1.14489 4.41559 2.00652 1.14700 4.42133 2.00870 1.14912 4.42709 2.01089 1.15123 4.43286 2.01308 1.15336 4.43863 2.01528 1.15550 4.44441 2.01748 1.15763 4.45020 2.01969 1.15979 4.45600 2.02190 1.16194 4.46179 2.02412 1.16409 4.46761 2.02633 1.16627 4.47342 2.02856 1.16843 4.47925 2.03079 1.17061 4.48508 2.03303 1.17280 4.49092 2.03527 1.17499 4.49677 2.03751 1.17718 4.50262 2.03976 1.17939 4.50849 2.04202 1.18160 4.51435 2.04428 1.18382 4.52024 2.04655 1.18604 4.52612 2.04882 1.18827 4.53202 2.05109 1.19050 4.53792 2.05337 1.19275 4.54383 2.05566 1.19500 4.54974 2.05795 1.19726 4.55567 2.06025 1.19951 4.56160 2.06254 1.20178 4.56755 2.06485 1.20406 4.57349 2.06716 1.20634 4.57945 2.06948 1.20863 4.58541 2.07180 1.21092 4.59139 2.07413 1.21323 4.59737 2.07646 1.21554 4.60336 2.07880 1.21785 4.60936 2.08114 1.22017 4.61536 2.08349 1.22249 4.62137 2.08585 1.22484 4.62739 2.08820 1.22717 4.63342 2.09057 1.22952 4.63945 2.09293 1.23188 4.64551 2.09531 1.23424 4.65155 2.09769 1.23661 4.65762 2.10008 1.23899 4.66369 2.10247 1.24137 4.66977 2.10486 1.24376 4.67586 2.10726 1.24616 4.68196 2.10967 1.24856 4.68806 2.11208 1.25097 4.69417 2.11450 1.25338 4.70029 2.11693 1.25581 4.70642 2.11936 1.25823 4.71256 2.12179 1.26067 4.71871 2.12423 1.26312 4.72486 2.12668 1.26557 4.73102 2.12913 1.26803 4.73719 2.13159 1.27050 4.74338 2.13405 1.27297 4.74956 2.13652 1.27545 4.75576 2.13900 1.27794 4.76198 2.14147 1.28043 4.76819 2.14396 1.28293 4.77441 2.14646 1.28544 4.78064 2.14895 1.28795 4.78689 2.15146 1.29048 4.79313 2.15397 1.29300 4.79940 2.15648 1.29554 4.80567 2.15900 1.29809 4.81195 2.16153 1.30064 4.81823 2.16406 1.30321 4.82453 2.16660 1.30577 4.83083 2.16915 1.30834 4.83714 2.17170 1.31092 4.84347 2.17425 1.31351 4.84980 2.17682 1.31611 4.85614 2.17939 1.31871 4.86249 2.18196 1.32132 4.86885 2.18454 1.32394 4.87522 2.18713 1.32656 4.88160 2.18972 1.32920 4.88798 2.19232 1.33184 4.89438 2.19493 1.33449 4.90079 2.19754 1.33715 4.90720 2.20016 1.33981 4.91363 2.20278 1.34248 4.92007 2.20541 1.34516 4.92651 2.20805 1.34785 4.93296 2.21069 1.35054 4.93943 2.21334 1.35324 4.94589 2.21600 1.35595 4.95238 2.21866 1.35868 4.95887 2.22133 1.36140 4.96537 2.22401 1.36413 4.97189 2.22669 1.36687 4.97841 2.22938 1.36963 4.98494 2.23207 1.37238 4.99148 2.23477 1.37514 4.99803 2.23748 1.37791 5.00459 2.24019 1.38070 5.01116 2.24292 1.38349 5.01774 2.24564 1.38628 5.02433 2.24838 1.38910 5.03093 2.25112 1.39191 5.03754 2.25387 1.39473 5.04416 2.25662 1.39756 5.05080 2.25938 1.40039 5.05744 2.26215 1.40324 5.06409 2.26492 1.40609 