# Gas Library for composition analysis # Fragmentation ratio of a gas in this library is just for reference. # The real ratio obtained from your mass spectrometer may be different. # Usually the higher mass, the lower intensity than the ones on this library. # Adjust the peak intensities in the library to fit spectra you acquire, # if you know what you are doing (Make a backup before changing the values in the library). # Adjust the sensitivity factor, if you know the real partial pressure of the gas, # to match the principal peak intensity of the gas to the partial pressure of the gas # Reduction ratio is for UGA systems which samples gases in the atmospheric pressure. # The sampling partial pressure is reduced to the vacuum chamber partial pressure to operate # the mass spectrometer safely. # Each gas consists of 3 lines # "Name of gas" "Sensitivity factor" "Reduction factor" # Peak positions (AMU) # Percent peak intensities with respect to the principal peak "Acetic Acid" 1.0 1.0 43 45 60 15 42 29 14 44 28 13 100.0 81.0 43.0 27.0 21.0 15.0 12.0 8.5 6.1 5.8 "Acetone" 1.0 1.0 43 15 58 27 14 42 26 29 28 39 100.0 45.0 25.0 8.0 8.0 8.0 5.0 4.6 4.5 4.4 "Acetophenone" 1.0 1.0 105 77 120 51 43 50 78 106 39 74 100.0 83.0 33.0 31.0 16.0 13.0 9.0 7.5 5.5 4.6 "Acetylene" 1.0 1.0 26 25 13 24 27 12 28 14 0 0 100.0 20.0 5.5 5.5 3.0 3.0 0.2 0.2 0.0 0.0 "Air" 1.0 1.0 28 32 14 16 40 0 0 0 0 0 100.0 27.0 6.0 3.0 1.0 0.0 0.0 0.0 0.0 0.0 "Ammonia" 1.0 1.0 17 16 15 14 18 0 0 0 0 0 100.0 80.0 8.0 2.0 0.5 0.0 0.0 0.0 0.0 0.0 "Aniline" 1.0 1.0 93 66 65 39 92 94 40 41 67 54 100.0 32.0 16.0 13.0 10.0 7.0 4.5 4.5 4.0 3.5 "Anisole" 1.0 1.0 108 65 78 39 51 77 93 79 0 0 100.0 76.0 60.0 44.0 21.0 20.0 16.0 14.0 0.0 0.0 "Argon" 1.0 1.0 40 20 36 38 18 100.0 10.0 0.3 0.1 0.1 "Benzene" 1.0 1.0 78 51 52 50 77 39 79 76 74 26 100.0 22.0 20.0 19.0 15.0 14.0 6.5 5.5 5.0 5.0 "Benzoic acid" 1.0 1.0 105 77 122 51 50 28 39 78 74 106 100.0 89.0 80.0 35.0 30.0 18.0 11.0 10.0 8.0 7.5 "1,3-Butadiene" 1.0 1.0 39 54 27 53 28 50 26 51 52 25 100.0 83.0 68.0 59.0 46.0 31.0 29.0 24.0 11.0 5.5 "Butane" 1.0 1.0 43 29 27 28 41 39 42 58 15 26 100.0 44.0 37.0 32.0 27.0 13.0 12.0 12.0 6.0 5.0 "Butanoic acid" 1.0 1.0 60 27 73 42 41 43 29 45 0 0 100.0 50.0 27.0 25.0 24.0 22.0 21.0 19.0 0.0 0.0 "2-Butanone" 1.0 1.0 43 72 29 27 57 42 26 28 44 39 100.0 24.0 19.0 12.0 7.0 5.0 4.0 3.0 2.5 2.0 "Carbon dioxide" 1.0 1.0 44 28 16 12 45 46 0 0 0 0 100.0 11.0 9.0 6.0 1.0 0.5 0.0 