# this file is part of refractiveindex.info database # refractiveindex.info database is in the public domain # copyright and related rights waived via CC0 1.0 REFERENCES: | E. Shkondin, T. Repän, O. Takayama, A. V. Lavrinenko. High aspect ratio titanium nitride trench structures as plasmonic biosensor. Opt. Mater. Express 7, 4171-4182 (2017) (Numerical data kindly provided by Osamu Takayama) COMMENTS: | 105 nm thick titanium nitride (TiN) film on Si substrate annealed at 700 °C. DATA: - type: tabulated nk data: | 0.21073 1.730231 1.561166 0.21231 1.747062 1.563256 0.21389 1.763656 1.564840 0.21547 1.780001 1.565940 0.21705 1.796087 1.566580 0.21863 1.811906 1.566781 0.22021 1.827448 1.566567 0.22179 1.842707 1.565958 0.22337 1.857679 1.564976 0.22495 1.872358 1.563639 0.22652 1.886741 1.561969 0.22810 1.900824 1.559984 0.22968 1.914607 1.557702 0.23126 1.928086 1.555142 0.23284 1.941263 1.552320 0.23442 1.954137 1.549254 0.23601 1.966708 1.545958 0.23759 1.978979 1.542449 0.23917 1.990950 1.538741 0.24075 2.002626 1.534848 0.24233 2.014008 1.530783 0.24391 2.025100 1.526560 0.24549 2.035905 1.522190 0.24707 2.046427 1.517685 0.24865 2.056671 1.513055 0.25023 2.066642 1.508312 0.25181 2.076343 1.503465 0.25339 2.085779 1.498523 0.25497 2.094957 1.493495 0.25656 2.103881 1.488388 0.25814 2.112556 1.483210 0.25972 2.120989 1.477968 0.26130 2.129183 1.472669 0.26288 2.137146 1.467318 0.26446 2.144881 1.461921 0.26604 2.152396 1.456482 0.26763 2.159694 1.451007 0.26921 2.166782 1.445499 0.27079 2.173664 1.439962 0.27237 2.180346 1.434399 0.27395 2.186833 1.428813 0.27554 2.193129 1.423207 0.27712 2.199239 1.417582 0.27870 2.205169 1.411940 0.28028 2.210921 1.406283 0.28187 2.216500 1.400612 0.28345 2.221911 1.394928 0.28503 2.227157 1.389231 0.28661 2.232241 1.383522 0.28820 2.237166 1.377801 0.28978 2.241936 1.372067 0.29136 2.246554 1.366322 0.29294 2.251021 1.360563 0.29453 2.255340 1.354791 0.29611 2.259514 1.349004 0.29769 2.263542 1.343203 0.29927 2.267428 1.337385 0.30086 2.271171 1.331551 0.30244 2.274773 1.325698 0.30402 2.278234 1.319826 0.30561 2.281554 1.313934 0.30719 2.284733 1.308020 0.30877 2.287771 1.302084 0.31036 2.290665 1.296124 0.31194 2.293416 1.290140 0.31352 2.296022 1.284131 0.31511 2.298481 1.278096 0.31669 2.300790 1.272034 0.31828 2.302947 1.265946 0.31986 2.304950 1.259831 0.32144 2.306795 1.253689 0.32303 2.308479 1.247522 0.32461 2.309998 1.241330 0.32619 2.311348 1.235114 0.32778 2.312525 1.228876 0.32936 2.313524 1.222618 0.33095 2.314341 1.216343 0.33253 2.314970 1.210055 0.33412 2.315406 1.203757 0.33570 2.315646 1.197454 0.33728 2.315682 1.191151 0.33887 2.315510 1.184856 0.34045 2.315125 1.178574 0.34204 2.314522 1.172315 0.34362 2.313697 1.166087 0.34521 2.312644 1.159900 0.34679 2.311361 1.153767 0.34837 2.309845 1.147699 0.34996 2.308094 1.141710 0.35154 2.306106 1.135816 0.35313 2.303882 1.130032 0.35471 2.301424 1.124376 0.35630 2.298737 1.118867 0.35788 2.295826 1.113524 0.35947 2.292701 1.108369 0.36105 2.289373 1.103422 0.36264 2.285858 1.098704 0.36422 2.282175 1.094238 0.36581 2.278349 1.090044 0.36739 2.274407 1.086142 0.36898 