5.07075 2.26770 1.40896 5.07743 2.27049 1.41183 5.08411 2.27329 1.41471 5.09080 2.27609 1.41760 5.09750 2.27890 1.42049 5.10421 2.28171 1.42340 5.11094 2.28453 1.42631 5.11767 2.28737 1.42923 5.12442 2.29020 1.43217 5.13118 2.29305 1.43511 5.13794 2.29589 1.43806 5.14472 2.29876 1.44102 5.15151 2.30162 1.44398 5.15830 2.30449 1.44696 5.16511 2.30737 1.44994 5.17194 2.31026 1.45293 5.17877 2.31315 1.45593 5.18561 2.31605 1.45894 5.19247 2.31896 1.46196 5.19933 2.32188 1.46499 5.20620 2.32480 1.46803 5.21309 2.32773 1.47107 5.21998 2.33067 1.47413 5.22690 2.33361 1.47719 5.23381 2.33657 1.48027 5.24074 2.33953 1.48335 5.24769 2.34250 1.48644 5.25464 2.34547 1.48954 5.26160 2.34845 1.49265 5.26858 2.35144 1.49577 5.27556 2.35444 1.49890 5.28257 2.35745 1.50204 5.28958 2.36046 1.50518 5.29659 2.36348 1.50835 5.30362 2.36651 1.51151 5.31067 2.36954 1.51469 5.31772 2.37259 1.51788 5.32480 2.37564 1.52108 5.33187 2.37870 1.52428 5.33896 2.38177 1.52750 5.34607 2.38485 1.53073 5.35318 2.38793 1.53396 5.36031 2.39102 1.53721 5.36745 2.39412 1.54047 5.37459 2.39723 1.54373 5.38176 2.40035 1.54701 5.38893 2.40347 1.55030 5.39612 2.40661 1.55359 5.40332 2.40974 1.55690 5.41052 2.41289 1.56022 5.41775 2.41605 1.56355 5.42498 2.41922 1.56689 5.43223 2.42239 1.57024 5.43949 2.42557 1.57360 5.44675 2.42876 1.57697 5.45404 2.43196 1.58035 5.46134 2.43516 1.58375 5.46864 2.43838 1.58715 5.47596 2.44160 1.59057 5.48329 2.44484 1.59399 5.49064 2.44808 1.59743 5.49800 2.45133 1.60087 5.50537 2.45458 1.60433 5.51275 2.45785 1.60780 5.52014 2.46113 1.61128 5.52755 2.46441 1.61477 5.53497 2.46770 1.61828 5.54240 2.47101 1.62179 5.54985 2.47432 1.62531 5.55730 2.47764 1.62885 5.56477 2.48096 1.63240 5.57226 2.48431 1.63596 5.57975 2.48765 1.63953 5.58726 2.49101 1.64312 5.59478 2.49437 1.64671 5.60232 2.49775 1.65032 5.60986 2.50113 1.65394 5.61742 2.50452 1.65758 5.62499 2.50793 1.66122 5.63258 2.51133 1.66487 5.64018 2.51476 1.66854 5.64779 2.51818 1.67222 5.65542 2.52162 1.67591 5.66304 2.52507 1.67962 5.67070 2.52853 1.68333 5.67836 2.53199 1.68706 5.68603 2.53547 1.69081 5.69373 2.53895 1.69456 5.70143 2.54245 1.69833 5.70914 2.54595 1.70210 5.71687 2.54947 1.70590 5.72461 2.55299 1.70970 5.73237 2.55653 1.71352 5.74014 2.56007 1.71735 5.74791 2.56363 1.72119 5.75571 2.56719 1.72506 5.76352 2.57077 1.72892 5.77134 2.57435 1.73281 5.77917 2.57794 1.73671 5.78702 2.58154 1.74061 5.79488 2.58516 1.74454 5.80275 2.58878 1.74848 5.81064 2.59242 1.75243 5.81854 2.59606 1.75640 5.82645 2.59972 1.76037 5.83437 2.60338 1.76436 5.84232 