0.0 0.0 0.0 "Carbon monoxide" 1.0 1.0 28 12 16 29 14 30 0 0 0 0 100.0 5.0 2.0 1.0 1.0 0.2 0.0 0.0 0.0 0.0 "C2HCl3" 1.0 1.0 95 130 132 60 97 35 134 47 62 37 100.0 90.0 85.0 65.0 64.0 40.0 27.0 26.0 21.0 13.0 "CCl4" 1.0 1.0 117 119 121 82 47 84 35 28 49 36 100.0 98.0 31.0 24.0 23.0 16.0 14.0 8.2 8.0 6.0 "CF4" 1.0 1.0 69 50 19 31 25 70 0 0 0 0 100.0 12.0 7.0 5.0 4.0 1.0 0.0 0.0 0.0 0.0 "CH2Cl2" 1.0 1.0 49 84 86 51 47 48 88 50 85 43 100.0 64.0 39.0 31.0 14.0 8.0 6.0 3.0 2.0 2.0 "CH3Cl" 1.0 1.0 50 15 52 49 14 47 35 13 51 48 100.0 72.0 31.0 11.0 8.0 7.0 6.0 5.0 4.0 3.5 "CH3F" 1.0 1.0 15 34 33 31 32 29 16 35 0 0 100.0 95.0 90.0 10.0 9.0 2.0 1.0 1.0 0.0 0.0 "CHCl3" 1.0 1.0 83 85 47 35 48 49 87 37 50 82 100.0 64.0 35.0 19.0 16.0 12.0 10.0 6.0 5.0 4.0 "Chlorobenzene" 1.0 1.0 112 77 114 51 50 75 113 76 78 28 100.0 63.0 33.0 29.0 14.0 8.0 6.5 5.0 5.0 4.0 "Cyclohexane" 1.0 1.0 56 84 41 27 55 39 42 69 28 43 100.0 71.0 70.0 37.0 36.0 35.0 30.0 23.0 18.0 14.0 "Cyclopentane" 1.0 1.0 42 70 41 55 39 27 40 29 28 43 100.0 30.0 29.0 29.0 22.0 15.0 7.0 5.0 4.0 3.5 "Diborane" 1.0 1.0 26 27 24 25 23 11 13 12 0 0 100.0 96.0 95.0 57.0 46.0 28.0 24.0 18.0 0.0 0.0 "Dimethyl amine" 1.0 1.0 44 45 18 28 43 42 15 46 27 41 100.0 81.0 32.0 30.0 19.0 15.0 9.0 5.0 4.5 4.5 "Dimethyl ether" 1.0 1.0 45 29 15 46 14 31 13 30 0 0 100.0 79.0 57.0 46.0 13.0 7.0 5.0 4.0 0.0 0.0 "DP OIL DC705" 1.0 1.0 78 76 39 43 91 0 0 0 0 0 100.0 83.0 73.0 59.0 32.0 0.0 0.0 0.0 0.0 0.0 "DP OIL Fomblin" 1.0 1.0 69 20 16 31 97 47 0 0 0 0 100.0 28.0 16.0 9.0 8.0 8.0 0.0 0.0 0.0 0.0 "DP OIL PPE" 1.0 1.0 50 77 63 62 64 38 0 0 0 0 100.0 89.0 29.0 27.0 21.0 7.0 0.0 0.0 0.0 0.0 "Ethane" 1.0 1.0 28 27 30 26 29 25 15 14 0 0 100.0 33.0 26.0 23.0 21.0 3.0 3.0 2.5 0.0 0.0 "Ethene" 1.0 1.0 28 27 26 25 14 24 13 12 29 0 100.0 65.0 62.0 12.0 8.0 3.7 3.5 2.1 2.2 0.0 "Ethyl acetate" 1.0 1.0 43 29 45 61 27 15 70 42 26 73 100.0 21.0 14.0 12.0 12.0 12.0 10.5 10.0 4.0 4.0 "Ethyl alcohol" 1.0 1.0 31 45 27 29 46 26 43 18 30 19 100.0 34.0 24.0 23.0 17.0 8.5 7.5 5.5 6.0 2.3 "Ethylbenzene" 1.0 1.0 91 106 51 39 65 77 78 92 27 105 100.0 32.0 13.0 10.0 8.5 8.4 8.4 7.5 6.0 5.9 "Fluorobenzene" 1.0 1.0 96 70 97 50 75 95 51 39 0 0 100.0 17.0 7.0 6.0 6.0 6.0 4.0 4.0 0.0 0.0 "Formaldehyde" 1.0 1.0 29 30 28 15 14 13 12 31 0 0 100.0 58.0 24.0 4.0 1.0 1.0 1.0 0.5 0.0 0.0 "Formamide" 1.0 1.0 45 29 44 27 43 28 42 15 0 0 100.0 28.0 27.0 12.0 12.0 10.0 2.0 1.0 0.0 0.0 "Formic acid" 1.0 1.0 29 46 45 17 28 44 16 12 13 