2.270383 1.082549 0.37056 2.266316 1.079280 0.37215 2.262251 1.076344 0.37373 2.258237 1.073744 0.37532 2.254330 1.071476 0.37690 2.250589 1.069527 0.37849 2.247076 1.067871 0.38007 2.243854 1.066469 0.38166 2.240985 1.065265 0.38325 2.238524 1.064188 0.38483 2.236517 1.063146 0.38642 2.234991 1.062030 0.38800 2.233952 1.060714 0.38959 2.233372 1.059060 0.39117 2.233184 1.056925 0.39276 2.233271 1.054178 0.39434 2.233468 1.050710 0.39593 2.233558 1.046468 0.39752 2.233289 1.041477 0.39910 2.232407 1.035873 0.40069 2.230712 1.029921 0.40227 2.228145 1.024002 0.40386 2.224873 1.018538 0.40544 2.221352 1.013835 0.40703 2.218246 1.009851 0.40862 2.216140 1.006025 0.41020 2.215095 1.001386 0.41179 2.214362 0.995085 0.41337 2.212699 0.987085 0.41496 2.209233 0.978325 0.41654 2.204124 0.970017 0.41813 2.198312 0.962710 0.41972 2.192632 0.956050 0.42130 2.187263 0.949319 0.42289 2.181840 0.942039 0.42447 2.175874 0.934153 0.42606 2.169029 0.925887 0.42765 2.161177 0.917542 0.42923 2.152335 0.909377 0.43082 2.142591 0.901585 0.43240 2.132057 0.894295 0.43399 2.120848 0.887593 0.43558 2.109081 0.881534 0.43716 2.096861 0.876148 0.43875 2.084293 0.871444 0.44034 2.071471 0.867414 0.44192 2.058476 0.864033 0.44351 2.045379 0.861265 0.44509 2.032232 0.859069 0.44668 2.019075 0.857396 0.44827 2.005933 0.856203 0.44985 1.992819 0.855446 0.45144 1.979737 0.855091 0.45302 1.966688 0.855109 0.45461 1.953663 0.855480 0.45620 1.940658 0.856188 0.45778 1.927667 0.857227 0.45937 1.914687 0.858592 0.46096 1.901717 0.860283 0.46254 1.888761 0.862302 0.46413 1.875824 0.864648 0.46571 1.862915 0.867324 0.46730 1.850043 0.870328 0.46889 1.837219 0.873660 0.47047 1.824455 0.877314 0.47206 1.811763 0.881286 0.47365 1.799152 0.885568 0.47523 1.786633 0.890154 0.47682 1.774213 0.895034 0.47841 1.761901 0.900201 0.47999 1.749702 0.905644 0.48158 1.737621 0.911357 0.48316 1.725663 0.917329 0.48475 1.713832 0.923556 0.48634 1.702130 0.930028 0.48792 1.690562 0.936740 0.48951 1.679129 0.943687 0.49110 1.667836 0.950862 0.49268 1.656685 0.958261 0.49427 1.645682 0.965878 0.49585 1.634828 0.973709 0.49744 1.624129 0.981749 0.49903 1.613589 0.989992 0.50061 1.603212 0.998433 0.50220 1.593003 1.007066 0.50379 1.582967 1.015884 0.50537 1.573106 1.024882 0.50696 1.563428 1.034052 0.50854 1.553934 1.043387 0.51013 1.544629 1.052878 0.51172 1.535515 1.062518 0.51330 1.526596 1.072298 0.51489 1.517873 1.082210 0.51647 1.509348 1.092245 0.51806 1.501022 1.102394 0.51965 1.492896 1.112649 0.52123 1.484969 1.123001 0.52282 1.477241 1.133441 0.52440 1.469711 1.143961 0.52599 1.462377 1.154552 0.52758 1.455237 1.165207 0.52916 1.448288 1.175918 0.53075 1.441529 1.186678 0.53233 1.434954 1.197480 0.53392 1.428561 1.208317 0.53551 1.422347 1.219183 0.53709 1.416306 1.230072 0.53868 1.410435 1.240979 0.54026 1.404729 1.251900 0.54185 1.399184 1.262829 0.54344 1.393796 1.273761 0.54502 1.388559 1.284695 0.54661 1.383469 1.295625 0.54819 1.378522 1.306549 0.54978 1.373713 1.317465 0.55136 1.369037 1.328369 0.55295 1.364490 1.339260 0.55454 1.360068 1.350135 0.55612 1.355766 1.360994 0.55771 1.351580 1.371834 0.55929 