2.60706 1.76837 5.85027 2.61075 1.77239 5.85823 2.61444 1.77642 5.86621 2.61815 1.78047 5.87420 2.62186 1.78453 5.88222 2.62560 1.78861 5.89023 2.62933 1.79270 5.89826 2.63308 1.79680 5.90631 2.63684 1.80091 5.91436 2.64061 1.80505 5.92244 2.64439 1.80919 5.93052 2.64819 1.81335 5.93862 2.65199 1.81753 5.94673 2.65580 1.82171 5.95486 2.65962 1.82592 5.96299 2.66346 1.83014 5.97115 2.66731 1.83438 5.97931 2.67117 1.83863 5.98749 2.67503 1.84288 5.99568 2.67892 1.84716 6.00388 2.68281 1.85146 6.01210 2.68671 1.85576 6.02033 2.69062 1.86008 6.02857 2.69455 1.86442 6.03683 2.69849 1.86877 6.04510 2.70244 1.87314 6.05338 2.70640 1.87752 6.06168 2.71037 1.88192 6.06999 2.71435 1.88633 6.07831 2.71835 1.89076 6.08665 2.72236 1.89520 6.09500 2.72638 1.89966 6.10336 2.73041 1.90413 6.11173 2.73445 1.90862 6.12012 2.73851 1.91313 6.12852 2.74257 1.91764 6.13693 2.74666 1.92218 6.14536 2.75074 1.92674 6.15380 2.75485 1.93130 6.16225 2.75896 1.93588 6.17071 2.76309 1.94048 6.17920 2.76723 1.94509 6.18768 2.77139 1.94972 6.19619 2.77555 1.95436 6.20470 2.77973 1.95902 6.21323 2.78392 1.96370 6.22177 2.78812 1.96839 6.23033 2.79234 1.97310 6.23890 2.79657 1.97781 6.24748 2.80081 1.98255 6.25607 2.80506 1.98731 6.26467 2.80933 1.99208 6.27329 2.81361 1.99686 6.28192 2.81790 2.00167 6.29056 2.82221 2.00648 6.29922 2.82653 2.01131 6.30789 2.83086 2.01616 6.31657 2.83521 2.02102 6.32526 2.83957 2.02590 6.33397 2.84394 2.03079 6.34269 2.84833 2.03571 6.35142 2.85273 2.04063 6.36016 2.85714 2.04557 6.36892 2.86157 2.05053 6.37769 2.86601 2.05550 6.38647 2.87047 2.06049 6.39527 2.87493 2.06550 6.40407 2.87942 2.07052 6.41289 2.88391 2.07555 6.42172 2.88843 2.08060 6.43056 2.89295 2.08566 6.43942 2.89749 2.09074 6.44829 2.90204 2.09584 6.45717 2.90661 2.10096 6.46606 2.91119 2.10608 6.47497 2.91579 2.11122 6.48388 2.92040 2.11638 6.49282 2.92503 2.12155 6.50176 2.92966 2.12673 6.51071 2.93432 2.13194 6.51968 2.93899 2.13715 6.52866 2.94368 2.14238 6.53765 2.94837 2.14763 6.54666 2.95309 2.15289 6.55568 2.95782 2.15816 6.56471 2.96257 2.16345 6.57375 2.96732 2.16876 6.58280 2.97210 2.17408 6.59187 2.97689 2.17940 6.60095 2.98170 2.18476 6.61005 2.98652 2.19011 6.61915 2.99136 2.19549 6.62827 2.99621 2.20088 6.63741 3.00108 2.20628 6.64655 3.00597 2.21170 6.65571 3.01087 2.21713 6.66488 3.01579 2.22257 6.67406 3.02072 2.22804 6.68326 3.02567 2.23350 6.69247 3.03063 2.23898 6.70170 3.03562 2.24449 6.71093 3.04061 2.25000 6.72019 3.04563 2.25552 6.72945 3.05066 2.26106 6.73872 3.05571 2.26661 6.74802 3.06077 2.27217 6.75733 