30 100.0 61.0 49.0 17.0 17.0 10.0 5.0 3.5 3.0 1.5 "H2S" 1.0 1.0 34 32 33 1 36 35 0 0 0 0 100.0 44.0 42.0 5.0 4.0 2.5 0.0 0.0 0.0 0.0 "Halocarbon 11" 1.0 1.0 101 103 35 66 47 31 0 0 0 0 100.0 60.0 16.0 15.0 12.0 10.0 0.0 0.0 0.0 0.0 "Halocarbon 12" 1.0 1.0 85 87 50 35 0 0 0 0 0 0 100.0 32.0 16.0 12.0 0.0 0.0 0.0 0.0 0.0 0.0 "Halocarbon 13" 1.0 1.0 69 85 50 31 35 87 0 0 0 0 100.0 15.0 14.0 9.0 7.0 5.0 0.0 0.0 0.0 0.0 "HBr" 1.0 1.0 80 82 79 81 40 41 2 0 0 0 100.0 98.0 45.0 44.0 4.0 3.0 1.0 0.0 0.0 0.0 "HCl" 1.0 1.0 36 38 35 37 0 0 0 0 0 0 100.0 32.0 17.0 5.0 0.0 0.0 0.0 0.0 0.0 0.0 "HCN" 1.0 1.0 27 26 12 28 13 14 12 0 0 0 100.0 17.0 4.0 2.0 2.0 2.0 1.0 0.0 0.0 0.0 "Helium" 1.0 1.0 4 0 0 0 0 0 0 0 0 0 100.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 "Heptane" 1.0 1.0 43 41 29 57 27 71 56 42 0 0 100.0 56.0 49.0 47.0 46.0 45.0 27.0 26.0 0.0 0.0 "Hexane" 1.0 1.0 57 43 41 29 27 56 42 39 0 0 100.0 78.0 77.0 61.0 57.0 45.0 39.0 27.0 0.0 0.0 "Hydrazine" 1.0 1.0 32 31 17 29 16 30 28 15 14 2 100.0 49.0 37.5 37.0 32.0 31.5 15.0 7.0 3.5 1.5 "Hydrogen" 1.0 1.0 2 1 0 0 0 0 0 0 0 0 100.0 5.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 0.0 "Hydronium" 1.0 1.0 19 20 100.0 0.3 "Krypton" 1.0 1.0 84 86 83 82 80 78 42 43 0 0 100.0 30.5 20.3 20.2 4.0 0.6 22.0 7.0 0.0 0.0 "m-Cresol" 1.0 1.0 108 107 79 39 77 27 51 53 0 0 100.0 85.0 35.0 31.0 29.0 17.0 17.0 15.0 0.0 0.0 "m-Xylene" 1.0 1.0 91 106 105 39 51 77 27 78 0 0 100.0 65.0 29.0 18.0 15.0 14.0 10.0 8.0 0.0 0.0 "Methane" 1.0 1.0 16 15 14 13 1 12 17 0 0 0 100.0 86.0 16.0 8.0 4.0 2.5 1.2 0.0 0.0 0.0 "Methanol" 1.0 1.0 31 29 32 15 28 14 30 13 12 2 100.0 72.0 67.0 41.5 12.0 10.0 9.0 5.5 3.0 2.4 "Methyl acetate" 1.0 1.0 43 74 28 42 59 44 32 29 0 0 100.0 52.0 38.0 19.0 17.0 8.0 8.0 6.0 0.0 0.0 "Methylamine" 1.0 1.0 30 28 31 29 27 26 32 18 0 0 100.0 88.0 56.0 16.0 16.0 2.5 1.2 1.0 0.0 0.0 "MP Oil" 1.0 1.0 43 41 57 55 71 39 56 0 0 0 100.0 91.0 73.0 64.0 20.0 19.0 19.0 0.0 0.0 0.0 "NO" 1.0 1.0 30 14 15 16 31 32 0 0 0 0 100.0 8.0 2.5 2.0 0.4 0.2 0.0 0.0 0.0 0.0 "NO2" 1.0 1.0 30 46 16 14 31 0 0 0 0 0 100.0 37.0 22.0 10.0 0.4 0.0 0.0 0.0 0.0 0.0 "N2O" 1.0 1.0 44 30 14 28 16 45 46 31 29 15 100.0 31.0 13.0 11.0 5.0 0.7 0.2 0.1 0.1 0.1 "Naphthalene" 1.0 1.0 128 127 129 51 64 102 126 63 77 75 100.0 11.5 10.0 8.0 7.0 7.0 6.0 5.0 4.0 4.0 "Neon" 1.0 1.0 20 22 21 0 0 0 0 0 0 0 100.0 9.7 0.3 0.0 0.0 0.0 0.0 0.0 0.0 0.0 "Nitrobenzene" 1.0 1.0 77 51 123 50 93 65 30 28 39 74 100.0 85.0 39.0 