1.347507 1.382656 0.56088 1.343542 1.393457 0.56246 1.339682 1.404237 0.56405 1.335922 1.414996 0.56563 1.332261 1.425733 0.56722 1.328694 1.436448 0.56881 1.325217 1.447141 0.57039 1.321830 1.457812 0.57198 1.318527 1.468461 0.57356 1.315307 1.479088 0.57515 1.312166 1.489693 0.57673 1.309104 1.500278 0.57832 1.306116 1.510842 0.57990 1.303202 1.521385 0.58149 1.300358 1.531909 0.58307 1.297583 1.542413 0.58466 1.294875 1.552899 0.58624 1.292233 1.563366 0.58783 1.289654 1.573817 0.58941 1.287138 1.584250 0.59100 1.284682 1.594667 0.59258 1.282286 1.605068 0.59417 1.279948 1.615455 0.59575 1.277667 1.625827 0.59734 1.275442 1.636185 0.59892 1.273272 1.646529 0.60051 1.271156 1.656861 0.60209 1.269093 1.667181 0.60368 1.267083 1.677489 0.60526 1.265124 1.687786 0.60685 1.263216 1.698072 0.60843 1.261358 1.708349 0.61001 1.259549 1.718615 0.61160 1.257790 1.728872 0.61318 1.256079 1.739120 0.61477 1.254416 1.749360 0.61635 1.252801 1.759591 0.61794 1.251233 1.769814 0.61952 1.249711 1.780030 0.62110 1.248236 1.790239 0.62269 1.246807 1.800440 0.62427 1.245423 1.810635 0.62586 1.244085 1.820823 0.62744 1.242792 1.831005 0.62902 1.241544 1.841181 0.63061 1.240341 1.851351 0.63219 1.239181 1.861514 0.63378 1.238067 1.871672 0.63536 1.236995 1.881825 0.63694 1.235968 1.891972 0.63853 1.234984 1.902113 0.64011 1.234043 1.912248 0.64169 1.233146 1.922379 0.64328 1.232292 1.932503 0.64486 1.231480 1.942623 0.64644 1.230711 1.952737 0.64803 1.229984 1.962845 0.64961 1.229300 1.972948 0.65119 1.228659 1.983045 0.65278 1.228058 1.993137 0.65436 1.227500 2.003223 0.65594 1.226984 2.013303 0.65752 1.226509 2.023378 0.65911 1.226076 2.033446 0.66069 1.225684 2.043509 0.66227 1.225332 2.053565 0.66386 1.225022 2.063615 0.66544 1.224753 2.073659 0.66702 1.224524 2.083696 0.66860 1.224336 2.093727 0.67019 1.224187 2.103750 0.67177 1.224079 2.113767 0.67335 1.224011 2.123776 0.67493 1.223983 2.133779 0.67652 1.223994 2.143774 0.67810 1.224045 2.153761 0.67968 1.224135 2.163741 0.68126 1.224264 2.173713 0.68284 1.224432 2.183676 0.68442 1.224638 2.193632 0.68601 1.224883 2.203579 0.68759 1.225167 2.213518 0.68917 1.225488 2.223448 0.69075 1.225847 2.233369 0.69233 1.226244 2.243281 0.69391 1.226679 2.253183 0.69550 1.227151 2.263077 0.69708 1.227660 2.272961 0.69866 1.228206 2.282835 0.70024 1.228788 2.292699 0.70182 1.229407 2.302553 0.70340 1.230062 2.312397 0.70498 1.230754 2.322230 0.70656 1.231481 2.332053 0.70814 1.232243 2.341865 0.70972 1.233042 2.351667 0.71131 1.233875 2.361457 0.71289 1.234743 2.371236 0.71447 1.235646 2.381004 0.71605 1.236583 2.390761 0.71763 1.237555 2.400505 0.71921 1.238561 2.410238 0.72079 1.239600 2.419959 0.72237 1.240673 2.429668 0.72395 1.241780 2.439364 0.72553 1.242919 2.449049 0.72711 1.244092 2.458721 0.72869 1.245297 2.468380 0.73027 1.246535 2.478026 0.73185 1.247805 2.487660 0.73343 1.249106 2.497281 0.73501 1.250440 2.506888 0.73658 1.251805 2.516482 0.73816 1.253201 2.526063 0.73974 1.254628 2.535630 0.74132 1.256086 2.545184 0.74290 1.257575 2.554724 0.74448 1.259094 2.564250 0.74606 1.260643 2.573762 0.74764 1.262222 2.583261 0.74922 