3.06586 2.27775 6.76664 3.07095 2.28333 6.77597 3.07607 2.28893 6.78532 3.08120 2.29454 6.79468 3.08635 2.30017 6.80406 3.09152 2.30581 6.81345 3.09670 2.31145 6.82286 3.10190 2.31711 6.83228 3.10712 2.32279 6.84171 3.11236 2.32847 6.85116 3.11762 2.33417 6.86063 3.12288 2.33987 6.87011 3.12818 2.34559 6.87961 3.13348 2.35132 6.88911 3.13881 2.35706 6.89865 3.14415 2.36281 6.90819 3.14952 2.36857 6.91775 3.15489 2.37434 6.92732 3.16030 2.38013 6.93692 3.16572 2.38592 6.94653 3.17115 2.39172 6.95616 3.17661 2.39753 6.96580 3.18208 2.40336 6.97546 3.18758 2.40919 6.98514 3.19308 2.41504 6.99483 3.19862 2.42090 7.00455 3.20416 2.42676 7.01429 3.20974 2.43263 7.02404 3.21532 2.43852 7.03381 3.22093 2.44441 7.04360 3.22656 2.45031 7.05341 3.23221 2.45622 7.06324 3.23787 2.46214 7.07309 3.24356 2.46807 7.08296 3.24926 2.47401 7.09285 3.25500 2.47996 7.10276 3.26074 2.48592 7.11269 3.26651 2.49188 7.12265 3.27229 2.49786 7.13262 3.27811 2.50384 7.14262 3.28393 2.50984 7.15264 3.28979 2.51583 7.16268 3.29565 2.52184 7.17275 3.30155 2.52786 7.18283 3.30746 2.53389 7.19295 3.31340 2.53993 7.20308 3.31935 2.54597 7.21325 3.32533 2.55202 7.22343 3.33132 2.55808 7.23364 3.33735 2.56415 7.24388 3.34340 2.57022 7.25414 3.34946 2.57631 7.26442 3.35555 2.58241 7.27475 3.36165 2.58851 7.28509 3.36779 2.59462 7.29545 3.37393 2.60074 7.30586 3.38011 2.60686 7.31628 3.38631 2.61300 7.32674 3.39253 2.61915 7.33722 3.39877 2.62530 7.34773 3.40504 2.63146 7.35827 3.41133 2.63763 7.36885 3.41765 2.64382 7.37945 3.42398 2.65000 7.39008 3.43034 2.65620 7.40075 3.43672 2.66241 7.41145 3.44313 2.66862 7.42218 3.44956 2.67485 7.43295 3.45602 2.68108 7.44374 3.46250 2.68733 7.45457 3.46901 2.69359 7.46544 3.47553 2.69985 7.47634 3.48209 2.70612 7.48728 3.48866 2.71241 7.49824 3.49527 2.71870 7.50925 3.50189 2.72501 7.52030 3.50855 2.73132 7.53138 3.51522 2.73765 7.54249 3.52193 2.74399 7.55365 3.52866 2.75034 7.56484 3.53542 2.75670 7.57607 3.54221 2.76307 7.58734 3.54901 2.76945 7.59865 3.55585 2.77585 7.61000 3.56270 2.78226 7.62140 3.56959 2.78868 7.63283 3.57650 2.79511 7.64430 3.58345 2.80156 7.65582 3.59041 2.80802 7.66738 3.59741 2.81450 7.67898 3.60442 2.82099 7.69062 3.61148 2.82749 7.70231 3.61855 2.83401 7.71404 3.62566 2.84054 7.72582 3.63278 2.84709 7.73764 3.63995 2.85365 7.74951 3.64713 2.86023 7.76142 3.65436 2.86683 7.77338 3.66160 2.87344 7.78539 3.66888 2.88007 7.79744 3.67617 2.88672 7.80954 3.68351 2.89338 7.82169 3.69087 2.90007 7.83389 3.69827 2.90677 7.84613 3.70568 2.91349 7.85843 3.71314 2.92023 7.87078 3.72061 