31.0 16.0 16.0 9.2 9.2 7.8 7.8 "Nitrogen" 1.0 1.0 28 14 29 0 0 0 0 0 0 0 100.0 6.0 0.8 0.0 0.0 0.0 0.0 0.0 0.0 0.0 "o-Xylene" 1.0 1.0 91 106 39 105 51 77 27 65 78 79 100.0 40.0 20.5 17.5 17.0 14.5 11.5 10.0 8.5 8.5 "o-Cresol" 1.0 1.0 108 107 77 79 39 90 51 27 0 0 100.0 75.0 34.0 33.0 28.0 25.0 21.0 20.0 0.0 0.0 "Octane" 1.0 1.0 43 57 85 41 71 29 56 42 0 0 100.0 30.0 25.0 25.0 19.0 17.0 14.0 10.0 0.0 0.0 "Oxygen" 1.0 1.0 32 16 34 33 0 0 0 0 0 0 100.0 7.0 0.4 0.1 0.0 0.0 0.0 0.0 0.0 0.0 "p-Xylene" 1.0 1.0 91 106 105 39 51 77 27 50 0 0 100.0 62.0 30.0 16.0 16.0 13.0 11.0 7.0 0.0 0.0 "p-Cresol" 1.0 1.0 107 108 77 79 51 39 27 53 50 52 100.0 91.0 28.0 21.0 19.0 17.0 17.0 15.0 12.0 10.0 "Pentane" 1.0 1.0 43 42 27 29 39 57 15 28 0 0 100.0 55.0 42.0 26.0 19.0 13.0 9.0 9.0 0.0 0.0 "Phenol" 1.0 1.0 94 66 39 65 40 55 47 38 95 51 100.0 25.0 25.0 21.0 14.0 10.0 7.0 7.0 6.0 5.0 "Phosgene" 1.0 1.0 63 65 35 37 98 28 100 70 44 47 100.0 34.0 21.0 7.0 7.0 7.0 4.5 4.0 3.5 2.5 "Phosphine" 1.0 1.0 34 33 31 32 2 15 0 0 0 0 100.0 33.0 32.0 13.0 1.0 1.0 0.0 0.0 0.0 0.0 "Propane" 1.0 1.0 29 28 27 44 43 39 41 26 15 42 100.0 60.0 47.0 27.0 23.0 21.0 14.5 12.0 11.0 6.0 "1-Propanol" 1.0 1.0 31 27 29 59 42 60 41 28 0 0 100.0 19.0 18.0 11.0 9.0 7.0 7.0 7.0 0.0 0.0 "2-Propanol" 1.0 1.0 45 43 27 29 41 19 31 42 0 0 100.0 19.0 17.0 12.0 7.0 6.0 6.0 5.0 0.0 0.0 "Propene" 1.0 1.0 41 39 42 27 40 26 15 14 25 13 100.0 77.0 66.0 42.0 29.0 14.0 8.0 6.0 3.5 3.0 "Propenoic acid" 1.0 1.0 27 72 55 26 45 28 25 44 0 0 100.0 76.0 60.0 54.0 35.0 22.0 13.0 13.0 0.0 0.0 "Propyne" 1.0 1.0 40 39 38 37 36 41 25 26 0 0 100.0 79.0 29.0 20.0 5.0 4.0 3.0 3.0 0.0 0.0 "Pyrrole" 1.0 1.0 67 41 39 40 28 38 37 66 0 0 100.0 58.0 58.0 51.0 42.0 20.0 12.0 7.0 0.0 0.0 "SF6" 1.0 1.0 127 89 108 51 54 70 32 35 0 0 100.0 27.0 9.0 8.0 7.0 5.0 5.0 5.0 0.0 0.0 "SiF4" 1.0 1.0 85 86 28 33 87 47 19 104 0 0 100.0 5.0 12.0 10.0 10.0 3.0 2.0 2.0 0.0 0.0 "SiH4" 1.0 1.0 30 31 29 28 32 33 2 15 0 0 100.0 78.0 29.0 27.0 7.0 2.0 2.0 1.0 0.0 0.0 "SO2" 1.0 1.0 64 48 32 16 66 50 65 24 0 0 100.0 49.0 10.0 5.0 5.0 2.0 1.0 1.0 0.0 0.0 "Toluene" 1.0 1.0 91 92 39 65 51 63 50 27 93 90 100.0 69.0 20.0 15.0 11.0 10.0 7.5 6.5 5.5 5.0 "Turbopump Oil" 1.0 1.0 43 57 41 55 71 69 0 0 0 0 100.0 88.0 76.0 73.0 52.0 49.0 0.0 0.0 0.0 0.0 "Water" 1.0 1.0 18 17 16 20 19 0 0 0 0 0 100.0 24.0 2.0 0.3 0.1 0.0 0.0 0.0 0.0 0.0 "Xenon" 1.0 1.0 132 129 131 134 136 130 128 124 126 66 100.0 98.3 78.8 38.8 33.0 15.2 7.1 0.4 0.3 15.0