1.263831 2.592745 0.75079 1.265469 2.602215 0.75237 1.267137 2.611670 0.75395 1.268833 2.621111 0.75553 1.270558 2.630538 0.75711 1.272311 2.639950 0.75869 1.274093 2.649348 0.76026 1.275903 2.658731 0.76184 1.277740 2.668098 0.76342 1.279606 2.677451 0.76500 1.281498 2.686789 0.76658 1.283418 2.696112 0.76815 1.285365 2.705420 0.76973 1.287338 2.714712 0.77131 1.289338 2.723990 0.77289 1.291365 2.733252 0.77446 1.293417 2.742498 0.77604 1.295495 2.751729 0.77762 1.297599 2.760945 0.77919 1.299728 2.770145 0.78077 1.301882 2.779329 0.78235 1.304061 2.788498 0.78392 1.306266 2.797651 0.78550 1.308494 2.806788 0.78708 1.310747 2.815909 0.78865 1.313024 2.825015 0.79023 1.315325 2.834105 0.79180 1.317650 2.843178 0.79338 1.319999 2.852236 0.79496 1.322370 2.861278 0.79653 1.324765 2.870303 0.79811 1.327183 2.879312 0.79968 1.329623 2.888306 0.80126 1.332086 2.897283 0.80283 1.334572 2.906244 0.80441 1.337079 2.915189 0.80598 1.339608 2.924117 0.80756 1.342160 2.933030 0.80913 1.344732 2.941925 0.81071 1.347326 2.950805 0.81228 1.349942 2.959669 0.81386 1.352578 2.968516 0.81543 1.355235 2.977346 0.81701 1.357913 2.986161 0.81858 1.360611 2.994958 0.82016 1.363330 3.003740 0.82173 1.366068 3.012505 0.82330 1.368827 3.021253 0.82488 1.371605 3.029986 0.82645 1.374403 3.038701 0.82803 1.377220 3.047400 0.82960 1.380056 3.056083 0.83117 1.382912 3.064749 0.83275 1.385786 3.073399 0.83432 1.388679 3.082032 0.83589 1.391591 3.090649 0.83746 1.394521 3.099250 0.83904 1.397469 3.107834 0.84061 1.400435 3.116401 0.84218 1.403419 3.124952 0.84375 1.406421 3.133487 0.84533 1.409441 3.142005 0.84690 1.412478 3.150506 0.84847 1.415532 3.158991 0.85004 1.418603 3.167460 0.85162 1.421691 3.175912 0.85319 1.424796 3.184348 0.85476 1.427917 3.192767 0.85633 1.431056 3.201170 0.85790 1.434210 3.209557 0.85947 1.437381 3.217927 0.86104 1.440567 3.226281 0.86261 1.443770 3.234618 0.86419 1.446988 3.242939 0.86576 1.450222 3.251243 0.86733 1.453472 3.259532 0.86890 1.456737 3.267804 0.87047 1.460017 3.276060 0.87204 1.463312 3.284299 0.87361 1.466622 3.292522 0.87518 1.469947 3.300729 0.87675 1.473286 3.308919 0.87832 1.476640 3.317094 0.87989 1.480008 3.325252 0.88146 1.483391 3.333394 0.88303 1.486788 3.341520 0.88460 1.490199 3.349630 0.88616 1.493624 3.357724 0.88773 1.497062 3.365801 0.88930 1.500514 3.373862 0.89087 1.503980 3.381908 0.89244 1.507459 3.389937 0.89401 1.510951 3.397950 0.89558 1.514456 3.405947 0.89714 1.517975 3.413929 0.89871 1.521506 3.421894 0.90028 1.525050 3.429844 0.90185 1.528607 3.437777 0.90342 1.532176 3.445695 0.90498 1.535758 3.453597 0.90655 1.539352 3.461483 0.90812 1.542959 3.469353 0.90968 1.546577 3.477208 0.91125 1.550207 3.485047 0.91282 1.553850 3.492869 0.91438 1.557504 3.500677 0.91595 1.561170 3.508469 0.91752 1.564847 3.516245 0.91908 1.568536 3.524005 0.92065 1.572236 3.531750 0.92222 1.575947 3.539480 0.92378 1.579670 3.547193 0.92535 1.583403 3.554892 0.92691 1.587148 3.562574 0.92848 1.590903 3.570242 0.93004 1.594669 3.577894 0.93161 1.598446 3.585531 0.93317 1.602233 3.593152 0.93474 1.606031 3.600758 0.93630 1.609839 3.608349 0.93787 1.613658 