2.92699 7.88318 3.72813 2.93377 7.89562 3.73566 2.94057 7.90812 3.74324 2.94739 7.92066 3.75085 2.95423 7.93326 3.75848 2.96109 7.94592 3.76615 2.96798 7.95862 3.77384 2.97489 7.97138 3.78158 2.98182 7.98419 3.78933 2.98878 7.99705 3.79713 2.99576 8.00997 3.80494 3.00276 8.02294 3.81281 3.00980 8.03597 3.82069 3.01685 8.04906 3.82862 3.02393 8.06219 3.83656 3.03104 8.07538 3.84456 3.03818 8.08863 3.85257 3.04534 8.10194 3.86063 3.05253 8.11530 3.86871 3.05975 8.12872 3.87684 3.06700 8.14220 3.88499 3.07428 8.15573 3.89319 3.08158 8.16932 3.90140 3.08892 8.18297 3.90967 3.09629 8.19668 3.91796 3.10369 8.21044 3.92630 3.11112 8.22427 3.93465 3.11858 8.23816 3.94306 3.12609 8.25210 3.95149 3.13361 8.26611 3.95997 3.14118 8.28018 3.96847 3.14878 8.29430 3.97703 3.15642 8.30849 3.98560 3.16409 8.32274 3.99423 3.17180 8.33705 4.00290 3.17955 8.35141 4.01159 3.18733 8.36585 4.02033 3.19515 8.38034 4.02909 3.20301 8.39490 4.03791 3.21091 8.40952 4.04675 3.21885 8.42420 4.05564 3.22682 8.43895 4.06456 3.23484 8.45375 4.07354 3.24290 8.46862 4.08253 3.25101 8.48356 4.09159 3.25915 8.49856 4.10066 3.26734 8.51362 4.10980 3.27557 8.52874 4.11896 3.28385 8.54393 4.12817 3.29217 8.55919 4.13741 3.30053 8.57450 4.14671 3.30894 8.58989 4.15603 3.31740 8.60534 4.16542 3.32590 8.62085 4.17482 3.33445 8.63643 4.18429 3.34305 8.65208 4.19379 3.35170 8.66779 4.20334 3.36040 8.68356 4.21292 3.36914 8.69941 4.22256 3.37794 8.71532 4.23223 3.38679 8.73129 4.24196 3.39569 8.74734 4.25172 3.40464 8.76344 4.26154 3.41365 8.77962 4.27139 3.42270 8.79586 4.28130 3.43181 8.81217 4.29126 3.44097 8.82855 4.30124 3.45019 8.84499 4.31129 3.45946 8.86150 4.32137 3.46880 8.87808 4.33152 3.47818 8.89473 4.34169 3.48763 8.91144 4.35193 3.49713 8.92823 4.36220 3.50669 8.94508 4.37254 3.51630 8.96200 4.38291 3.52598 8.97899 4.39334 3.53572 8.99604 4.40381 3.54551 9.01317 4.41435 3.55537 9.03036 4.42492 3.56529 9.04763 4.43555 3.57527 9.06496 4.44622 3.58532 9.08237 4.45696 3.59542 9.09984 4.46774 3.60559 9.11738 4.47858 3.61582 9.13499 4.48946 3.62612 9.15267 4.50041 3.63649 9.17042 4.51139 3.64692 9.18824 4.52245 3.65742 9.20613 4.53354 3.66797 9.22410 4.54471 3.67861 9.24213 4.55591 3.68930 9.26023 4.56719 3.70007 9.27840 4.57850 3.71091 9.29665 4.58989 3.72181 9.31496 4.60132 3.73279 9.33335 4.61282 3.74384 9.35181 4.62438 3.75496 9.37034 4.63598 3.76615 9.38894 4.64766 3.77741 9.40761 4.65938 3.78875 9.42636 4.67117 3.80016 9.44517 4.68301 3.81164 9.46406 4.69492 3.82320 9.48302 4.70688 3.83483 9.50205 4.71892 3.84654 9.52116 4.73100 3.85833 9.54034 4.74316 3.87019 9.55959 4.75536 3.88213 9.57892 4.76765 3.89415 9.59831 4.77998 3.90625 9.61779 4.79239 3.91843 9.63733 4.80485 3.93068 9.65695 4.81740 3.94302 9.67664 4.82998 3.95544 9.69641 4.84266 3.96794 9.71625 4.85538 3.98052 9.73617 4.86819 3.99319 9.75616 4.88105 4.00593 9.77622 4.89400 4.01877 9.79636 4.90699 4.03169 9.81658 4.92007 4.04469 9.83686 4.93320 4.05777 9.85723 4.94643 4.07095 9.87767 4.95970 4.08421 9.89819 4.97307 4.09756 9.91878 4.98649 4.11099 9.93945 5.00000 4.12452 9.96019 5.01359 4.13813 9.98102 5.02722 4.15184 10.00192 5.04096 4.16563 10.02289 5.05474 4.17952 10.04395 5.06863 4.19349 10.06508 5.08257 4.20757 10.08629 5.09661 4.22173 10.10757 5.11070 4.23599 10.12894 5.12489 4.25034 10.15038 5.13914 4.26479 10.17190 5.15350 4.27933 10.19350 5.16791 4.29397 10.21518 5.18242 4.30870 10.23694 5.19699 4.32354 10.25878 5.21167 4.33847 10.28070 5.22641 4.35350 10.30270 5.24125 4.36863 10.32478 5.25616 4.38386 10.34693 5.27118 4.39919 10.36917 5.28625 4.41462 10.39150 5.30144 4.43015 10.41390 5.31669 4.44579 10.43638 5.33205 4.46153 10.45895 5.34748 4.47738 10.48159 5.36302 4.49333 10.50433 5.37863 4.50938 10.52714 5.39435 4.52555 10.55004 5.41014 4.54182 10.57302 5.42605 4.55819 10.59608 5.44203 4.57468 10.61923 5.45813 4.59127 10.64246 5.47432 4.60798 10.66578 5.49058 4.62480 10.68918 5.50697 4.64173 10.71267 5.52343 4.65876 10.73623 5.54001 4.67593 10.75990 5.55667 4.69317 10.78364 5.57345 4.71058 10.80748 5.59031 4.72806 10.83139 5.60730 4.74566 10.85539 5.62436 4.76341 10.87949 5.64156 4.78127 10.90368 5.65883 4.79921 10.92794 5.67624 4.81730 10.95230 5.69372 4.83554 10.97676 5.71135 4.85384 11.00129 5.72905 4.87229 11.02591 5.74690 4.89085 11.05063 5.76482 4.90956 11.07544 5.78289 4.92837 11.10033 5.80104 4.94732 11.12532 5.81933 4.96641 11.15041 5.83771 4.98559 11.17560 5.85624 5.00493 11.20086 5.87485 5.02441 11.22620 5.89362 5.04397 11.25165 5.91247 5.06366 11.27722 5.93148 5.08354 11.30285 5.95057 5.10351 11.32858 5.96983 5.12363 11.35445 5.98917 5.14387 11.38035 6.00868 5.16426 11.40638 6.02831 5.18478 11.43250 6.04803 5.20542 11.45873 6.06792 5.22623 11.48505 6.08791 5.24716 11.51146 6.10806 5.26821 11.53798 6.12831 5.28943 11.56456 6.14874 5.31079 11.59131 6.16926 5.33228 11.61810 6.18996 5.35392 11.64502 6.21076 5.37571 11.67203 6.23173 5.39766 11.69914 6.25281 5.41975 11.72637 6.27408 5.44199 11.75369 6.29545 5.46437 11.78114 6.31700 5.48691 11.80865 6.33866 5.50959 11.83628 6.36051 5.53239 11.86404 6.38248 5.55540 11.89186 6.40463 5.57856 11.91983 6.42690 5.60184 