3.615924 0.93943 1.617486 3.623484 0.94099 1.621325 3.631029 0.94256 1.625174 3.638559 0.94412 1.629032 3.646074 0.94569 1.632900 3.653574 0.94725 1.636778 3.661058 0.94881 1.640666 3.668528 0.95038 1.644563 3.675982 0.95194 1.648470 3.683422 0.95350 1.652386 3.690846 0.95506 1.656311 3.698256 0.95663 1.660245 3.705650 0.95819 1.664189 3.713031 0.95975 1.668141 3.720396 0.96131 1.672103 3.727746 0.96288 1.676073 3.735081 0.96444 1.680052 3.742402 0.96600 1.684040 3.749708 0.96756 1.688036 3.757000 0.96912 1.692041 3.764276 0.97068 1.696054 3.771538 0.97225 1.700076 3.778786 0.97381 1.704106 3.786019 0.97537 1.708144 3.793238 0.97693 1.712190 3.800442 0.97849 1.716245 3.807631 0.98005 1.720307 3.814807 0.98161 1.724377 3.821968 0.98317 1.728455 3.829114 0.98473 1.732541 3.836246 0.98629 1.736634 3.843364 0.98785 1.740736 3.850468 0.98941 1.744845 3.857557 0.99097 1.748961 3.864633 0.99252 1.753084 3.871694 0.99408 1.757215 3.878741 0.99564 1.761353 3.885774 0.99720 1.765499 3.892793 0.99876 1.769651 3.899798 1.01269 1.807099 3.961835 1.01608 1.816289 3.976759 1.01946 1.825512 3.991625 1.02285 1.834768 4.006431 1.02624 1.844057 4.021180 1.02963 1.853377 4.035871 1.03302 1.862729 4.050504 1.03640 1.872111 4.065080 1.03979 1.881524 4.079598 1.04319 1.890966 4.094060 1.04658 1.900438 4.108465 1.04997 1.909939 4.122814 1.05336 1.919467 4.137106 1.05675 1.929023 4.151343 1.06014 1.938607 4.165525 1.06354 1.948217 4.179651 1.06693 1.957854 4.193723 1.07033 1.967516 4.207740 1.07372 1.977204 4.221702 1.07711 1.986917 4.235611 1.08051 1.996654 4.249465 1.08391 2.006416 4.263267 1.08730 2.016201 4.277015 1.09070 2.026010 4.290710 1.09410 2.035841 4.304352 1.09750 2.045695 4.317942 1.10089 2.055570 4.331480 1.10429 2.065468 4.344966 1.10769 2.075387 4.358399 1.11109 2.085327 4.371782 1.11449 2.095287 4.385114 1.11789 2.105268 4.398395 1.12129 2.115268 4.411625 1.12470 2.125288 4.424806 1.12810 2.135328 4.437936 1.13150 2.145385 4.451016 1.13490 2.155462 4.464046 1.13831 2.165556 4.477028 1.14171 2.175669 4.489960 1.14511 2.185799 4.502843 1.14852 2.195946 4.515678 1.15192 2.206110 4.528465 1.15533 2.216290 4.541204 1.15874 2.226487 4.553895 1.16214 2.236700 4.566538 1.16555 2.246929 4.579134 1.16896 2.257173 4.591683 1.17237 2.267432 4.604185 1.17578 2.277706 4.616641 1.17918 2.287995 4.629050 1.18259 2.298297 4.641413 1.18600 2.308614 4.653731 1.18942 2.318945 4.666002 1.19283 2.329289 4.678228 1.19624 2.339647 4.690410 1.19965 2.350017 4.702546 1.20306 2.360400 4.714637 1.20647 2.370796 4.726684 1.20989 2.381204 4.738687 1.21330 2.391624 4.750646 1.21672 2.402056 4.762561 1.22013 2.412500 4.774432 1.22355 2.422955 4.786260 1.22696 2.433421 4.798045 1.23038 2.443898 4.809787 1.23379 2.454386 4.821487 1.23721 2.464884 4.833143 1.24063 2.475392 4.844758 1.24405 2.485911 4.856331 1.24747 2.496439 4.867861 1.25088 2.506978 4.879350 1.25430 2.517525 4.890798 1.25772 2.528082 4.902205 1.26114 2.538648 4.913570 1.26456 2.549223 4.924895 1.26799 2.559807 4.936179 1.27141 2.570399 4.947423 1.27483 2.581000 4.958627 1.27825 2.591609 4.969790 1.28168 2.602226 4.980914 1.28510 2.612850 