11.94787 6.44937 5.62530 11.97606 6.47195 5.64893 12.00431 6.49473 5.67271 12.03269 6.51763 5.69665 12.06121 6.54074 5.72074 12.08978 6.56396 5.74501 12.11851 6.58740 5.76944 12.14736 6.61096 5.79401 12.17627 6.63473 5.81877 12.20533 6.65863 5.84372 12.23450 6.68275 5.86883 12.26377 6.70704 5.89408 12.29318 6.73147 5.91954 12.32266 6.75612 5.94517 12.35229 6.78090 5.97094 12.38205 6.80592 5.99691 12.41189 6.83107 6.02305 12.44187 6.85645 6.04940 12.47198 6.88198 6.07590 12.50218 6.90775 6.10259 12.53254 6.93366 6.12943 12.56300 6.95981 6.15650 12.59359 6.98612 6.18375 12.62429 7.01267 6.21117 12.65510 7.03938 6.23881 12.68608 7.06634 6.26661 12.71717 7.09346 6.29461 12.74838 7.12083 6.32280 12.77970 7.14837 6.35122 12.81117 7.17618 6.37978 12.84276 7.20414 6.40856 12.87450 7.23238 6.43756 12.90636 7.26079 6.46675 12.93835 7.28948 6.49614 12.97046 7.31834 6.52575 13.00271 7.34748 6.55556 13.03512 7.37681 6.58559 13.06763 7.40642 6.61580 13.10030 7.43622 6.64625 13.13311 7.46631 6.67690 13.16606 7.49659 6.70775 13.19913 7.52717 6.73885 13.23239 7.55801 6.77015 13.26574 7.58904 6.80167 13.29924 7.62038 6.83343 13.33292 7.65193 6.86538 13.36669 7.68380 6.89760 13.40067 7.71587 6.93003 13.43478 7.74827 6.96269 13.46900 7.78089 6.99557 13.50341 7.81384 7.02871 13.53797 7.84701 7.06210 13.57267 7.88053 7.09570 13.60753 7.91427 7.12953 13.64255 7.94837 7.16361 13.67773 7.98269 7.19796 13.71305 8.01738 7.23254 13.74855 8.05231 7.26737 13.78422 8.08760 7.30248 13.82003 8.12315 7.33782 13.85603 8.15907 7.37340 13.89216 8.19524 7.40928 13.92848 8.23181 7.44538 13.96498 8.26863 7.48177 14.00164 8.30585 7.51841 14.03847 8.34335 7.55534 14.07548 8.38125 7.59252 14.11263 8.41942 7.62999 14.15001 8.45802 7.66772 14.18753 8.49690 7.70577 14.22525 8.53621 7.74405 14.26314 8.57589 7.78264 14.30124 8.61586 7.82151 14.33949 8.65628 7.86068 14.37795 8.69701 7.90013 14.41659 8.73820 7.93988 14.45544 8.77971 7.97994 14.49446 8.82169 8.02030 14.53369 8.86399 8.06096 14.57313 8.90678 8.10193 14.61275 8.94991 8.14321 14.65257 8.99353 8.18479 14.69261 9.03751 8.22672 14.73285 9.08199 8.26894 14.77330 9.12684 8.31149 14.81394 9.17221 8.35436 14.85481 9.21795 8.39757 14.89591 9.26423 8.44113 14.93722 9.31090 8.48500 14.97873 9.35813 8.52922 15.02047 9.40575 8.57379 15.06247 9.45394 8.61869 15.10466 9.50254 8.66397 15.14709 9.55174 8.70958 15.18976 9.60135 8.75556 15.23266 9.65158 8.80189 15.27581 9.70224 8.84862 15.31917 9.75353 8.89569 15.36282 9.80527 8.94316 15.40669 9.85766 8.99098 15.45082 9.91051 9.03922 15.49521 9.96403 9.08781 