4.991998 1.28852 2.623482 5.003043 1.29195 2.634122 5.014049 1.29537 2.644769 5.025016 1.29880 2.655424 5.035944 1.30222 2.666085 5.046833 1.30565 2.676753 5.057684 1.30908 2.687428 5.068497 1.31251 2.698109 5.079272 1.31593 2.708797 5.090009 1.31936 2.719491 5.100708 1.32279 2.730191 5.111370 1.32622 2.740897 5.121995 1.32965 2.751609 5.132582 1.33308 2.762326 5.143133 1.33651 2.773049 5.153647 1.33994 2.783777 5.164125 1.34337 2.794511 5.174566 1.34680 2.805250 5.184971 1.35024 2.815993 5.195340 1.35367 2.826742 5.205673 1.35710 2.837495 5.215970 1.36054 2.848253 5.226232 1.36397 2.859015 5.236459 1.36741 2.869782 5.246651 1.37084 2.880552 5.256808 1.37428 2.891327 5.266929 1.37771 2.902106 5.277017 1.38115 2.912889 5.287070 1.38459 2.923675 5.297088 1.38803 2.934465 5.307073 1.39146 2.945259 5.317023 1.39490 2.956056 5.326940 1.39834 2.966856 5.336823 1.40178 2.977660 5.346673 1.40522 2.988466 5.356490 1.40866 2.999276 5.366273 1.41210 3.010088 5.376024 1.41554 3.020903 5.385741 1.41899 3.031721 5.395426 1.42243 3.042542 5.405079 1.42587 3.053365 5.414699 1.42931 3.064190 5.424287 1.43276 3.075018 5.433843 1.43620 3.085848 5.443368 1.43965 3.096680 5.452860 1.44309 3.107514 5.462321 1.44654 3.118349 5.471750 1.44998 3.129187 5.481149 1.45343 3.140027 5.490516 1.45688 3.150868 5.499852 1.46032 3.161711 5.509158 1.46377 3.172555 5.518433 1.46722 3.183401 5.527677 1.47067 3.194248 5.536891 1.47412 3.205096 5.546075 1.47757 3.215945 5.555228 1.48102 3.226796 5.564352 1.48447 3.237647 5.573446 1.48792 3.248500 5.582510 1.49137 3.259353 5.591545 1.49482 3.270207 5.600550 1.49828 3.281062 5.609526 1.50173 3.291918 5.618473 1.50518 3.302774 5.627391 1.50864 3.313631 5.636281 1.51209 3.324488 5.645141 1.51555 3.335346 5.653973 1.51900 3.346203 5.662777 1.52246 3.357061 5.671552 1.52591 3.367920 5.680299 1.52937 3.378778 5.689018 1.53283 3.389636 5.697709 1.53628 3.400495 5.706373 1.53974 3.411353 5.715009 1.54320 3.422211 5.723617 1.54666 3.433069 5.732198 1.55012 3.443927 5.740752 1.55358 3.454784 5.749278 1.55704 3.465642 5.757778 1.56050 3.476498 5.766251 1.56396 3.487355 5.774697 1.56742 3.498210 5.783116 1.57089 3.509065 5.791509 1.57435 3.519920 5.799875 1.57781 3.530774 5.808215 1.58128 3.541627 5.816529 1.58474 3.552479 5.824817 1.58820 3.563330 5.833080 1.59167 3.574181 5.841316 1.59514 3.585031 5.849527 1.59860 3.595879 5.857712 1.60207 3.606727 5.865872 1.60553 3.617573 5.874006 1.60900 3.628419 5.882115 1.61247 3.639263 5.890200 1.61594 3.650106 5.898259 1.61941 3.660948 5.906293 1.62288 3.671789 5.914303 1.62635 3.682628 5.922288 1.62982 3.693466 5.930248 1.63329 3.704302 5.938184 1.63676 3.715137 5.946096 1.64023 3.725970 5.953984 1.64370 3.736802 5.961847 1.64717 3.747632 5.969687 1.65065 3.758461 5.977502 1.65412 3.769288 5.985294 1.65759 3.780113 5.993062 1.66107 3.790937 6.000807 1.66454 3.801759 6.008528 1.66802 3.812579 6.016227 1.67150 3.823397 6.023901 1.67497 3.834213 6.031553 1.67845 3.845028 6.039181 1.68193 3.855840 6.046787 1.68540 3.866651 6.054370 1.68888 3.877459 6.061930 CONDITIONS: film_thickness: 105e-9 substrate: Si annealing_temperature: 973