15.53983 10.01808 9.13682 15.58475 10.07273 9.18620 15.62991 10.12797 9.23600 15.67535 10.18383 9.28618 15.72104 10.24030 9.33680 15.76702 10.29740 9.38784 15.81327 10.35514 9.43927 15.85981 10.41353 9.49116 15.90664 10.47259 9.54345 15.95376 10.53232 9.59619 16.00115 10.59274 9.64937 16.04887 10.65385 9.70298 16.09686 10.71567 9.75706 16.14519 10.77821 9.81159 16.19381 10.84148 9.86659 16.24274 10.90551 9.92205 16.29199 10.97030 9.97798 16.34158 11.03586 10.03438 16.39149 11.10220 10.09127 16.44174 11.16935 10.14867 16.49231 11.23732 10.20656 16.54324 11.30612 10.26495 16.59452 11.37577 10.32386 16.64614 11.44628 10.38329 16.69813 11.51767 10.44324 16.75050 11.58996 10.50373 16.80322 11.66315 10.56473 16.85632 11.73728 10.62630 16.90980 11.81237 10.68842 16.96368 11.88842 10.75112 17.01795 11.96544 10.81436 17.07262 12.04348 10.87820 17.12770 12.12253 10.94260 17.18321 12.20264 11.00761 17.23912 12.28382 11.07322 17.29547 12.36608 11.13944 17.35227 12.44944 11.20628 17.40947 12.53394 11.27376 17.46716 12.61959 11.34185 17.52531 12.70642 11.41062 17.58392 12.79446 11.48001 17.64301 12.88373 11.55010 17.70257 12.97424 11.62085 17.76264 13.06604 11.69232 17.82320 13.15914 11.76446 17.88428 13.25358 11.83731 17.94589 13.34941 11.91089 18.00801 13.44661 11.98518 18.07068 13.54523 12.06025 18.13391 13.64532 12.13607 18.19770 13.74689 12.21264 18.26206 13.84999 12.28999 18.32699 13.95467 12.36815 18.39253 14.06092 12.44711 18.45867 14.16880 12.52690 18.52545 14.27835 12.60752 18.59283 14.38961 12.68898 18.66087 14.50261 12.77132 18.72959 14.61740 12.85454 18.79897 14.73405 12.93865 18.86901 14.85255 13.02368 18.93978 14.97297 13.10963 19.01125 15.09536 13.19651 19.08345 15.21977 13.28438 19.15640 15.34625 13.37322 19.23011 15.47487 13.46309 19.30460 15.60564 13.55394 19.37990 15.73864 13.64584 19.45600 15.87392 13.73880 19.53293 16.01155 13.83284 19.61072 16.15159 13.92799 19.68938 16.29413 14.02425 19.76893 16.43918 14.12168 19.84941 16.58683 14.22025 19.93080 16.73716 14.32003 20.01315 16.89024 14.42104 20.09650 17.04614 14.52328 20.18085 17.20498 14.62679 20.26620 17.36678 14.73161 20.35263 17.53165 14.83775 20.44013 17.69968 14.94526 20.52875 17.87096 15.05415 20.61850 18.04559 15.16447 20.70940 18.22370 15.27622 20.80151 18.40533 15.38946 20.89485 18.59061 15.50425 20.98944 18.77966 15.62056 21.08532 18.97260 15.73848 21.18254 19.16954 15.85805 21.28111 19.37065 15.97928 21.38110 19.57598 16.10221 21.48251 19.78572 16.22691 21.58541 20.00000 16.35342 21.68984 CONDITIONS: film_thickness: 100e-9 substrate: Si